公开(公告)号：US20210140841A1

公开(公告)日：2021-05-13

申请号：US16625521

申请日：2018-06-15

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Amal HAJJAJ ,  Md Abdullah Al HAFIZ ,  Mohammad Ibrahim YOUNIS

IPC: G01L9/00

Abstract: An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

公开(公告)号：US20190341920A1

公开(公告)日：2019-11-07

申请号：US16332150

申请日：2017-09-21

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Saad ILYAS ,  Md Abdullah Al HAFIZ ,  Hossein FARIBORZI ,  Mohammad Ibrahim YOUNIS

IPC: H03K19/02 ,  H03H9/02 ,  H03H9/24 ,  H03K19/20 ,  H03K19/21

Abstract: A mechanical resonator-based cascadable logic device includes which includes a resonator having a beam with a first fixed end, a second fixed end, and a length between the first and second fixed ends. A first electrode and a second electrode are aligned along a first side of the beam. A third electrode and a fourth electrode are aligned along a second side of the beam and opposite the first and second electrodes. A DC voltage source is coupled to one of the first and second fixed ends of the beam. At least one of the first, second, third, and fourth electrodes is coupled to a first AC voltage source so that a logic operation is performed by activating a second resonant mode of the resonator.