公开(公告)号：US20210159127A1

公开(公告)日：2021-05-27

申请号：US17093621

申请日：2020-11-09

Applicant: KLA CORPORATION

Inventor： Boshi Huang ,  Hucheng Lee ,  Vladimir Tumakov ,  Sangbong Park ,  Bjorn Brauer ,  Erfan Soltanmohammadi

IPC: H01L21/66 ,  G06T7/00 ,  G06K9/62 ,  G06F17/18 ,  G06F7/22

Abstract: A care area is determined in an image of a semiconductor wafer. The care area is divided into sub-care areas based on the shapes of polygons in a design file associated with the care area. A noise scan of a histogram for the sub-care areas is then performed. The sub-care areas are clustered into groups based on the noise scan of the histogram.

公开(公告)号：US11615993B2

公开(公告)日：2023-03-28

申请号：US17093621

申请日：2020-11-09

Applicant: KLA CORPORATION

Inventor： Boshi Huang ,  Hucheng Lee ,  Vladimir Tumakov ,  Sangbong Park ,  Bjorn Brauer ,  Erfan Soltanmohammadi

IPC: G06T7/00 ,  H01L21/66 ,  G06K9/62 ,  G06F17/18 ,  G06F7/22

Abstract: A care area is determined in an image of a semiconductor wafer. The care area is divided into sub-care areas based on the shapes of polygons in a design file associated with the care area. A noise scan of a histogram for the sub-care areas is then performed. The sub-care areas are clustered into groups based on the noise scan of the histogram.

公开(公告)号：US11494924B2

公开(公告)日：2022-11-08

申请号：US17094607

申请日：2020-11-10

Applicant: KLA Corporation

Inventor： Vahid Noormofidi ,  Boshi Huang ,  Ge Cong

IPC: G06T7/33 ,  G06T5/00 ,  G06T7/73 ,  G06V10/25

Abstract: Methods and systems for aligning images of a specimen are provided. One method includes reducing noise in a test image generated for a specimen by an imaging subsystem thereby generating a denoised test image. The method also includes detecting one or more patterned features in the denoised test image extending in at least a horizontal or vertical direction. In addition, the method includes designating an area of the denoised test image in which the detected one or more patterned features are located as a region of interest in the denoised test image. The method further includes aligning the denoised test image to a reference image for the specimen using only the region of interest in the denoised test image and a corresponding area in the reference image.

公开(公告)号：US11450012B2

公开(公告)日：2022-09-20

申请号：US16852359

申请日：2020-04-17

Applicant: KLA Corporation

Inventor： Santosh Bhattacharyya ,  Ge Cong ,  Sanbong Park ,  Boshi Huang

IPC: G06T7/33 ,  G06T7/00 ,  G06K9/62 ,  G06N3/08 ,  G06N20/00 ,  H01J37/22 ,  H01J37/28 ,  G06F17/18

Abstract: A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.

公开(公告)号：US20210334989A1

公开(公告)日：2021-10-28

申请号：US17094607

申请日：2020-11-10

Applicant: KLA Corporation

Inventor： Vahid Noormofidi ,  Boshi Huang ,  Ge Cong

IPC: G06T7/33 ,  G06K9/32 ,  G06T7/73 ,  G06T5/00

Abstract: Methods and systems for aligning images of a specimen are provided. One method includes reducing noise in a test image generated for a specimen by an imaging subsystem thereby generating a denoised test image. The method also includes detecting one or more patterned features in the denoised test image extending in at least a horizontal or vertical direction. In addition, the method includes designating an area of the denoised test image in which the detected one or more patterned features are located as a region of interest in the denoised test image. The method further includes aligning the denoised test image to a reference image for the specimen using only the region of interest in the denoised test image and a corresponding area in the reference image.

公开(公告)号：US20210133989A1

公开(公告)日：2021-05-06

申请号：US16852359

申请日：2020-04-17

Applicant: KLA Corporation

Inventor： Santosh Bhattacharyya ,  Ge Cong ,  Sanbong Park ,  Boshi Huang

IPC: G06T7/33 ,  G06T7/00 ,  G06K9/62 ,  G06N3/08 ,  G06N20/00 ,  G06F17/18 ,  H01J37/22 ,  H01J37/28

Abstract: A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.