公开(公告)号：US11428653B2

公开(公告)日：2022-08-30

申请号：US16897781

申请日：2020-06-10

Applicant: JEOL Ltd.

Inventor： Hideyuki Takahashi

IPC: G01N23/2252 ,  G01N23/2209

Abstract: Three ROIs, ROI-c, ROI-d, and ROI-e, are set for an Lα peak and an Lβ peak reflecting an electron state of a valance band. Accumulated values in the ROI-c, ROI-d, and ROI-e are respectively normalized with reference to an accumulated value in an ROI-a, to determine a sample vector. The sample vector is compared to a plurality of compound vectors corresponding to a plurality of compounds, and a compound forming the sample is estimated based on a compound vector having the highest similarity.

公开(公告)号：US20240085357A1

公开(公告)日：2024-03-14

申请号：US17941394

申请日：2022-09-09

Applicant: JEOL Ltd.

Inventor： Hideyuki Takahashi ,  Takaomi Yokoyama

IPC: G01N23/2252 ,  G06T11/00 ,  H01J37/244 ,  H01J37/28

CPC classification number: G01N23/2252 ,  G06T11/00 ,  H01J37/244 ,  H01J37/28 ,  G01N2223/079 ,  G01N2223/418 ,  G01N2223/507 ,  H01J2237/2445

Abstract: An electron beam accelerated using a first acceleration voltage is applied to respective positions on a sample to obtain spectra A at the respective positions, and an electron beam accelerated using a second acceleration voltage different from the first acceleration voltage is applied to the respective positions on the sample to obtain spectra B at the respective positions. Then, a spectral ratio A/B of the spectra is calculated at each of the positions to generate a waveform representing the spectral ratio A/B. The value of a spectral ratio A/B in an energy region of interest is extracted from each of the waveforms. The extracted values are mapped onto points corresponding to the respective positions on the sample, whereby a spectral map is generated. The spectral map is displayed.

公开(公告)号：US08983032B2

公开(公告)日：2015-03-17

申请号：US13856834

申请日：2013-04-04

Applicant: Japan Atomic Energy Agency ,  Jeol Ltd. ,  Shimadzu Corporation ,  Tohoku University

Inventor： Takashi Imazono ,  Masato Koike ,  Hideyuki Takahashi ,  Hiroyuki Sasai ,  Masami Terauchi

IPC: G21K1/06 ,  G01N23/20

CPC classification number: G21K1/06 ,  G01N23/20 ,  G21K1/062 ,  G21K1/067

Abstract: To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G1 to G3, the corresponding energy ranges for G1, G2, and G3 being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles α1 to α3 for G1 to G3 measured from the normal line of the diffraction grating are specified to be α1

Abstract translation: 为了覆盖宽波长带宽，分光装置使用三个变化的线间距凹面衍射光栅G1至G3，G1，G2和G3的相应能量范围分别为50至200,155至350和300至2200eV。 在各波长范围内，满足衍射条件。 为了在各波长区域中提供高通量和高分辨率，从衍射光栅的法线测量的G1至G3的入射角α1至α3被指定为α1<α2<α3。 将所有衍射光栅的法线叠加在公共法线上，为了满足α1<α2<α3，将G1至G3的中心位置＆Dgr; 1至＆Dgr; 3设置在法线上（如＆Dgr; 1 <＆Dgr; 2 <＆Dgr; 3）。 从G1到G3，可以选择一个衍射光栅。