公开(公告)号：US3560277A

公开(公告)日：1971-02-02

申请号：US3560277D

申请日：1968-01-15

Applicant: IBM

Inventor： LLOYD ROBERT H F ,  DAVIS STANLEY P ,  MYERS CHARLES FRANK

IPC: H01L21/8222 ,  H01L27/02 ,  H01L7/36

CPC classification number: H01L21/8222 ,  H01L27/0229 ,  Y10S148/037 ,  Y10S148/085 ,  Y10S148/151 ,  Y10S438/901

Abstract: A PROCESS FOR MAKING SEMICONDUCTOR BODIES, SAID BODIES HAVING POWER CONNECTIONS AND DECOUPLING MEANS INTERNAL THERETO, SAID CONNECTIONS CONPRISING DIFFUSED LOW RESISTANCE SEMICONDUCTOR REGIONS, WHEREIN SAID PROCESS COMPRISES THE STEPS OF FORMING THE LOW RESISTANCE REGIONS AND THE DECOUPLING MEANS BY A SERIES OF DIFFUSIONS INCLUDING CONTROLLED OUT-DIFFUSIONS.