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    Laser resonator for improving narrow band emission of an excimer laser
    1.
    发明申请
    Laser resonator for improving narrow band emission of an excimer laser 失效

    公开(公告)号：US20020031161A1

    公开(公告)日：2002-03-14

    申请号：US09923632

    申请日：2001-08-06

    Applicant: Lambda Physik AG

    Inventor： Hans-Stephan Albrecht ,  Peter Heist ,  Klaus Wolfgang Vogler

    IPC: H01S003/098

    CPC classification number: H01S3/08036 ,  H01S3/08 ,  H01S3/08081 ,  H01S3/1305 ,  H01S3/139 ,  H01S3/225

    Abstract: An apparatus and method are provided for bandwidth narrowing of an excimer laser to nullnullnull6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.

    F2-laser with line selection
    2.
    发明申请
    F2-laser with line selection 失效
    F2激光线选线

    公开(公告)号：US20020015431A1

    公开(公告)日：2002-02-07

    申请号：US09924814

    申请日：2001-08-07

    Applicant: Lambda Physik AG

    Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

    IPC: H01S003/22 ,  H01S003/223

    CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

    Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

    Abstract translation: F2准分子激光器在157nm处具有多个紧密分布的感兴趣的谱线，并且通过波长选择光学器件选择一条线。 第一优选实施例的波长选择光学器件包括包围放电室的激光气体体积的双折射布鲁斯特窗口。 窗口优选地包括MgF 2，并且位于放电室的一端。 当窗口的光学厚度与窗口的可旋转调节的正交折射率配合选择时，选择两条线。 窗的透射率取决于正交折射率和窗口的光学厚度。 第二优选实施例的波长选择光学器件至少部分地在激光有源体积内。 以这种方式，以优化光和放电效率，谐振器尺寸和成本的组合的方式执行线选择。 波长选择单元优选地包括具有以布鲁斯特角取向的前表面的棱镜和定向成接收和反射在棱镜内以与该背面成直角的方式行进的普通折射光线的后表面。 背表面还优选地包括用作谐振器的高反射表面的高反射涂层。 波长选择单元优选地还包括用于调整棱镜的取向并且用于封闭与外耦合端相对的壳体的另一端的调节部件。

    Laser resonator for improving narrow band emission of an excimer laser
    3.
    发明申请
    Laser resonator for improving narrow band emission of an excimer laser 审中-公开

    公开(公告)号：US20020131468A1

    公开(公告)日：2002-09-19

    申请号：US10112493

    申请日：2002-03-28

    Applicant: Lambda Physik AG.

    Inventor： Hans-Stephan Albrecht ,  Peter Heist ,  Klaus Wolfgang Volger

    IPC: H01S003/22 ,  H01S003/223

    CPC classification number: H01S3/08036 ,  H01S3/08 ,  H01S3/08081 ,  H01S3/1305 ,  H01S3/139 ,  H01S3/225

    Abstract: An apparatus and method are provided for bandwidth narrowing of an excimer laser to nullnullnull6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.

    F2-laser with line selection
    4.
    发明申请
    F2-laser with line selection 失效

    公开(公告)号：US20020041616A1

    公开(公告)日：2002-04-11

    申请号：US09925041

    申请日：2001-08-07

    Applicant: Lambda Physik AG.

    Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

    IPC: H01S003/22 ,  H01S003/223

    CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

    Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

    Gas performance control system for gas discharge lasers
    5.
    发明申请
    Gas performance control system for gas discharge lasers 失效
    气体放电激光器气体性能控制系统

    公开(公告)号：US20020031157A1

    公开(公告)日：2002-03-14

    申请号：US09842281

    申请日：2001-04-24

    Applicant: Lambda Physik AG

    Inventor： Peter Heist ,  Matthias Kramer ,  Juergen Kleinschmidt ,  Sergei Govorkov ,  Marcus Serwazi ,  Thomas Junemann

    IPC: H01S003/22 ,  H01S003/223

    CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

    Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

    Abstract translation: 准分子或分子氟激光系统包括包含气体混合物的放电室，连接到用于激励气体混合物的电源电路的多个电极，用于产生激光束的谐振器，处理器和用于监测放大的自发发射的装置 ASE）信号，例如优选ASE检测器。 处理器从优选的ASE检测器接收指示激光的ASE信号的信号。 基于来自ASE检测器的信号，处理器确定是否启动用于调整激光系统的参数的响应动作。

    F2-laser with line selection
    7.
    发明申请
    F2-laser with line selection 失效

    公开(公告)号：US20020034206A1

    公开(公告)日：2002-03-21

    申请号：US09925040

    申请日：2001-08-07

    Applicant: Lambda Physik AG.

    Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

    IPC: H01S003/10 ,  H01S003/22 ,  H01S003/223

    CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

    Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

    Excimer laser
    8.
    发明申请
    Excimer laser 失效

    公开(公告)号：US20020015432A1

    公开(公告)日：2002-02-07

    申请号：US09924817

    申请日：2001-08-07

    Applicant: Lambda Physik AG

    Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

    IPC: H01S003/223 ,  H01S003/22

    CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

    Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

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