公开(公告)号：US09991076B2

公开(公告)日：2018-06-05

申请号：US14763681

申请日：2014-01-28

Applicant: Massachusetts Institute of Technology

Inventor： Vladimir Bulovic ,  Jeffrey H. Lang ,  Hae-Seung Lee ,  Timothy M. Swager ,  Trisha L. Andrew ,  Matthew Eric D'Asaro ,  Parag Deotare ,  Apoorva Murarka ,  Farnaz Niroui ,  Ellen Sletten ,  Annie I-Jen Wang

IPC: H02N1/00 ,  H01L41/00 ,  H01H59/00 ,  H01H49/00 ,  H01L45/00

CPC classification number: H01H59/0009 ,  H01H49/00 ,  H01L45/00 ,  Y10T156/10

Abstract: Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

公开(公告)号：US20150357142A1

公开(公告)日：2015-12-10

申请号：US14763681

申请日：2014-01-28

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： Vladimir Bulovic ,  Jeffrey H. Lang ,  Hae-Seung Lee ,  Timothy M. Swager ,  Trisha L. Andrew ,  Matthew Eric D'Asaro ,  Parag Deotare ,  Apoorva Murarka ,  Farnaz Niroui ,  Ellen Sletten ,  Annie I-Jen Wang

IPC: H01H59/00 ,  H01H49/00

CPC classification number: H01H59/0009 ,  H01H49/00 ,  H01L45/00 ,  Y10T156/10

Abstract: Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

Abstract translation: 本文所述的机电装置可以采用隧道现象作为低压开关。 相反的电极可以由可弹性变形的层隔开，在一些情况下，这些可由非导电材料组成。 在一些实施例中，弹性变形层基本上不含导电材料。 当施加足够的致动电压和/或力时，电极彼此相向，并且因此可弹性变形层被压缩。 尽管可弹性变形层防止电极彼此直接接触。 相反，当电极彼此足够接近时，在其间产生隧穿电流。 可弹性变形层可以呈现类似弹簧的行为，使得在释放致动电压和/或力时，恢复电极之间的间隔距离。 因此，可以在打开和关闭的开关位置之间致动机电装置。