公开(公告)号：US10777709B2

公开(公告)日：2020-09-15

申请号：US16294100

申请日：2019-03-06

Applicant: KANEKA CORPORATION

Inventor： Takashi Kuchiyama ,  Hironori Hayakawa ,  Hiroaki Ueda ,  Yuji Motohara ,  Kenji Yamamoto

IPC: H01L33/42 ,  G06F3/041 ,  C23C14/02 ,  C23C14/08 ,  C23C14/58 ,  G06F3/044 ,  H01L31/0224 ,  H01L31/0392 ,  C23C14/35

Abstract: Provided is a substrate with transparent electrode, which is capable of achieving both acceleration of crystallization dining a heat treatment and suppression of crystallization under a normal temperature environment. In the substrate with transparent electrode, a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate. An underlayer that contains a metal oxide as a main component is formed between the film substrate and the transparent electrode thin-film. The underlayer and the transparent electrode thin-film are in contact with each other. The transparent electrode thin-film is amorphous, and the base layer is dielectric and crystalline.

公开(公告)号：US20160351752A1

公开(公告)日：2016-12-01

申请号：US15114639

申请日：2015-01-19

Applicant: KANEKA CORPORATION

Inventor： Takashi Kuchiyama ,  Hironori Hayakawa ,  Hiroaki Ueda ,  Yuji Motohara ,  Kenji Yamamoto

IPC: H01L33/42 ,  C23C14/35 ,  C23C14/02 ,  H01L31/0224 ,  C23C14/08

CPC classification number: H01L33/42 ,  C23C14/024 ,  C23C14/083 ,  C23C14/086 ,  C23C14/35 ,  C23C14/5806 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04103 ,  H01L31/022425 ,  H01L31/022466 ,  H01L31/022483 ,  H01L31/0392 ,  Y02E10/50

Abstract: Provided is a substrate with transparent electrode, which is capable of achieving both acceleration of crystallization during a heat treatment and suppression of crystallization under a normal temperature environment. In the substrate with transparent electrode, a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate. An underlayer that contains a metal oxide as a main component is formed between the film substrate and the transparent electrode thin-film. The underlayer and the transparent electrode thin-film are in contact with each other. The transparent electrode thin-film is amorphous, and the base layer is dielectric and crystalline.

Abstract translation: 本发明提供一种具有透明电极的基板，其能够实现加热处理期间的结晶加速和在常温环境下的结晶抑制。 在具有透明电极的基板中，在薄膜基板上形成由透明导电氧化物形成的透明电极薄膜。 在薄膜基板和透明电极薄膜之间形成以金属氧化物为主要成分的底层。 底层和透明电极薄膜彼此接触。 透明电极薄膜是非晶体，并且基底层是电介质和结晶的。

公开(公告)号：US10270010B2

公开(公告)日：2019-04-23

申请号：US15114639

申请日：2015-01-19

Applicant: KANEKA CORPORATION

Inventor： Takashi Kuchiyama ,  Hironori Hayakawa ,  Hiroaki Ueda ,  Yuji Motohara ,  Kenji Yamamoto

IPC: H01L33/00 ,  H01L33/42 ,  G06F3/041 ,  C23C14/02 ,  C23C14/08 ,  C23C14/58 ,  C23C14/35 ,  H01L31/0224 ,  G06F3/044 ,  H01L31/0392

Abstract: Provided is a substrate with transparent electrode, which is capable of achieving both acceleration of crystallization during a heat treatment and suppression of crystallization under a normal temperature environment. In the substrate with transparent electrode, a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate. An underlayer that contains a metal oxide as a main component is formed between the film substrate and the transparent electrode thin-film. The underlayer and the transparent electrode thin-film are in contact with each other. The transparent electrode thin-film is amorphous, and the base layer is dielectric and crystalline.

公开(公告)号：US20190207060A1

公开(公告)日：2019-07-04

申请号：US16294100

申请日：2019-03-06

Applicant: KANEKA CORPORATION

Inventor： Takashi Kuchiyama ,  Hironori Hayakawa ,  Hiroaki Ueda ,  Yuji Motohara ,  Kenji Yamamoto

IPC: H01L33/42 ,  H01L31/0224 ,  C23C14/35 ,  C23C14/08 ,  G06F3/041 ,  H01L31/0392 ,  G06F3/044 ,  C23C14/58 ,  C23C14/02

CPC classification number: H01L33/42 ,  C23C14/024 ,  C23C14/083 ,  C23C14/086 ,  C23C14/35 ,  C23C14/5806 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04103 ,  H01L31/022425 ,  H01L31/022466 ,  H01L31/022483 ,  H01L31/0392 ,  Y02E10/50

Abstract: Provided is a substrate with transparent electrode, which is capable of achieving both acceleration of crystallization dining a heat treatment and suppression of crystallization under a normal temperature environment. In the substrate with transparent electrode, a transparent electrode thin-film formed of a transparent conductive oxide is formed on a film substrate. An underlayer that contains a metal oxide as a main component is formed between the film substrate and the transparent electrode thin-film. The underlayer and the transparent electrode thin-film are in contact with each other. The transparent electrode thin-film is amorphous, and the base layer is dielectric and crystalline.