公开(公告)号：US20220344476A1

公开(公告)日：2022-10-27

申请号：US17849848

申请日：2022-06-27

申请人： KYOCERA SLD Laser, Inc.

发明人： Philip Chan ,  Phillip Skahan ,  Nick Pfister ,  Christian Zollner ,  James W. Raring

IPC分类号： H01L29/205 ,  H01L33/00 ,  H01L33/32 ,  H01L27/12 ,  H01L27/06 ,  H01L23/00 ,  H01L21/8252 ,  H01L21/02 ,  H01L21/311 ,  H01L21/683 ,  H01L27/088 ,  H01L27/15 ,  H01L29/66 ,  H01L33/06 ,  H01S5/02 ,  H01S5/227 ,  H01S5/343

摘要： A method for manufacturing an optical device includes providing a carrier waver, provide a first substrate having a first surface region, and forming a first gallium and nitrogen containing epitaxial material overlying the first surface region. The first epitaxial material includes a first release material overlying the first substrate. The method also includes patterning the first epitaxial material to form a plurality of first dice arranged in an array; forming a first interface region overlying the first epitaxial material; bonding the first interface region of at least a fraction of the plurality of first dice to the carrier wafer to form bonded structures; releasing the bonded structures to transfer a first plurality of dice to the carrier wafer, the first plurality of dice transferred to the carrier wafer forming mesa regions on the carrier wafer; and forming an optical waveguide in each of the mesa regions, the optical waveguide configured as a cavity to form a laser diode of the electromagnetic radiation.