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公开(公告)号：US3419956A
公开(公告)日：1969-01-07
申请号：US52227866
申请日：1966-01-21
Applicant: IBM
Inventor： KREN JOHN G , JOSEPH REGH , SETO DAVID K
IPC: C23F1/02 , H01L21/00 , H01L21/762
CPC classification number: H01L21/76297 , H01L21/00 , Y10S148/051 , Y10S148/085 , Y10S438/928 , Y10S438/977
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