公开(公告)号：US5384872A

公开(公告)日：1995-01-24

申请号：US9879

申请日：1993-01-27

Applicant: Alan J. Jacobs-Cook ,  Peter E. M. Frere ,  Mark E. C. Bowen

Inventor： Alan J. Jacobs-Cook ,  Peter E. M. Frere ,  Mark E. C. Bowen

IPC: G02B6/26 ,  G01D5/26 ,  G01L1/18 ,  G01L9/00 ,  G02B6/36 ,  G02B6/42

CPC classification number: G02B6/4204 ,  G01D5/268 ,  G01L1/186 ,  G01L9/002 ,  G02B6/4203 ,  G02B6/3652 ,  G02B6/3692

Abstract: A block of monocrystalline silicon oriented so as to have a body surface aligned in a {110} crystallographic plane is selectively etched so as to define a groove for receiving an optical waveguide and a reflecting surface facing the groove. The groove is aligned with a crystallographic axis. The reflecting surface is in a {100} crystallographic plane. Thus, the groove is parallel to the body surface and the reflecting surface is at 45.degree. to the body surface.

Abstract translation: 选择性地蚀刻以{110}晶面对准的体表面取向的单晶硅块，以便限定用于接收光波导的凹槽和面向凹槽的反射表面。 凹槽与<110>晶轴对齐。 反射面在{100}晶面。 因此，凹槽平行于体表面并且反射表面与身体表面成45°角。

公开(公告)号：US20150248159A1

公开(公告)日：2015-09-03

申请号：US14309383

申请日：2014-06-19

Applicant: Florida State University Research Foundation, Inc.

Inventor： Sida Luo ,  Tao Liu

IPC: G06F3/01 ,  B05D3/00 ,  B05D7/20 ,  B05D1/02 ,  G01D5/12 ,  G01L1/18

CPC classification number: G06F3/014 ,  G01L1/18 ,  G01L1/186 ,  G06F1/163 ,  G06F3/011 ,  G06F2203/011

Abstract: Piezoresistive sensors are provided that include a flexible substrate, a flexible thin film coating on the flexible substrate and two or more electrodes connected to the thin film coating at spaced locations of the thin film coating, wherein the thin film coating includes carbon nanotubes, graphite nanoplatelets, or a combination of carbon nanotubes and graphite nanoplatelets. The thin film coating can be a hybrid thin film including carbon nanotubes and graphite nanoplatelets. The flexible substrate can be in a form configured to provide conformal contact with a wearer of the sensor so that body movements of the wearer at or about the flexible substrate effect reversible changes in a piezoresistive signal through the two or more electrodes. Methods are provided for a user to interact with a remote device using the piezoresistive sensors. Methods also are provided for making conductive coated fibers for use in embodiments of the piezoresistive sensors.

Abstract translation: 提供压敏传感器，其包括柔性基板，柔性基板上的柔性薄膜涂层和在薄膜涂层的间隔位置连接到薄膜涂层的两个或多个电极，其中薄膜涂层包括碳纳米管，石墨纳米片 ，或碳纳米管和石墨纳米片的组合。 薄膜涂层可以是包括碳纳米管和石墨纳米片的杂化薄膜。 柔性基底可以是被配置为提供与传感器的佩戴者的保形接触的形式，使得佩戴者在柔性基底处或周围的身体运动通过两个或更多个电极实现压阻信号的可逆变化。 提供了用于使用压阻传感器与远程设备交互的方法。 还提供了用于制造用于压阻式传感器的实施例的导电涂覆纤维的方法。

公开(公告)号：US6031944A

公开(公告)日：2000-02-29

申请号：US999165

申请日：1997-12-30

Applicant: Daniel W. Youngner

Inventor： Daniel W. Youngner

IPC: B81B3/00 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01P15/097 ,  G01P15/10 ,  G02B6/00

CPC classification number: G01P15/097 ,  G01L1/103 ,  G01L1/186 ,  G01L9/0011 ,  G01L9/002

Abstract: A very high temperature microbeam sensor of a resonant integrated microstructure having an electrostatic beam driver and an optical fiber pick-up for sensed light from the beam. The high temperature sensor has no components that are vulnerable to temperatures up to 600 degrees C. Associated components for detection, processing and driving are remote from the sensor environment. By using different materials in the beam assembly, such as tungsten for the beam, and sapphire for the substrate and the shell, the sensor can withstand temperatures up to 1000 degrees C. Also, optical fiber may be used for long distance connections between processing electronics and the driver in the sensing device, by locating a photo detector just outside the very or ultra high temperature sensing environment, and then using optical fiber for sending long distance signals from the processor to the driver photo detector, for eliminating electrical signal-to-noise problems.

Abstract translation: 具有静电束驱动器和用于来自光束的感测光的光纤拾取器的谐振集成微结构的非常高温的微束传感器。 高温传感器没有易受温度高达600摄氏度影响的组件。用于检测，处理和驱动的相关组件远离传感器环境。 通过在梁组件中使用不同的材料，例如用于梁的钨，以及用于衬底和壳的蓝宝石，传感器可以承受高达1000摄氏度的温度。此外，光纤可用于处理电子器件之间的长距离连接 以及感测装置中的驱动器，通过将光电检测器定位在非常或超高温感测环境之外，然后使用光纤将长距离信号从处理器发送到驱动器光电检测器，以消除电信号 - 噪音问题。

公开(公告)号：US5101664A

公开(公告)日：1992-04-07

申请号：US597141

申请日：1990-10-15

Applicant: Bruce D. Hockaday ,  James P. Waters

Inventor： Bruce D. Hockaday ,  James P. Waters

IPC: G01D5/26 ,  G01K5/72 ,  G01L1/18 ,  G01L9/00

CPC classification number: G01K5/72 ,  G01D5/268 ,  G01L1/186 ,  G01L9/002

Abstract: A micromachined silicon pressure transducer employs a vibrating bridge that is formed from the same silicon slab as the pressure responsive diaphragm. The resonant frequency of the bridge is a temperature insensitive representation of the pressure.

Abstract translation: 微加工硅压力传感器采用由与压力响应膜片相同的硅板形成的振动桥。 桥的谐振频率是压力的温度不敏感表示。

公开(公告)号：US5090254A

公开(公告)日：1992-02-25

申请号：US508001

申请日：1990-04-11

Applicant: Henry Guckel ,  Jeffry Sniegowski

Inventor： Henry Guckel ,  Jeffry Sniegowski

IPC: G01L1/10 ,  B81B3/00 ,  B81B7/00 ,  G01L1/18 ,  G01L9/00 ,  H01L29/84 ,  H01L41/08 ,  H01S3/00 ,  H03H3/007 ,  H03H9/02

CPC classification number: H03H9/02259 ,  G01L1/183 ,  G01L1/186 ,  G01L9/0019 ,  G01L9/002 ,  H03H3/0072 ,  H03H2009/02511

Abstract: Force transducers are formed of a beam of polysilicon which is mounted at its ends to a silicon substrate and is encapsulated within a polysilicon shell which defines, with the substrate, a cavity around the resonating beam. The cavity is sealed off from the atmosphere and evacuated to maximize the Q of the resonating beam. The beam is produced by deposition of polysilicon in such a way that, combined with subsequent annealing steps, the beam is in zero or low tensile strain. Resonant excitation of the beam may be accomplished in various ways, including capacitive excitation, and the vibratory motion of the beam may be detected utilizing an implanted resistor which is piezoresistive. Formation of the beam is carried out by depositing the beam on a sacrificial layer and surrounding it in a second sacrificial layer before the encapsulating polysilicon shell is formed. The sacrificial layers are etched out with liquid etchant which passes through channels in the periphery of the shell. Following etching, the interior of the cavity surrounding the beam is maintained in a wash liquid so that the beam is not deflected toward any of the adjacent surfaces, and the wash liquid is removed by freezing and sublimation. The interior surfaces of the cavity and the outer surfaces of the beam are passivated and the channels leading into the cavity may be sealed by oxidation in an oxidizing atmosphere, which also results in consumption of oxygen within the cavity.

公开(公告)号：US5426981A

公开(公告)日：1995-06-27

申请号：US853144

申请日：1992-03-18

Applicant: Alan J. Cook ,  Robert A. Pinnock

Inventor： Alan J. Cook ,  Robert A. Pinnock

IPC: G01L1/00 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01P15/097 ,  G01P15/10 ,  G10K15/04 ,  G01H9/00

CPC classification number: G10K15/046 ,  G01L1/186 ,  G01L9/002 ,  G01P15/097 ,  Y10S73/01

Abstract: A vibrating sensor comprises an elongated element arranged to vibrate at a frequency dependent upon an external stress applied to the sensor, and an optical fiber for coupling light into an end of the element to excite it into vibration. A light-absorbing layer is provided on a longitudinal surface of the element such that the element will change its configuration, e.g. by bending, as the layer absorbs light and heats that side of the element, this alteration in configuration causing a reduction of radiation which is absorbed so that the element restores. The element may define a Fabry-Perot interferometer between its opposite ends.

Abstract translation: 振动传感器包括细长元件，该细长元件被布置为以取决于施加到传感器的外部应力的频率振动，以及用于将光耦合到元件的端部以激发其进入振动的光纤。 在元件的纵向表面上设置光吸收层，使得元件将改变其构造，例如， 通过弯曲，当该层吸收光并加热该元件的该侧时，该构型的这种改变导致吸收的辐射的减少以使元件恢复。 元件可以在其相对端之间限定法布里 - 珀罗干涉仪。

公开(公告)号：US4955238A

公开(公告)日：1990-09-11

申请号：US313391

申请日：1989-02-21

Applicant: Roger E. Jones ,  Peter G. Hale ,  Jolyon P. Willson

Inventor： Roger E. Jones ,  Peter G. Hale ,  Jolyon P. Willson

IPC: G01D5/30 ,  G01L1/18

CPC classification number: G01L1/186 ,  G01D5/305

Abstract: An optical sensor uses a torsion-mounted thin silicon paddle (1) with magnetically soft material on its back. A light beam falls on the front face and part of the beam is reflected to a photo-diode (4) whose output drives a current in a magnetizing coil (5). The magnetic field thus produced rotates the paddle out of the beam, which cuts off the light to the photo-diode. Thus the paddle oscillates with an amplitude which depends on the strain due to the torsion mounting. This modulates the light beam, and if they have different resonances several such sensors can share the same beam with a common read-out.

Abstract translation: 光学传感器在其背面使用具有磁软质材料的扭转安装的薄硅浆（1）。 光束落在正面，光束的一部分被反射到输出驱动磁化线圈（5）中的电流的光电二极管（4）。 这样产生的磁场将桨转动离开光束，将光切断到光电二极管。 因此，桨叶以由于扭转安装引起的应变的幅度振荡。 这调制光束，并且如果它们具有不同的谐振，那么几个这样的传感器可以共享相同的光束并具有共同的读出。

公开(公告)号：US4884450A

公开(公告)日：1989-12-05

申请号：US310501

申请日：1989-02-13

Applicant: John C. Greenwood ,  Peter W. Graves ,  Rosamund C. Neat

Inventor： John C. Greenwood ,  Peter W. Graves ,  Rosamund C. Neat

IPC: G01D5/26 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01L11/02

CPC classification number: G01L1/103 ,  G01D5/268 ,  G01L1/186 ,  G01L11/02 ,  G01L9/0017 ,  G01L9/002 ,  G01L9/0077

Abstract: A pressure sensor includes a resonator element (14) mounted on an optical fibre ferrule (11) whereby light signals for maintaining the resonator in a state of oscillation and for returning a modulated signal to a remote station are coupled to the resonator. The resonator is located in an evacuated cavity and is mounted on a flexible diaphragm whereby pressure changes may be detected as changes in the resonant frequency.

Abstract translation: 压力传感器包括安装在光纤套管（11）上的谐振器元件（14），由此用于将谐振器保持在振荡状态并用于将调制信号返回到远程站的光信号耦合到谐振器。 谐振器位于抽真空腔中并且安装在柔性隔膜上，由此可以将谐振频率的变化检测为压力变化。

公开(公告)号：US4841775A

公开(公告)日：1989-06-27

申请号：US145156

申请日：1988-01-19

Applicant: Kyoichi Ikeda ,  Tetsuya Watanabe ,  Yasushi Higashino

Inventor： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Yasushi Higashino

IPC: G01D5/243 ,  G01L1/10 ,  G01L1/16 ,  G01L1/18 ,  G01L9/00 ,  G01N9/00 ,  G01N35/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  H01L21/60 ,  H04R17/08

CPC classification number: H01L21/76897 ,  G01D5/243 ,  G01L1/162 ,  G01L1/183 ,  G01L1/186 ,  G01L9/0019 ,  G01L9/002 ,  G01L9/0022 ,  G01L9/0023 ,  G01N9/002 ,  G01P15/0802 ,  G01P15/097 ,  G01N2035/00237 ,  H01L2924/3011 ,  H04R17/08

Abstract: A vibratory transducer comprising a vibratory beam composed of an n-type layer and having at least one end fixed. The vibratory beam is formed by selectively etching an n-type layer formed by adding impurities locally to a single silicon crystal. The vibratory transducer also comprises means for vibrating the vibratory beam and means for detecting vibration of the vibratory beam. The vibratory transducer measures pressure, temperature, density, etc, by detecting change in the resonant frequency of the vibratory beam. The vibratory beam can be finely etched irrespective of the density of the impurities therein by forming the vibratory beam in an alkaline aqueous solution while applying a negative DC or pulsed voltage to a p-type layer and a positive DC or pulsed voltage to an n-type layer. The vibrating and detecting means for the vibratory beam can be easily provided by making a diode and a transistor including the vibratory beam in the transducer.

Abstract translation: 一种振动换能器，包括由n型层组成并且至少一端固定的振动梁。 通过选择性地蚀刻通过将杂质局部添加到单个硅晶体而形成的n型层来形成振动束。 振动换能器还包括用于振动振动梁的装置和用于检测振动梁的振动的装置。 振动传感器通过检测振动梁的共振频率的变化来测量压力，温度，密度等。 通过在碱性水溶液中形成振动束，同时向p型层施加负的DC或脉冲电压，并向正极直流或脉冲电压施加负的DC或脉冲电压，可以精细地蚀刻振动束，而不管其中的杂质的密度如何。 类型层。 用于振动束的振动和检测装置可以通过在换能器中制造包括振动束的二极管和晶体管来容易地提供。

公开(公告)号：US4772786A

公开(公告)日：1988-09-20

申请号：US940319

申请日：1986-12-10

Applicant: Roger M. Langdon

Inventor： Roger M. Langdon

IPC: G01L1/24 ,  G01D5/26 ,  G01H9/00 ,  G01K5/52 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01L11/02 ,  G01P15/093 ,  G01D5/34

CPC classification number: G01L1/103 ,  G01D5/268 ,  G01H9/006 ,  G01K5/52 ,  G01L1/186 ,  G01L11/02 ,  G01L9/0014 ,  G01L9/0017 ,  G01L9/002 ,  G01L9/0079 ,  G01P15/093

Abstract: A sensor comprises a beam, e.g. of silicon, which resonates at a frequency dependent on the force imposed on the beam. Light on a line induces resonance of the beam by means of the photothermal effect. The light reflected from the beam is amplitude modulated at the resonance frequency, and returns along the line. It is reflected by a semi-reflecting plane mirror onto a lens which focusses it onto a photodetector. The photodetector produces an output voltage modulated at the oscillation frequency, and is thus representative of the force imposed on beam 1.

Abstract translation: 一个传感器包括一个光束， 的硅，其以取决于施加在光束上的力的频率谐振。 线上的光线通过光热效应引起光束的共振。 从光束反射的光在谐振频率处进行幅度调制，并沿着线返回。 它被半反射平面镜反射到将其聚焦到光电检测器上的透镜上。 光电检测器产生以振荡频率调制的输出电压，因此代表施加在光束1上的力。