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公开(公告)号：US3406366A
公开(公告)日：1968-10-15
申请号：US52148766
申请日：1966-01-13
Applicant: IBM
Inventor： RICHARD KONTRIMAS , KROHL ROBERT J , WAJDA EDWARD S
CPC classification number: H01L21/00 , G01K7/22 , G01K7/223 , H01C7/022 , H01C7/04 , H01L49/02 , Y10S148/085 , Y10S148/15
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