公开(公告)号：US10705229B2

公开(公告)日：2020-07-07

申请号：US16207580

申请日：2018-12-03

Applicant: LG Display Co., Ltd.

Inventor： Hyungil Na ,  Jungjune Kim ,  Hanseok Lee

IPC: G01T1/20 ,  H01L27/146

Abstract: An array substrate for a digital X-ray detector, a digital X-ray detector including the same, and a method for manufacturing the same are disclosed. The array substrate reduces a step difference of a PIN diode, removes a bent part from a lower part to reduce characteristic deterioration of the PIN diode, and increases the size of a formation region of the PIN diode to increase a fill factor. To this end, the array substrate allows a source region of an active layer included in a thin film transistor to be in surface contact with a lower electrode of the PIN diode, and disposes the lower electrode over a planarized source region or a base substrate, such that a step difference of the PIN diode is reduced and fill factor is improved.

公开(公告)号：US11209557B2

公开(公告)日：2021-12-28

申请号：US16895785

申请日：2020-06-08

Applicant: LG Display Co., Ltd.

Inventor： Hyungil Na ,  Jungjune Kim ,  Hanseok Lee

IPC: G01T1/20 ,  H01L27/146

Abstract: An array substrate for a digital X-ray detector, a digital X-ray detector including the same, and a method for manufacturing the same are disclosed. The array substrate reduces a step difference of a PIN diode, removes a bent part from a lower part to reduce characteristic deterioration of the PIN diode, and increases the size of a formation region of the PIN diode to increase a fill factor. To this end, the array substrate allows a source region of an active layer included in a thin film transistor to be in surface contact with a lower electrode of the PIN diode, and disposes the lower electrode over a planarized source region or a base substrate, such that a step difference of the PIN diode is reduced and fill factor is improved.

公开(公告)号：US11348963B2

公开(公告)日：2022-05-31

申请号：US16666265

申请日：2019-10-28

Applicant: LG Display Co., Ltd.

Inventor： Jungjune Kim ,  Youngjin Yi ,  Younghun Han ,  Youngyoung Chang

IPC: G01T1/24 ,  H01L27/146 ,  G01T1/20

Abstract: The present disclosure relates to a digital X-ray detector and a thin-film transistor array substrate for the same. Disclosed is a thin-film transistor array substrate for a digital X-ray detector in which deterioration of electrical characteristics of a thin-film transistors made of an oxide semiconductor may be reduced or minimized and aging of a PIN diode caused by external moisture may be reduced or minimized. Further, disclosed is a digital X-ray detector including the array substrate. To this end, the array substrate includes a second protective layer having a variety of patterns so as to cover at least a portion of the PIN diode but not to cover the thin-film transistor. The second protective layer includes SiNx. Thus, a de-hydrogenation path from the thin-film transistor may be secured and an external moisture barrier effect for the PIN diode may be achieved.

公开(公告)号：US11296139B2

公开(公告)日：2022-04-05

申请号：US16223886

申请日：2018-12-18

Applicant: LG Display Co., Ltd.

Inventor： Hyeji Jeon ,  Seungyong Jung ,  Hanseok Lee ,  Hyungil Na ,  Jungjune Kim

IPC: H01L27/146 ,  H01L31/105 ,  G01T1/20 ,  H01L31/0216 ,  H01L31/0224 ,  H01L31/0232

Abstract: An array substrate for a digital X-ray detector, and an X-ray detector including the same are disclosed, which reduce or minimize a contact resistance between a bias electrode and a PIN diode, and also improve a fill factor of the PIN diode. In the array substrate, a dual bias electrode in which a second bias electrode formed of a transparent conductive material is connected to a first bias electrode that is additionally connected to an upper electrode of the PIN diode, such that total resistance of the bias electrodes is reduced and a line width of the first bias electrode formed of a non-transparent material is reduced, resulting in an increased fill factor of the PIN diode.

公开(公告)号：US10707251B2

公开(公告)日：2020-07-07

申请号：US16197170

申请日：2018-11-20

Applicant: LG Display Co., Ltd.

Inventor： Hanseok Lee ,  Hyungil Na ,  Jungjune Kim ,  Seungyong Jung

IPC: H01L27/146 ,  G01T1/208 ,  H01L31/0224 ,  G01T1/20 ,  H01L31/105 ,  H01L27/12 ,  H01L31/117 ,  H01L31/0216 ,  H01L31/0232

Abstract: An array substrate for a digital X-ray detector and the digital X-ray detector including the same are disclosed. The array substrate effectively protects a PIN diode from external moisture or water, maximizes a light transmission region of a PIN diode, and reduces resistance by maximizing the region of a bias wiring. To this end, a closed-loop bias electrode formed to cover a circumferential surface of a PIN diode is used. In detail, the bias electrode includes a closed loop portion and a contact extension portion. The contact extension portion extends from one end of the closed loop portion so as to directly contact an upper electrode, and includes a hollow part therein.