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公开(公告)号:US20250112162A1
公开(公告)日:2025-04-03
申请号:US18375469
申请日:2023-09-30
Applicant: Intel Corporation
Inventor: Zheng Kang , Tchefor Ndukum , Yosuke Kanaoka , Jeremy Ecton , Gang Duan , Jefferson Kaplan , Yonggang Yong Li , Minglu Liu , Brandon C. Marin , Bai Nie , Srinivas Pietambaram , Shriya Seshadri , Bohan Shan , Deniz Turan , Vishal Bhimrao Zade
IPC: H01L23/538 , H01L21/48 , H01L21/56 , H01L23/00
Abstract: An electronic package comprises a substrate core; one or more dielectric material layers over the substrate core and having a lower dielectric material layer, and a plurality of metallization layers comprising an upper-most metallization layer; an integrated circuit (IC) die embedded within the dielectric material and below the upper-most metallization layer; and at least one conductive feature below and coupled to the IC die. A downwardly facing surface of the conductive feature is located on the lower dielectric material layer and defines a horizontal plane at a junction between the conductive feature and the lower dielectric material layer. The lower dielectric material layer has an upper facing surface facing in a direction of the IC die adjacent the conductive feature that is vertically offset from the horizontal plane.
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公开(公告)号:US20250096052A1
公开(公告)日:2025-03-20
申请号:US18469674
申请日:2023-09-19
Applicant: Intel Corporation
Inventor: Mohamed R. Saber , Hanyu Song , Fanyi Zhu , Bai Nie , Srinivas V. Pietambaram , Deniz Turan , Yonggang Li , Naiya Soetan-Dodd , Shuren Qu
IPC: H01L23/15 , H01L21/48 , H01L23/00 , H01L23/48 , H01L25/065
Abstract: Microelectronic assemblies with glass cores that have undergone localized thermal healing and/or localized doping in regions adjacent to glass surface are disclosed. In one example, a microelectronic assembly includes a glass core having a first face, an opposing second face, a sidewall extending between the first face and the second face, a surface region, and a bulk region, where the surface region is a portion of the glass core that starts at a surface of the first face, the second face, or the sidewall and extends from the surface into the glass core by a total depth of up to about 50 micron, the bulk region is a portion of the glass core further away from the surface than the surface region, and a density of the surface region is higher than a density of the bulk region, e.g., at least about 5% higher or at least about 7.5% higher.
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