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公开(公告)号：US08296090B2
公开(公告)日：2012-10-23
申请号：US12595821
申请日：2008-04-02
Applicant: Junji Aoki , Hirokazu Kitaura , Said Boumsellek
Inventor： Junji Aoki , Hirokazu Kitaura , Said Boumsellek
CPC classification number: H01J49/0009 , G01L21/30 , H01J41/02 , H01J41/10 , H01J49/0027
Abstract: A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer to ionize a sample gas, a first ion detector and a second ion detector each configured to detect a respective ion from ionizer, and each being disposed a respective distance from the ionizer on an opposite side of the ionizer, the respective distances being different from each other, a filter interposed between the ionizer and the first ion detector to selectively allow ions from the ionizer to pass therethrough, and an arithmetic device to correct a partial pressure of a specific component obtained from the first ion detector and selected by the filter by using a first total pressure of the sample gas obtained from the first ion detector and a second total pressure of the sample gas obtained from the second ion detector.
Abstract translation: 使用四极质谱法的气体分析仪等设置有电离器，用于离子化样品气体，第一离子检测器和第二离子检测器，每个离子检测器和第二离子检测器被配置为检测来自电离器的相应离子， 电离器在离子交换器的相对侧上，各自的距离彼此不同，插入在离子发生器和第一离子检测器之间以选择性地允许来自离子发生器的离子通过的过滤器，以及用于校正离子发生器的分压的运算装置 由第一离子检测器获得的特定成分，并通过使用从第一离子检测器获得的样品气体的第一总压力和由第二离子检测器获得的样品气体的第二总压力由过滤器选择。
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公开(公告)号：US08138473B2
公开(公告)日：2012-03-20
申请号：US12599301
申请日：2008-04-14
Applicant: Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
Inventor： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
CPC classification number: G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
Abstract: A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.
Abstract translation: 本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。 所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与 由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。
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公开(公告)号：US20100076712A1
公开(公告)日：2010-03-25
申请号：US12595821
申请日：2008-04-02
Applicant: Junji Aoki , Hirokazu Kitaura , Boumsellek Said
Inventor： Junji Aoki , Hirokazu Kitaura , Boumsellek Said
CPC classification number: H01J49/0009 , G01L21/30 , H01J41/02 , H01J41/10 , H01J49/0027
Abstract: A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer 211 to ionize a sample gas, a first ion detector 212 and a second ion detector 213 each configured to detect a respective ion from ionizer 211, and each being disposed a respective distance from the ionizer 211 on an opposite side of the ionizer 211, the respective distances being different from each other, a filter 214 interposed between the ionizer 211 and the first ion detector 212 to selectively allow ions from the ionizer 211 to pass therethrough, and an arithmetic device 3 to correct a partial pressure PP1 of a specific component obtained from the first ion detector 212 and selected by the filter 214 by using a first total pressure TP1 of the sample gas obtained from the first ion detector 212 and a second total pressure TP2 of the sample gas obtained from the second ion detector 213.
Abstract translation: 使用四极质谱法的气体分析仪等设置有离子化器211以离子化样品气体，第一离子检测器212和第二离子检测器213，每个被配置为检测来自离子发生器211的各离子，并且每个离子化 在离子交换器211的相对侧上离离电离器211的相应距离，各自的距离彼此不同，插入在离子发生器211和第一离子检测器212之间的滤波器214，以选择性地允许来自离子发生器211的离子通过， 以及算术装置3，其通过使用从第一离子检测器212获得的样品气体的第一总压TP1和第二总量来校正由第一离子检测器212获得并由过滤器214选择的特定成分的分压PP1， 从第二离子检测器213获得的样品气体的压力TP2。
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公开(公告)号：US07057170B2
公开(公告)日：2006-06-06
申请号：US10798376
申请日：2004-03-12
Applicant: Carl B. Freidhoff
Inventor： Carl B. Freidhoff
CPC classification number: H01J41/10 , H01J49/0013 , H01J49/288
Abstract: A solid state compact ion gauge includes an electron source, a gate electrode, an electron collector, a gas ionizer, an ion anode, and a detector all formed within a cavity of a semiconductor substrate formed of two halves bonded together and having open sides for receiving a gase sample. A sample of gas having multiple gas constituents flows into the cavity from the side where gas molecules collide with electrons flowing from the source to the collector forming ions. The ions are forced under an electric field to the detector which includes a set of detectors for sensing the constituent ions.
Abstract translation: 固态紧凑型离子计包括电子源，栅电极，电子收集器，气体离子发生器，离子阳极和检测器，它们全部形成在半导体衬底的空腔内，该半导体衬底由两半结合在一起并具有开放侧面 接收气体样品。 具有多个气体成分的气体样品从气体分子与从源极流到集电器形成离子的电子碰撞的一侧流入空腔。 离子被强制在检测器的电场下，其包括用于感测组成离子的一组检测器。
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公开(公告)号：US5834770A
公开(公告)日：1998-11-10
申请号：US891694
申请日：1997-07-11
Applicant: David H. Holkeboer , Louis C. Frees
Inventor： David H. Holkeboer , Louis C. Frees
Abstract: A mass spectrometer gas analyzer includes an ion source for producing ions of a sample gas in a defined ion volume. An ion analyzer collects and analyzes a first portion of the produced ions to determine a partial pressure for a selected gas species within the sample gas. An oppositely disposed ion collector collects a second portion of the ions to determine a total pressure of the contained gas sample. A collecting surface of the ion collector is positioned relative to the incoming ion beam to allow collection of ion current but the surface is configured such that a substantial portion of a plurality of secondary electrons produced by ion bombardment with the ion collector are deflected away from the ionization volume. The partial pressure is thus determined by the ion analyzer without secondary electrons entering the ion analyzer.
Abstract translation: 质谱仪气体分析仪包括用于产生在限定离子体积中的样品气体的离子的离子源。 离子分析仪收集并分析所产生的离子的第一部分以确定样品气体中选定气体种类的分压。 相对设置的离子收集器收集第二部分离子以确定所含气体样品的总压力。 离子收集器的收集表面相对于入射离子束定位以允许离子电流的收集，但是表面被配置为使得通过与离子收集器的离子轰击产生的多个二次电子的大部分偏离 电离体积。 分压因此由离子分析仪确定，而没有二次电子进入离子分析仪。
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Patent Agency Ranking
公开(公告)号：US20100213363A1
公开(公告)日：2010-08-26
申请号：US12599301
申请日：2008-04-14
Applicant: Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
Inventor： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
IPC: H01J49/26
CPC classification number: G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
Abstract: A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.
Abstract translation: 本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。 所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与 由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。
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公开(公告)号：US07332714B2
公开(公告)日：2008-02-19
申请号：US11375063
申请日：2006-03-15
Applicant: Fumio Watanabe , Reiki Watanabe
Inventor： Fumio Watanabe , Reiki Watanabe
CPC classification number: H01J49/147 , H01J41/10 , H01J49/4215
Abstract: In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.
Abstract translation: 在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极 其由栅电极和离子聚焦电极组成。 并且，仅具有四极质谱仪的真空系统，其根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。
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8.再颁专利公开(公告)号：USRE38138E1
公开(公告)日：2003-06-10
申请号：US09686194
申请日：2000-10-06
Applicant: David H. Holkeboer , Robert E. Ellefson
Inventor： David H. Holkeboer , Robert E. Ellefson
IPC: H01J4940
CPC classification number: H01J49/0027 , G01L21/30 , H01J41/10 , H01J49/02 , H01J49/42
Abstract: A method for linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.
Abstract translation: 用于线性化四极质谱系统的灵敏度的方法，以允许传感器更准确地报告高压区域中的气体的分压，其中通过多种损失机制实现所报告的数据。 根据本发明，校正因子可以经验地应用，或者在四极质谱仪系统中的软件可以配备校正软件来扩大质谱仪的有用范围。
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公开(公告)号：US20240194465A1
公开(公告)日：2024-06-13
申请号：US18431091
申请日：2024-02-02
Applicant: INFICON AG
Inventor： Urs WÄLCHLI , Stefan KAISER , Bernhard ANDREAUS , Martin WÜEST , Astrid WALDNER , Michael TREFZER
Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.
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公开(公告)号：US20090090854A1
公开(公告)日：2009-04-09
申请号：US11915301
申请日：2006-05-17
Applicant: Toyoaki Nakajima , Hideki Yoshizawa
Inventor： Toyoaki Nakajima , Hideki Yoshizawa
IPC: B01D59/44
Abstract: A mass spectrometer is provided which is mounted on a wall portion of a chamber and analyzes a gas to be analyzed existing in the chamber. The mass spectrometer includes: a measurement unit which is inserted into the chamber at the time of mounting the mass spectrometer to the chamber and measures each partial pressure of gaseous components in the gas to be analyzed with respect to mass-to-charge ratios; a control unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and is used to manipulate the measurement unit; and a display unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and displays the measurement result of the measurement unit. Here, the measurement unit, the control unit, and the display unit are disposed close to each other.
Abstract translation: 提供了一种质谱仪，其安装在室的壁部分上并分析存在于腔室中的待分析气体。 质谱仪包括：测量单元，其在将质谱仪安装到室时插入室中，并测量关于质荷比的待分析气体中的气体组分的每个分压; 控制单元，其在将所述质谱仪安装在所述室上时设置在所述壁部的外侧，并用于操纵所述测量单元; 以及显示单元，其在将质谱仪安装在室上时设置在壁部的外侧，并显示测量单元的测量结果。 这里，测量单元，控制单元和显示单元彼此靠近配置。
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