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公开(公告)号:US11675208B1
公开(公告)日:2023-06-13
申请号:US17300091
申请日:2021-03-05
Applicant: J.A. WOOLLAM CO., INC
Inventor: Stefan Schoeche , Martin M. Liphardt , Ping He , Jeremy A Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , John A Woollam , James D. Welch
CPC classification number: G02B27/48 , G01B9/02084 , G01B11/24
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.
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公开(公告)号:US09851294B1
公开(公告)日:2017-12-26
申请号:US14545816
申请日:2015-06-24
Inventor: Tino Hofmann , Mathias M. Schubert , Stefan Schoeche , Sean Knight , Craig M. Herzinger , John A. Woollam , Greg K. Pribil , Thomas E. Tiwald
IPC: G01N21/3586 , G01N21/21 , G01N27/72 , G01J4/04
CPC classification number: G01N21/211 , G01J4/04 , G01N21/3586 , G01N27/72 , G01N2021/213
Abstract: System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
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公开(公告)号:US20220244169A1
公开(公告)日:2022-08-04
申请号:US17300660
申请日:2021-09-16
Applicant: J.A. WOOLLAM CO., INC.
Inventor: Ping He , Martin M. Liphardt , Jeremy A. Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , Stefan Schoeche , James D. Welch
Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
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公开(公告)号:US09976902B1
公开(公告)日:2018-05-22
申请号:US15731298
申请日:2017-05-22
Applicant: J.A. WOOLLAM CO., INC.
Inventor: Stefan Schoeche , Jeremy A. Van Derslice , Jeffrey S. Hale , Craig M. Herzinger
IPC: G01J4/00 , G01J3/447 , G06F17/17 , G01J4/04 , G01N21/21 , G06G7/30 , G03F7/004 , G06F17/12 , G06F17/18 , G06K15/22
CPC classification number: G01J3/447 , G01J4/04 , G01N21/211 , G01N2021/213 , G03F7/0042 , G06F17/12 , G06F17/17 , G06F17/175 , G06F17/18 , G06G7/30 , G06K15/225
Abstract: Methodology of characterizing pore size and distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on a Bruggerman effective medium.
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公开(公告)号:US10914866B1
公开(公告)日:2021-02-09
申请号:US16038004
申请日:2018-07-17
Inventor: Tino Hofmann , Daniel Fullager , Stefan Schoeche , Craig M. Herzinger , Susanne Madeline Lee , Erin Kathleen Sharma
Abstract: Materials comprising metamaterials exhibiting form-induced birefringence and anisotropic optical properties are provided. The disclosed articles comprise structures with critical dimensions which are on the order of or smaller than the wavelength for the gigahertz and terahertz spectral range. Methods of preparing same using stereolithography are disclosed. In a further aspect, the disclosed methods pertain to spectroscopic ellipsometry methods comprising a biaxial (orthorhombic) layer homogenization approach is to analyze the terahertz ellipsometric data obtained at three different sample azimuth orientations. The disclosed articles and methods demonstrate provide an avenue to fabricate metamaterials for the terahertz spectral range and allows tailoring of the polarizability and anisotropy of the host material. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present invention.
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公开(公告)号:US10175160B1
公开(公告)日:2019-01-08
申请号:US15932748
申请日:2018-04-20
Applicant: J.A. Woollam Co., Inc.
Inventor: Stefan Schoeche , Jeremy A. Van Derslice , Jeffrey S. Hale , Craig M. Herzinger
Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
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公开(公告)号:US11821833B2
公开(公告)日:2023-11-21
申请号:US17803102
申请日:2022-02-05
Applicant: J.A. WOOLLAM CO., INC.
Inventor: Stefan Schoeche , Craig M. Herzinger , Steven E. Green , Martin M. Liphardt , James D. Welch
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N2201/021 , G01N2201/06113 , G01N2201/12
Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
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公开(公告)号:US20230194414A1
公开(公告)日:2023-06-22
申请号:US17803102
申请日:2022-02-05
Applicant: J.A WOOLLAM CO., INC.
Inventor: Stefan Schoeche , Craig M. Herzinger , Steven E. Green , Martin M. Liphardt , James D. Welch
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N2201/12 , G01N2201/021 , G01N2201/06113
Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
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公开(公告)号:US11740176B2
公开(公告)日:2023-08-29
申请号:US17803029
申请日:2022-01-18
Applicant: J.A. WOOLLAM CO., INC.
Inventor: Stefan Schoeche , Craig M. Herzinger , Steven E. Green , Martin M. Liphardt , James D. Welch
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N2021/213 , G01N2201/021 , G01N2201/06113 , G01N2201/12
Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
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公开(公告)号:US10073120B1
公开(公告)日:2018-09-11
申请号:US15732252
申请日:2017-10-13
Inventor: Tino Hofmann , Mathias M. Schubert , Stefan Schoeche , Philipp Kuehne , Craig M. Herzinger , John A. Woollam , Gregory K. Pribil , Thomas E. Tiwald , Sean R. Knight
CPC classification number: G01R19/08 , G01N7/00 , G01N21/17 , G01N21/211 , G01N2021/212 , G06F17/12
Abstract: Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
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