公开(公告)号：US09459381B2

公开(公告)日：2016-10-04

申请号：US14635186

申请日：2015-03-02

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Ki-Hun Jeong ,  Jae-Jun Kim ,  Dongmin Keum

IPC: B29D11/00 ,  G02B3/00 ,  G02B1/00 ,  G02B1/12 ,  B81C99/00 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  G02B1/04 ,  G02B1/118 ,  G03F7/00

CPC classification number: G02B3/0018 ,  B81C99/0085 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  G02B1/00 ,  G02B1/005 ,  G02B1/041 ,  G02B1/118 ,  G02B1/12 ,  G02B3/00 ,  G02B3/0006 ,  G02B3/0012 ,  G02B3/0031 ,  G03F7/0002 ,  G03F7/0005

Abstract: Provided is a batch fabrication method of three-dimensional photonic microstructures including a support structure fabricating step, a variable structure fabricating step, a thermal reflow step, and a three-dimensional photonic microstructure forming step. The batch fabrication method of three-dimensional photonic microstructures fabricates three-dimensional photonic microstructures having several shapes depending on a demand of a user through these steps.

Abstract translation: 提供了三维光子微结构的批量制造方法，其包括支撑结构制造步骤，可变结构制造步骤，热回流步骤和三维光子微结构形成步骤。 三维光子微结构的批量制造方法通过这些步骤根据用户的需求制造具有多种形状的三维光子微结构。