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    Status Polling
    1.
    发明申请
    Status Polling 有权
    状态轮询

    公开(公告)号：US20070124095A1

    公开(公告)日：2007-05-31

    申请号：US11622720

    申请日：2007-01-12

    申请人： Krishnamurthy Bhaskar ,  Mark Roulo ,  John Taylor ,  Lawrence Miller ,  Paul Russell ,  Jason Lin ,  Eliezer Rosengaus ,  Richard Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark Roulo ,  John Taylor ,  Lawrence Miller ,  Paul Russell ,  Jason Lin ,  Eliezer Rosengaus ,  Richard Wallingford ,  Kishore Bubna

    IPC分类号： G01N37/00

    CPC分类号： G05B19/41855 ,  G05B2219/37224

    摘要： An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.

    摘要翻译： 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络，并接收和处理图像数据以产生异常报告。 每个处理节点具有耦合到第一高速网络的接口卡，其接收来自第一高速网络的图像数据，并且根据高速接口总线协议格式化图像数据。 接口卡设置表示预定量的图像数据是否已经存储在存储器中的寄存器，并且处理节点读取寄存器以确定预定量的图像数据是否已被存储在存储器中，并且当 寄存器指示预定量的图像数据已被存储在存储器中。

    Programmable Image Computer
    2.
    发明申请
    Programmable Image Computer 有权
    可编程图像计算机

    公开(公告)号：US20070005284A1

    公开(公告)日：2007-01-04

    申请号：US11530153

    申请日：2006-09-08

    申请人： Krishnamurthy Bhaskar ,  Mark Roulo ,  John Taylor ,  Lawrence Miller ,  Paul Russell ,  Jason Lin ,  Eliezer Rosengaus ,  Richard Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark Roulo ,  John Taylor ,  Lawrence Miller ,  Paul Russell ,  Jason Lin ,  Eliezer Rosengaus ,  Richard Wallingford ,  Kishore Bubna

    IPC分类号： G01R27/28

    CPC分类号： G06T1/0007 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8825 ,  G01R31/311

    摘要： An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. A high speed interface bus is coupled to the interface card, receives the image data from the interface card. A computer is coupled to the high speed interface bus, and receives the image data from the high speed interface bus and processes the image data according to an algorithm, to produce the anomaly report. A second high speed network is coupled to the process nodes, and receives the anomaly reports from the process nodes. A job manager is coupled to the second high speed network, and receives the anomaly reports from the process nodes and sends information to the process nodes to coordinate the processing of the image data in the array of process nodes. An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network and process the data to produce reports. Each process node has an interface card that formats the high speed interface bus that is couples to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.

    摘要翻译： 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络，并接收和处理图像数据以产生异常报告。 每个处理节点具有耦合到第一高速网络的接口卡，其接收来自第一高速网络的图像数据，并且根据高速接口总线协议格式化图像数据。 高速接口总线耦合到接口卡，从接口卡接收图像数据。 计算机耦合到高速接口总线，并从高速接口总线接收图像数据，并根据算法对图像数据进行处理，以产生异常报告。 第二高速网络耦合到进程节点，并从进程节点接收异常报告。 作业管理器耦合到第二高速网络，并且从进程节点接收异常报告，并向进程节点发送信息以协调处理节点阵列中的图像数据的处理。 用于检测基板上的异常的检查系统。 第一网络耦合到传感器阵列并传送数据。 过程节点耦合到第一个网络并处理数据以产生报告。 每个进程节点都有一个接口卡，格式化耦合到接口卡的高速接口总线。 计算机接收并处理数据以生成报告。 第二个网络接收报告。 作业管理器耦合到第二网络，接收报告，并将信息发送到处理节点以协调数据的处理。

    Full swath analysis
    3.
    发明申请
    Full swath analysis 有权
    全幅分析

    公开(公告)号：US20060106580A1

    公开(公告)日：2006-05-18

    申请号：US11314627

    申请日：2005-12-21

    申请人： Krishnamurthy Bhaskar ,  Mark Roulo ,  John Taylor ,  Lawrence Miller ,  Paul Russell ,  Jason Lin ,  Eliezer Rosengaus ,  Richard Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark Roulo ,  John Taylor ,  Lawrence Miller ,  Paul Russell ,  Jason Lin ,  Eliezer Rosengaus ,  Richard Wallingford ,  Kishore Bubna

    IPC分类号： G21C17/00 ,  G06F11/30 ,  G06F15/00

    CPC分类号： G06T7/0004 ,  G06T2207/30148

    摘要： An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each of the process nodes has an amount of memory that is sufficient to receive image data representing a plurality of dice on an integrated circuit wafer, and each of the process nodes performs analysis on the plurality of dice. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. A high speed interface bus is coupled to the interface card, receives the image data from the interface card. A computer is coupled to the high speed interface bus, and receives the image data from the high speed interface bus and processes the image data according to an algorithm, to produce the anomaly report. A second high speed network is coupled to the process nodes, and receives the anomaly reports from the process nodes. A job manager is coupled to the second high speed network, and receives the anomaly reports from the process nodes and sends information to the process nodes to coordinate the processing of the image data in the array of process nodes.

    摘要翻译： 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络，并接收和处理图像数据以产生异常报告。 每个处理节点具有足以接收表示集成电路晶片上的多个骰子的图像数据的存储器量，并且每个处理节点对多个骰子执行分析。 每个处理节点具有耦合到第一高速网络的接口卡，其接收来自第一高速网络的图像数据，并且根据高速接口总线协议格式化图像数据。 高速接口总线耦合到接口卡，从接口卡接收图像数据。 计算机耦合到高速接口总线，并从高速接口总线接收图像数据，并根据算法对图像数据进行处理，以产生异常报告。 第二高速网络耦合到进程节点，并从进程节点接收异常报告。 作业管理器耦合到第二高速网络，并且从进程节点接收异常报告，并向进程节点发送信息以协调处理节点阵列中的图像数据的处理。

    Status polling
    4.
    发明授权
    Status polling 有权
    状态轮询

    公开(公告)号：US07181368B1

    公开(公告)日：2007-02-20

    申请号：US10967419

    申请日：2004-10-18

    申请人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    IPC分类号： G06F11/30

    CPC分类号： G05B19/41855 ,  G05B2219/37224

    摘要： An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.

    摘要翻译： 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络，并接收和处理图像数据以产生异常报告。 每个处理节点具有耦合到第一高速网络的接口卡，其接收来自第一高速网络的图像数据，并且根据高速接口总线协议格式化图像数据。 接口卡设置表示预定量的图像数据是否已经存储在存储器中的寄存器，并且处理节点读取寄存器以确定预定量的图像数据是否已被存储在存储器中，并且当 寄存器指示预定量的图像数据已被存储在存储器中。

    Memory load balancing
    8.
    发明授权
    Memory load balancing 有权
    内存负载平衡

    公开(公告)号：US07076390B1

    公开(公告)日：2006-07-11

    申请号：US10967397

    申请日：2004-10-18

    申请人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    IPC分类号： G06F15/00

    CPC分类号： G01N21/95607 ,  G06T7/0004

    摘要： An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data until it can process the data. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.

    摘要翻译： 用于检测基板上的异常的检查系统。 第一网络耦合到传感器阵列并传送数据。 过程节点耦合到第一个网络，并处理数据以生成报告。 每个进程节点包括足以缓冲数据的内存，直到它能够处理数据。 每个进程节点都有一个接口卡，格式化耦合到接口卡的高速接口总线的数据。 计算机接收并处理数据以生成报告。 第二个网络接收报告。 作业管理器耦合到第二网络，接收报告，并将信息发送到处理节点以协调数据的处理。

    Status polling
    9.
    发明授权
    Status polling 有权
    状态轮询

    公开(公告)号：US08645100B2

    公开(公告)日：2014-02-04

    申请号：US11622720

    申请日：2007-01-12

    申请人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    IPC分类号： G06F11/30

    CPC分类号： G05B19/41855 ,  G05B2219/37224

    摘要： An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.

    摘要翻译： 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络，并接收和处理图像数据以产生异常报告。 每个处理节点具有耦合到第一高速网络的接口卡，其接收来自第一高速网络的图像数据，并且根据高速接口总线协议格式化图像数据。 接口卡设置表示预定量的图像数据是否已经存储在存储器中的寄存器，并且处理节点读取寄存器以确定预定量的图像数据是否已被存储在存储器中，并且当 寄存器指示预定量的图像数据已被存储在存储器中。

    Memory load balancing
    10.
    发明授权
    Memory load balancing 有权
    内存负载平衡

    公开(公告)号：US07865037B1

    公开(公告)日：2011-01-04

    申请号：US11383510

    申请日：2006-05-16

    申请人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    发明人： Krishnamurthy Bhaskar ,  Mark J. Roulo ,  John S. Taylor ,  Lawrence R. Miller ,  Paul T. Russell ,  Jason Z. Lin ,  Eliezer Rosengaus ,  Richard M. Wallingford ,  Kishore Bubna

    IPC分类号： G06K9/36

    CPC分类号： G01N21/95607 ,  G06T7/0004

    摘要： An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data until it can process the data. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.

    摘要翻译： 用于检测基板上的异常的检查系统。 第一网络耦合到传感器阵列并传送数据。 过程节点耦合到第一个网络，并处理数据以生成报告。 每个进程节点包括足以缓冲数据的内存，直到它能够处理数据。 每个进程节点都有一个接口卡，格式化耦合到接口卡的高速接口总线的数据。 计算机接收并处理数据以生成报告。 第二个网络接收报告。 作业管理器被耦合到第二网络，接收报告，并且向处理节点发送信息以协调数据的处理。