公开(公告)号：US11675208B1

公开(公告)日：2023-06-13

申请号：US17300091

申请日：2021-03-05

Applicant: J.A. WOOLLAM CO., INC

Inventor： Stefan Schoeche ,  Martin M. Liphardt ,  Ping He ,  Jeremy A Van Derslice ,  Craig M. Herzinger ,  Jeffrey S. Hale ,  Brian D. Guenther ,  Duane E. Meyer ,  John A Woollam ,  James D. Welch

IPC: G02B27/48 ,  G01B9/02 ,  G01B11/24

CPC classification number: G02B27/48 ,  G01B9/02084 ,  G01B11/24

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.

公开(公告)号：US20220244169A1

公开(公告)日：2022-08-04

申请号：US17300660

申请日：2021-09-16

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Ping He ,  Martin M. Liphardt ,  Jeremy A. Van Derslice ,  Craig M. Herzinger ,  Jeffrey S. Hale ,  Brian D. Guenther ,  Duane E. Meyer ,  Stefan Schoeche ,  James D. Welch

IPC: G01N21/21 ,  G02B27/42

Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.

公开(公告)号：US11740176B2

公开(公告)日：2023-08-29

申请号：US17803029

申请日：2022-01-18

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Stefan Schoeche ,  Craig M. Herzinger ,  Steven E. Green ,  Martin M. Liphardt ,  James D. Welch

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2021/213 ,  G01N2201/021 ,  G01N2201/06113 ,  G01N2201/12

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.

公开(公告)号：US11821833B2

公开(公告)日：2023-11-21

申请号：US17803102

申请日：2022-02-05

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Stefan Schoeche ,  Craig M. Herzinger ,  Steven E. Green ,  Martin M. Liphardt ,  James D. Welch

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2201/021 ,  G01N2201/06113 ,  G01N2201/12

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.

公开(公告)号：US20230194414A1

公开(公告)日：2023-06-22

申请号：US17803102

申请日：2022-02-05

Applicant: J.A WOOLLAM CO., INC.

Inventor： Stefan Schoeche ,  Craig M. Herzinger ,  Steven E. Green ,  Martin M. Liphardt ,  James D. Welch

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2201/12 ,  G01N2201/021 ,  G01N2201/06113

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.