公开(公告)号：US20210090946A1

公开(公告)日：2021-03-25

申请号：US16578698

申请日：2019-09-23

Applicant: Intel Corporation

Inventor： Darko GRUJICIC ,  Matthew ANDERSON ,  Adrian BAYRAKTAROGLU ,  Roy DITTLER ,  Benjamin DUONG ,  Tarek A. IBRAHIM ,  Rahul N. MANEPALLI ,  Suddhasattwa NAD ,  Rengarajan SHANMUGAM ,  Marcel WALL

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/532

Abstract: Embodiments herein relate to systems, apparatuses, and/or processes directed to a package or a manufacturing process flow for creating a package that uses multiple seeding techniques to fill vias in the package. Embodiments include a first layer of copper seeding coupled with a portion of the boundary surface and a second layer of copper seeding coupled with the boundary surface or the first layer of copper seeding, where the first layer of copper seeding and the second layer of copper seeding have a combined thickness along the boundary surface that is greater than a threshold value.