公开(公告)号：US20020041616A1

公开(公告)日：2002-04-11

申请号：US09925041

申请日：2001-08-07

Applicant: Lambda Physik AG.

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

公开(公告)号：US20020015431A1

公开(公告)日：2002-02-07

申请号：US09924814

申请日：2001-08-07

Applicant: Lambda Physik AG

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

Abstract translation: F2准分子激光器在157nm处具有多个紧密分布的感兴趣的谱线，并且通过波长选择光学器件选择一条线。 第一优选实施例的波长选择光学器件包括包围放电室的激光气体体积的双折射布鲁斯特窗口。 窗口优选地包括MgF 2，并且位于放电室的一端。 当窗口的光学厚度与窗口的可旋转调节的正交折射率配合选择时，选择两条线。 窗的透射率取决于正交折射率和窗口的光学厚度。 第二优选实施例的波长选择光学器件至少部分地在激光有源体积内。 以这种方式，以优化光和放电效率，谐振器尺寸和成本的组合的方式执行线选择。 波长选择单元优选地包括具有以布鲁斯特角取向的前表面的棱镜和定向成接收和反射在棱镜内以与该背面成直角的方式行进的普通折射光线的后表面。 背表面还优选地包括用作谐振器的高反射表面的高反射涂层。 波长选择单元优选地还包括用于调整棱镜的取向并且用于封闭与外耦合端相对的壳体的另一端的调节部件。

公开(公告)号：US20020034206A1

公开(公告)日：2002-03-21

申请号：US09925040

申请日：2001-08-07

Applicant: Lambda Physik AG.

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/10 ,  H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

公开(公告)号：US20020015432A1

公开(公告)日：2002-02-07

申请号：US09924817

申请日：2001-08-07

Applicant: Lambda Physik AG

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/223 ,  H01S003/22

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.