公开(公告)号：US4841775A

公开(公告)日：1989-06-27

申请号：US145156

申请日：1988-01-19

申请人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Yasushi Higashino

发明人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Yasushi Higashino

IPC分类号： G01D5/243 ,  G01L1/10 ,  G01L1/16 ,  G01L1/18 ,  G01L9/00 ,  G01N9/00 ,  G01N35/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  H01L21/60 ,  H04R17/08

CPC分类号： H01L21/76897 ,  G01D5/243 ,  G01L1/162 ,  G01L1/183 ,  G01L1/186 ,  G01L9/0019 ,  G01L9/002 ,  G01L9/0022 ,  G01L9/0023 ,  G01N9/002 ,  G01P15/0802 ,  G01P15/097 ,  G01N2035/00237 ,  H01L2924/3011 ,  H04R17/08

摘要： A vibratory transducer comprising a vibratory beam composed of an n-type layer and having at least one end fixed. The vibratory beam is formed by selectively etching an n-type layer formed by adding impurities locally to a single silicon crystal. The vibratory transducer also comprises means for vibrating the vibratory beam and means for detecting vibration of the vibratory beam. The vibratory transducer measures pressure, temperature, density, etc, by detecting change in the resonant frequency of the vibratory beam. The vibratory beam can be finely etched irrespective of the density of the impurities therein by forming the vibratory beam in an alkaline aqueous solution while applying a negative DC or pulsed voltage to a p-type layer and a positive DC or pulsed voltage to an n-type layer. The vibrating and detecting means for the vibratory beam can be easily provided by making a diode and a transistor including the vibratory beam in the transducer.

摘要翻译： 一种振动换能器，包括由n型层组成并且至少一端固定的振动梁。 通过选择性地蚀刻通过将杂质局部添加到单个硅晶体而形成的n型层来形成振动束。 振动换能器还包括用于振动振动梁的装置和用于检测振动梁的振动的装置。 振动传感器通过检测振动梁的共振频率的变化来测量压力，温度，密度等。 通过在碱性水溶液中形成振动束，同时向p型层施加负的DC或脉冲电压，并向正极直流或脉冲电压施加负的DC或脉冲电压，可以精细地蚀刻振动束，而不管其中的杂质的密度如何。 类型层。 用于振动束的振动和检测装置可以通过在换能器中制造包括振动束的二极管和晶体管来容易地提供。