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公开(公告)号：US4764439A
公开(公告)日：1988-08-16
申请号：US627877
申请日：1984-07-05
CPC分类号： H01G9/20 , H01M14/005
摘要： A method for converting solar energy to electricity is provided using solid-liquid interface photoelectrochemical cells wherein the liquid phase comprises a nonaqueous solvent, an electrolyte dissolved therein forming an ionically conductive solution and a redox couple suitable to accept and donate electrons from and to the electrodes. The redox couple is present in an amount sufficient to sustain a predetermined current and the concentrations of the electrolyte and redox couple in the solution are sufficient to provide no greater than a selected small voltage drop relative to the output voltage of the cell. The efficiency of conversion of light to electrical energy of such photoelectrochemical cells is 10% and greater.
摘要翻译： 使用固 - 液界面光电化学电池提供将太阳能转换成电的方法，其中液相包含非水溶剂，溶解在其中的形成离子导电溶液的电解质和适于从电极和电极接收和提供电子的氧化还原对 。 氧化还原对以足以维持预定电流的量存在，并且溶液中的电解质和氧化还原对的浓度足以相对于电池的输出电压提供不大于所选择的小电压降。 这种光电化学电池的光转换成电能的效率为10％以上。
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公开(公告)号：US4459343A
公开(公告)日：1984-07-10
申请号：US451336
申请日：1982-12-20
CPC分类号： H01M14/005 , H01G9/20
摘要： Solid-liquid interface photoelectrochemical cells are provided wherein the liquid phase comprises a nonaqueous solvent, an electrolyte dissolved therein forming an ionically conductive solution and a redox couple suitable to accept and donate electrons from and to the electrodes. The redox couple is present in an amount sufficient to sustain a predetermined current and the concentrations of the electrolyte and redox couple in the solution are sufficient to provide no greater than a selected small voltage drop relative to the output voltage of the cell. The efficiency of conversion of light to electrical energy of such photoelectrochemical cells are 10% and greater.
摘要翻译： 提供了固液界面光电化学电池，其中液相包含非水溶剂，溶解在其中的形成离子导电溶液的电解质和适于从电极接收和提供电子的氧化还原对。 氧化还原对以足以维持预定电流的量存在，并且溶液中的电解质和氧化还原对的浓度足以相对于电池的输出电压提供不大于所选择的小电压降。 光电化学电池的光转换能量的效率为10％以上。
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3.发明授权Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature 失效快速热加热装置和方法，包括用于测量基板温度的红外相机公开(公告)号：US06434327B1
公开(公告)日：2002-08-13
申请号：US08508638
申请日：1995-07-28
IPC分类号： A21B200
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus including a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources and reflectors direct radiation through a window of an envacuable chamber to radiate regions of a substrate in the chamber with a pattern of radiation intensity.
摘要翻译： 一种快速热加热设备，包括多个辐射能源和与辐射能源相关联的反射器。 辐射能源和反射器将辐射引导通过可以吸收的室的窗口，以辐射强度的图案辐射腔室中的基底的区域。
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公开(公告)号：US5155336A
公开(公告)日：1992-10-13
申请号：US781632
申请日：1991-10-24
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
摘要翻译： 一种快速热加热装置，其中灯被设置在多个光管中，所述多个光管被布置成照亮并向衬底供应热量。 光管被定位成使得照明图案重叠。 控制提供给灯的能量以向衬底提供预定的加热图案。 液体冷却的窗口与光管协作以将能量传递到设置在抽真空室中的晶片。
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5.发明授权
公开(公告)号：US5767486A
公开(公告)日：1998-06-16
申请号：US782839
申请日：1997-01-13
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04 , H05B3/62 , F27B5/14 , F27D11/02
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus including an evacuable chamber having a window, a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources are disposed outside of the chamber and positioned adjacent to the window. They have a central longitudinal axis that extends in a substantially perpendicular direction relative to the window. The reflectors direct radiant energy through the window to radiate predetermined regions of a backside surface of a substrate in the chamber. The reflectors extend along a major portion of the longitudinal axis of the radiant energy sources. The substrate sits on a support in the chamber, and a source of processing gas, including a gas inlet manifold, is provided for passing processing gas to a frontside surface of the substrate.
摘要翻译： 一种快速热加热设备，包括具有窗口的可抽空室，多个辐射能源和与辐射能源相关联的反射器。 辐射能量源设置在室外并且定位成与窗口相邻。 它们具有中心纵向轴线，该中心纵向轴线相对于窗口沿基本上垂直的方向延伸。 反射器通过窗口直接辐射能量以辐射腔室中的衬底的背面的预定区域。 反射器沿辐射能源的纵向轴线的主要部分延伸。 衬底位于室中的支撑件上，并且提供包括气体入口歧管的处理气体源，用于将处理气体传递到衬底的前侧表面。
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公开(公告)号：US5708755A
公开(公告)日：1998-01-13
申请号：US626893
申请日：1996-04-03
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04 , H05B3/40 , C23C16/00
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
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7.发明授权Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature 失效快速热加热装置包括多个光管和用于测量基板温度的高温计
公开(公告)号：US5790751A
公开(公告)日：1998-08-04
申请号：US782840
申请日：1997-01-13
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04 , H05B3/62 , F27B5/14 , F27D11/02
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
摘要翻译： 一种快速热加热装置，其中灯被设置在多个光管中，所述多个光管被布置成照亮并向衬底供应热量。 光管被定位成使得照明图案重叠。 控制提供给灯的能量以向衬底提供预定的加热图案。 液体冷却的窗口与光管协作以将能量传递到设置在抽真空室中的晶片。
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8.发明授权
公开(公告)号：US5487127A
公开(公告)日：1996-01-23
申请号：US131830
申请日：1993-10-05
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04 , H05B3/40 , C23C16/00
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
摘要翻译： 一种快速热加热装置，其中灯被设置在多个光管中，所述多个光管被布置成照亮并向衬底供应热量。 光管被定位成使得照明图案重叠。 控制提供给灯的能量以向衬底提供预定的加热图案。 液体冷却的窗口与光管协作以将能量传递到设置在抽真空室中的晶片。
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公开(公告)号：US5743643A
公开(公告)日：1998-04-28
申请号：US732020
申请日：1996-10-16
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
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公开(公告)号：US5689614A
公开(公告)日：1997-11-18
申请号：US509392
申请日：1995-07-31
IPC分类号： C23C16/48 , C30B25/10 , C30B31/12 , C30B31/18 , F27B17/00 , F27D99/00 , G01J5/00 , G01J5/06 , H01L21/00 , H02G3/04 , H05B3/40 , C23C16/00
CPC分类号： F27D99/0006 , C23C16/481 , C23C16/482 , C30B25/10 , C30B25/105 , C30B31/12 , C30B31/18 , F27B17/0025 , F27D99/0033 , G01J5/0003 , G01J5/06 , H01L21/67115 , H02G3/0425
摘要： A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
摘要翻译： 一种快速热加热装置，其中灯被设置在多个光管中，所述多个光管被布置成照亮并向衬底供应热量。 光管被定位成使得照明图案重叠。 控制提供给灯的能量以向衬底提供预定的加热图案。 液体冷却的窗口与光管协作以将能量传递到设置在抽真空室中的晶片。
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