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27 条记录 (耗时 0.026 秒)

    Magnet system for an ion beam implantation system using high perveance beams
    1.
    发明授权
    Magnet system for an ion beam implantation system using high perveance beams 失效
    用于离子束植入系统的磁场系统，使用高度方位光束

    公开(公告)号：US06403967B1

    公开(公告)日：2002-06-11

    申请号：US09419448

    申请日：1999-10-15

    申请人： Jiong Chen ,  Jinliang Chen ,  Eric Henry Jon Antonissen

    发明人： Jiong Chen ,  Jinliang Chen ,  Eric Henry Jon Antonissen

    IPC分类号： H01J37147

    CPC分类号： H01J37/3171 ,  H01J37/05 ,  H01J37/147

    摘要： An apparatus for ion implantation using high perveance beams is disclosed. The apparatus includes a dipole magnet apparatus that provides an adjustment to a cross-beam magnetic dipole field in an ion implantation system. Introduction and control of the magnetic dipole field gradient in a low energy implantation system as disclosed herein gives a significant improvement to the magnet's acceptance and beam focusing which largely defines the effective transported beam current. The apparatus involves the use of ferromagnetic yokes of a prescribed shape and a portion of a secondary magnet coil following along the outside radius of a set of primary dipole magnet coils which define and delineate the primary magnetic field area and beam path. The current return path for the secondary magnet coil is via another portion of the secondary magnet coil that follows a path such that the field generated by the return path secondary magnet coil is orthogonal to the primary magnetic field. The resulting magnetic field across the beam cross-section has a sloping shape with relative maxima and minima near the transverse beamline boundary. The action of the magnetic field distribution on the ion beam acts to compensate the space-charge dispersion of high perveance beams.

    摘要翻译： 公开了一种使用高度方位离子束的离子注入装置。 该装置包括偶极磁体装置，其提供离子注入系统中的横梁磁偶极场的调节。 在本文公开的低能量注入系统中的磁偶极场梯度的引入和控制给出了磁体的接受度和束聚焦的显着改进，其大大限定了有效传输的束电流。 该装置涉及使用规定形状的铁磁轭和次级电磁线圈的一部分，沿着一组初级偶极子磁体线圈的外半径，其限定并描绘主磁场区域和射束路径。 次级电磁线圈的电流返回路径经过次级磁体线圈的另一部分，其沿着路径使得由返回路径次级磁体线圈产生的磁场与初级磁场正交。 横截面横截面上产生的磁场具有相对最大值和最小值的横向波束边界附近的倾斜形状。 离子束上的磁场分布的作用用于补偿高通量波束的空间电荷分散。

    Grating-based wavelength selective switch
    3.
    发明授权
    Grating-based wavelength selective switch 失效
    基于光栅的波长选择开关

    公开(公告)号：US07167616B2

    公开(公告)日：2007-01-23

    申请号：US10923369

    申请日：2004-08-20

    申请人： Peiching Ling ,  Wayne Lui ,  Jinliang Chen ,  Jianjun Zhang ,  Ming Xu ,  Yu Chen

    发明人： Peiching Ling ,  Wayne Lui ,  Jinliang Chen ,  Jianjun Zhang ,  Ming Xu ,  Yu Chen

    IPC分类号： G02B6/34

    CPC分类号： G02B6/12007 ,  G02B6/124 ,  G02B6/125 ,  G02B6/29319 ,  G02B6/29323 ,  G02B2006/12097 ,  G02B2006/12145 ,  G02B2006/1215

    摘要： The present invention is a wavelength-selective optical transmission system that includes a first waveguide for transmitting a multiplexed optical signal therethrough. The system further includes a second waveguide coupled to the first waveguide wherein a least one of the first and second waveguides have a set of wavelength-selective Bragg gratings disposed near a coupling section between the first and second waveguides to reflect a reflecting optical signal back to the first waveguide and for transmitting a contra-directional optical signal and a co-directional optical signal having respectively a contra-directional selected wavelength and a co-directional selected wavelength corresponding to the Bragg gratings. One of the contra-directional and co-directional wavelengths is chosen as a designated wavelength, and the reflecting optical signal and one of the contra-directional or co-directional optical signals are outside of a predefined range surrounding the designated wavelength.

    摘要翻译： 本发明是一种波长选择性光传输系统，其包括用于透过复用光信号的第一波导。 该系统还包括耦合到第一波导的第二波导，其中第一和第二波导中的至少一个波导具有布置在第一和第二波导之间的耦合部分附近的一组波长选择布拉格光栅，以将反射光信号反射回 第一波导和用于发送具有分别对应于布拉格光栅的反向选择波长和共同选择波长的双向光信号和同向光信号。 选择反向和同向波长中的一个作为指定波长，并且反射光信号和反向光信号之一以及指向波长周围的预定范围之外。

    Magnetic particle trapper for a disk sputtering system
    7.
    发明授权
    Magnetic particle trapper for a disk sputtering system 有权
    用于磁盘溅射系统的磁粉捕集器

    公开(公告)号：US08101054B2

    公开(公告)日：2012-01-24

    申请号：US12474207

    申请日：2009-05-28

    申请人： Jinliang Chen ,  Kinya Nippa

    发明人： Jinliang Chen ,  Kinya Nippa

    IPC分类号： C23C14/34

    CPC分类号： C23C14/568 ,  C23C14/50 ,  C23C14/564

    摘要： A magnetic particle trapper for use in a sputtering system includes a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system, and a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.

    摘要翻译： 用于溅射系统的磁性颗粒捕集器包括：辊盖板，其具有多个开口，其布置和尺寸设置成容纳与溅射系统的机械传送机构相关联的多个辊;以及多个磁体，用于捕获磁性颗粒， 所述多个磁体在靠近所述多个开口的位置附接到所述滚子盖板。

    Sputter deposition system and methods of use
    8.
    发明申请
    Sputter deposition system and methods of use 审中-公开
    溅射沉积系统及其使用方法

    公开(公告)号：US20070209932A1

    公开(公告)日：2007-09-13

    申请号：US11372517

    申请日：2006-03-10

    申请人： Piero Sferlazzo ,  Ming Mao ,  Jinliang Chen ,  David Felsenthal ,  Robert Hieronymi ,  Miroslav Eror

    发明人： Piero Sferlazzo ,  Ming Mao ,  Jinliang Chen ,  David Felsenthal ,  Robert Hieronymi ,  Miroslav Eror

    IPC分类号： C23C14/00

    CPC分类号： C23C14/352 ,  C23C14/505 ,  C23C14/568 ,  C23C14/5833

    摘要： The present invention relates to a sputter deposition system and to methods of use thereof for processing substrates using planetary sputter deposition methods. The sputter deposition system includes a deposition chamber having an azimuthal axis. A rotatable member is situated in the chamber and includes a plurality of magnetrons provided thereon. Each magnetron includes a corresponding one of a plurality of sputtering targets. The rotatable member is configured to position each of the magnetrons to direct sputtered material from the corresponding one of the sputtering targets to a deposition zone defined in the deposition chamber. A transport mechanism is situated in the deposition chamber and includes an arm rotatable about the azimuthal axis. A substrate holder is attached to the arm of the transport mechanism and supports the substrate as the arm rotates the substrate holder to intersect the deposition zone for depositing sputtered material on the substrate.

    摘要翻译： 溅射沉积系统技术领域本发明涉及一种溅射沉积系统及其使用方法，用于使用行星式溅射沉积方法来处理衬底 溅射沉积系统包括具有方位角轴的沉积室。 可旋转构件位于腔室中并且包括设置在其上的多个磁控管。 每个磁控管包括多个溅射靶中相应的一个。 可旋转构件被构造成定位每个磁控管以将溅射的材料从相应的一个溅射靶引导到在沉积室中限定的沉积区。 输送机构位于沉积室中并且包括可围绕方位轴线旋转的臂。 衬底保持器附接到输送机构的臂上并且当臂旋转衬底保持器以与沉积区相交以在基底上沉积溅射材料时支撑衬底。

    Grating-based wavelength selective switch
    9.
    发明申请
    Grating-based wavelength selective switch 失效
    基于光栅的波长选择开关

    公开(公告)号：US20060039647A1

    公开(公告)日：2006-02-23

    申请号：US10923369

    申请日：2004-08-20

    申请人： Peiching Ling ,  Wayne Lui ,  Jinliang Chen ,  Jianjun Zhang ,  Ming Xu ,  Yu Chen

    发明人： Peiching Ling ,  Wayne Lui ,  Jinliang Chen ,  Jianjun Zhang ,  Ming Xu ,  Yu Chen

    IPC分类号： G02B6/28

    CPC分类号： G02B6/12007 ,  G02B6/124 ,  G02B6/125 ,  G02B6/29319 ,  G02B6/29323 ,  G02B2006/12097 ,  G02B2006/12145 ,  G02B2006/1215

    摘要： The present invention is a wavelength-selective optical transmission system that includes a first waveguide for transmitting a multiplexed optical signal therethrough. The system further includes a second waveguide coupled to the first waveguide wherein a least one of the first and second waveguides have a set of wavelength-selective Bragg gratings disposed near a coupling section between the first and second waveguides to reflect a reflecting optical signal back to the first waveguide and for transmitting a contra-directional optical signal and a co-directional optical signal having respectively a contra-directional selected wavelength and a co-directional selected wavelength corresponding to the Bragg gratings. One of the contra-directional and co-directional wavelengths is chosen as a designated wavelength, and the reflecting optical signal and one of the contra-directional or co-directional optical signals are outside of a predefined range surrounding the designated wavelength.

    摘要翻译： 本发明是一种波长选择性光传输系统，其包括用于传输多路复用光信号的第一波导。 该系统还包括耦合到第一波导的第二波导，其中第一和第二波导中的至少一个波导具有布置在第一和第二波导之间的耦合部分附近的一组波长选择布拉格光栅，以将反射光信号反射回 第一波导和用于发送具有分别对应于布拉格光栅的反向选择波长和共同选择波长的双向光信号和同向光信号。 选择反向和同向波长中的一个作为指定波长，并且反射光信号和反向光信号之一以及指向波长周围的预定范围之外。