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公开(公告)号：US07437253B2
公开(公告)日：2008-10-14
申请号：US11192759
申请日：2005-07-29
IPC分类号： G01R23/00
CPC分类号： G01C19/5684 , Y10T29/49009 , Y10T74/1229
摘要： Parametrically disciplined operation of a symmetric nearly degenerate mode vibratory gyroscope is disclosed. A parametrically-disciplined inertial wave gyroscope having a natural oscillation frequency in the neighborhood of a sub-harmonic of an external stable clock reference is produced by driving an electrostatic bias electrode at approximately twice this sub-harmonic frequency to achieve disciplined frequency and phase operation of the resonator. A nearly symmetric parametrically-disciplined inertial wave gyroscope that can oscillate in any transverse direction and has more than one bias electrostatic electrode that can be independently driven at twice its oscillation frequency at an amplitude and phase that disciplines its damping to zero in any vibration direction. In addition, operation of a parametrically-disciplined inertial wave gyroscope is taught in which the precession rate of the driven vibration pattern is digitally disciplined to a prescribed non-zero reference value.
摘要翻译： 公开了一种对称的近退模式振动陀螺仪的参数规范的操作。 通过以大约两倍的次谐波频率驱动静电偏置电极来产生具有外部稳定时钟基准的亚谐波附近的固有振荡频率的参数规律的惯性陀螺仪，以实现规则频率和相位操作 谐振器。 一个近似对称的参数规范的惯性波陀螺仪，其可以在任何横向方向上振荡并且具有多于一个的偏置静电电极，该偏置静电电极可以在其振荡和相位独立地以两倍的振荡频率驱动，其在任何振动方向上将其阻尼归零。 另外，教导参数规律的惯性波陀螺仪的操作，其中驱动振动模式的进动速率被数字地规定为规定的非零参考值。
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公开(公告)号：US07017410B2
公开(公告)日：2006-03-28
申请号：US10370953
申请日：2003-02-20
IPC分类号： G01C19/00
CPC分类号： G01C19/5656 , G01C19/5719 , G01P2015/084 , Y10T29/49007
摘要： The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
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3.发明授权公开(公告)号：US07396478B2
公开(公告)日：2008-07-08
申请号：US11850458
申请日：2007-09-05
申请人： Ken J. Hayworth , Karl Y. Yee , Kirill V. Shcheglov , Youngsam Bae , Dean V. Wiberg , A. Dorian Challoner , Chris S. Peay
发明人： Ken J. Hayworth , Karl Y. Yee , Kirill V. Shcheglov , Youngsam Bae , Dean V. Wiberg , A. Dorian Challoner , Chris S. Peay
CPC分类号： G01C19/5719 , B81B7/007
摘要： A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.
摘要翻译： 使用MISR密封MEMS器件的多内密封环（MISR）微机电系统（MEMS）真空包装方法。 该方法通过将封盖板晶片与基板晶片结合，将具有金属密封环的封盖板与具有金属密封环的基板结合。 散装电极可用于在基板和封盖板上的密封环之间提供导电路径。 所有密封件仅使用沉积在基板和封盖板晶片的抛光表面上的金属对金属密封环制成。 然而，通过制造通过盖板的通孔来提供多个电馈通金属迹线，用于从封装的外部通过通孔到封装的内部进行电连接。 每个金属密封环都用于气密密封的双重目的，并提供电气馈通金属痕迹。
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公开(公告)号：US07347095B2
公开(公告)日：2008-03-25
申请号：US11199004
申请日：2005-08-08
IPC分类号： G01P9/04
CPC分类号： B81C3/001 , G01C19/5684 , Y10T29/49002 , Y10T29/49007 , Y10T29/4902
摘要： The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
摘要翻译： 本发明公开了一种具有整体式谐振器的惯性传感器。 典型的传感器包括用于感测惯性传感器的运动的平面机械谐振器和用于容纳谐振器的壳体。 谐振器和壳体的壁通过蚀刻工艺来定义。 制造谐振器的典型方法包括蚀刻基板，将晶片接合到蚀刻的基板上，通过蚀刻晶片以形成平面机械谐振器和壳体的壁并将端盖晶片结合到壁上以完成壳体。
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公开(公告)号：US06955084B2
公开(公告)日：2005-10-18
申请号：US10410744
申请日：2003-04-10
CPC分类号： G01C19/5712 , G01P2015/084
摘要： The present invention discloses a gyroscope comprising an isolated resonator including a post proof mass and counterbalancing plate. One or more double beam flexures each interconnect the counterbalancing plate and the proof mass with a first and a second beam attached to the post proof mass and a third and a fourth beam attached to the counterbalancing plate. A baseplate is affixed to the resonator by the double beam flexures. The counterbalancing plate and the proof mass transfer substantially no net momentum to the baseplate when the resonator is excited.
摘要翻译： 本发明公开了一种包括隔离谐振器的陀螺仪，该谐振器包括后验质量块和平衡板。 一个或多个双梁弯曲部分每个互连平衡板和检验质量块，第一和第二梁连接到防反射质量块，第三和第四梁连接在平衡板上。 通过双梁弯曲将基板固定在谐振器上。 当谐振器被激发时，平衡板和证明质量传递基本上没有到底板的净动量。
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公开(公告)号：US07624494B2
公开(公告)日：2009-12-01
申请号：US11610418
申请日：2006-12-13
IPC分类号： G01R3/00
CPC分类号： G01C19/5684 , Y10T29/435 , Y10T29/49002 , Y10T29/49007 , Y10T29/4902
摘要： An inertial sensor includes a mesoscaled disc resonator comprised of micro-machined substantially thermally non-conductive wafer with low coefficient of thermal expansion for sensing substantially in-plane vibration, a rigid support coupled to the resonator at a central mounting point of the resonator, at least one excitation electrode within an interior of the resonator to excite internal in-plane vibration of the resonator, and at least one sensing electrode within the interior of the resonator for sensing the internal in-plane vibration of the resonator. The inertial sensor is fabricated by etching a baseplate, bonding the substantially thermally non-conductive wafer to the etched baseplate, through-etching the wafer using deep reactive ion etching to form the resonator, depositing a thin conductive film on the through-etched wafer. The substantially thermally non-conductive wafer may comprise a silicon dioxide glass wafer, which is a silica glass wafer or a borosilicate glass wafer, or a silicon-germanium wafer.
摘要翻译： 惯性传感器包括中等尺寸的光盘谐振器，其包括具有低热膨胀系数的微加工的基本上不导热的晶片，用于感测基本上面内的振动，在谐振器的中心安装点处耦合到谐振器的刚性支撑件， 在谐振器内部的至少一个激励电极，以激发谐振器的内部平面内振动，以及谐振器内部的至少一个感测电极，用于感测谐振器的内部平面内振动。 通过蚀刻基板，将基本上不导热的晶片结合到蚀刻的基板上，通过使用深反应离子蚀刻蚀刻晶片以形成谐振器，在经过蚀刻的晶片上沉积薄导电膜来制造惯性传感器。 基本上不导热的晶片可以包括二氧化硅玻璃晶片，其是石英玻璃晶片或硼硅酸盐玻璃晶片或硅 - 锗晶片。
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公开(公告)号：US07401397B2
公开(公告)日：2008-07-22
申请号：US11371596
申请日：2006-03-09
IPC分类号： G01R3/00
CPC分类号： G01C19/5684 , Y10T29/49002 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49128 , Y10T29/49155
摘要： The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.
摘要翻译： 本发明公开了一种惯性传感器，其包括具有用于基本上面内振动的嵌入式感测和致动的平面机械谐振器，并具有用于谐振器的中心刚性支撑。 在谐振器的内部设置至少一个激励或扭曲电极以激发谐振器的平面内振动，并且至少一个感测或拾取电极设置在谐振器内部以感测被激励的谐振器的运动。 在一个实施例中，平面谐振器包括环形图案中的多个槽; 在另一个实施例中，平面机械谐振器包括四个质量块; 每个实施例具有简单的退化对的平面内振动模式。
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公开(公告)号：US06990863B2
公开(公告)日：2006-01-31
申请号：US10423459
申请日：2003-04-25
IPC分类号： G01N9/04
CPC分类号： G01C19/5719
摘要： The present invention discloses a resonator gyroscope including an isolated resonator. One or more flexures support the isolated resonator and a baseplate is affixed to the resonator by the flexures. Drive and sense elements are affixed to the baseplate and used to excite the resonator and sense movement of the gyroscope. In addition, at least one secondary element (e.g., another electrode) is affixed to the baseplate and used for trimming isolation of the resonator. The resonator operates such that it transfers substantially no net momentum to the baseplate when the resonator is excited. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate.
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9.发明授权公开(公告)号：US07285844B2
公开(公告)日：2007-10-23
申请号：US10865344
申请日：2004-06-10
申请人： Ken J. Hayworth , Karl Y. Yee , Kirill V. Shcheglov , Youngsam Bae , Dean V. Wiberg , A. Dorian Challoner , Chris S. Peay
发明人： Ken J. Hayworth , Karl Y. Yee , Kirill V. Shcheglov , Youngsam Bae , Dean V. Wiberg , A. Dorian Challoner , Chris S. Peay
IPC分类号： H01L23/552
CPC分类号： G01C19/5719 , B81B7/007
摘要： A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.
摘要翻译： 使用MISR密封MEMS器件的多重内密封环（MISR）微机电系统（MEMS）真空封装。 该方法通过将封盖板晶片与基板晶片结合，将具有金属密封环的封盖板与具有金属密封环的基板结合。 散装电极可用于在基板和封盖板上的密封环之间提供导电路径。 所有密封件仅使用沉积在基板和封盖板晶片的抛光表面上的金属对金属密封环制成。 然而，通过制造通过盖板的通孔来提供多个电馈通金属迹线，用于从封装的外部通过通孔到封装的内部进行电连接。 每个金属密封环都用于气密密封的双重目的，并提供电气馈通金属痕迹。
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公开(公告)号：US07168318B2
公开(公告)日：2007-01-30
申请号：US11103899
申请日：2005-04-12
IPC分类号： G01P9/04
CPC分类号： G01C19/5684 , Y10T29/435 , Y10T29/49002 , Y10T29/49007 , Y10T29/4902
摘要： An inertial sensor includes a mesoscaled disc resonator comprised of micro-machined substantially thermally non-conductive wafer with low coefficient of thermal expansion for sensing substantially in-plane vibration, a rigid support coupled to the resonator at a central mounting point of the resonator, at least one excitation electrode within an interior of the resonator to excite internal in-plane vibration of the resonator, and at least one sensing electrode within the interior of the resonator for sensing the internal in-plane vibration of the resonator. The inertial sensor is fabricated by etching a baseplate, bonding the substantially thermally non-conductive wafer to the etched baseplate, through-etching the wafer using deep reactive ion etching to form the resonator, depositing a thin conductive film on the through-etched wafer. The substantially thermally non-conductive wafer may comprise a silicon dioxide glass wafer, which is a silica glass wafer or a borosilicate glass wafer, or a silicon-germanium wafer.
摘要翻译： 惯性传感器包括中等尺寸的光盘谐振器，其包括具有低热膨胀系数的微加工的基本上不导热的晶片，用于感测基本上面内的振动，在谐振器的中心安装点处耦合到谐振器的刚性支撑件， 在谐振器内部的至少一个激励电极，以激发谐振器的内部平面内振动，以及谐振器内部的至少一个感测电极，用于感测谐振器的内部平面内振动。 通过蚀刻基板，将基本上不导热的晶片结合到蚀刻的基板上，通过使用深反应离子蚀刻蚀刻晶片以形成谐振器，在经过蚀刻的晶片上沉积薄导电膜来制造惯性传感器。 基本上不导热的晶片可以包括二氧化硅玻璃晶片，其是石英玻璃晶片或硼硅酸盐玻璃晶片或硅 - 锗晶片。
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