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Patent Agency Ranking
公开(公告)号：US20230366766A1
公开(公告)日：2023-11-16
申请号：US18030438
申请日：2020-10-14
Applicant: INFICON AG
Inventor： Christian BERG , Rolf ENDERES , Martin WÜEST , Bernhard ANDREAUS
CPC classification number: G01L21/34 , G01L21/32 , G01L27/005 , G01L9/0075
Abstract: A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.
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公开(公告)号：US20250046589A1
公开(公告)日：2025-02-06
申请号：US18926803
申请日：2024-10-25
Applicant: INFICON AG
Inventor： Urs WÄLCHLI , Stefan KAISER , Bernhard ANDREAUS , Martin WÜEST , Astrid WALDNER , Michael TREFZER
Abstract: A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.
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公开(公告)号：US20190043702A1
公开(公告)日：2019-02-07
申请号：US15762927
申请日：2015-09-23
Applicant: INFICON AG
Inventor： Martin WÜEST
Abstract: The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
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公开(公告)号：US20240194465A1
公开(公告)日：2024-06-13
申请号：US18431091
申请日：2024-02-02
Applicant: INFICON AG
Inventor： Urs WÄLCHLI , Stefan KAISER , Bernhard ANDREAUS , Martin WÜEST , Astrid WALDNER , Michael TREFZER
Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.
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公开(公告)号：US20230375428A1
公开(公告)日：2023-11-23
申请号：US18030430
申请日：2020-10-14
Applicant: INFICON AG
Inventor： Bernhard ANDREAUS , Rolf ENDERES , Christian BERG , Martin WÜEST
IPC: G01L27/00
CPC classification number: G01L27/002
Abstract: Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1′ with a first pressure measurement range and a second pressure sensor 1″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for earring out the method and to a computer program product.
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