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    Method and applications of thin-film membrane transfer
    1.
    发明授权
    Method and applications of thin-film membrane transfer 有权
    薄膜转移的方法与应用

    公开(公告)号：US09391423B2

    公开(公告)日：2016-07-12

    申请号：US14541071

    申请日：2014-11-13

    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

    Inventor： Vladimir Bulovic ,  Jeffrey Hastings Lang ,  Apoorva Murarka ,  Annie I-Jen Wang ,  Wendi Chang

    IPC: H01L29/84 ,  G01L11/02 ,  H01S3/106 ,  H01S3/0933 ,  H01S3/0941 ,  H01S3/07 ,  H01S3/08 ,  H01S3/16 ,  H01S3/13 ,  H01S3/105 ,  G02B26/00 ,  G01L9/00 ,  B81C1/00

    CPC classification number: H01S3/1053 ,  B81B2201/02 ,  B81B2201/042 ,  B81C1/00158 ,  B81C1/00634 ,  B81C2201/0194 ,  G01L1/24 ,  G01L9/0005 ,  G01L9/0072 ,  G01L11/02 ,  G02B26/001 ,  H01L29/84 ,  H01S3/07 ,  H01S3/08059 ,  H01S3/0933 ,  H01S3/094 ,  H01S3/0941 ,  H01S3/106 ,  H01S3/1305 ,  H01S3/16 ,  H01S3/1693

    Abstract: The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (“MEMS”) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.

    Abstract translation: 本公开涉及在无溶剂环境中微机电系统（“MEMS”）的微接触印刷的方法和装置。 所公开的实施方案使得能够在聚对二甲苯层上形成复合膜并将复合结构转移到接收结构以形成由复合膜覆盖的一个或多个微腔。 聚对二甲苯膜的厚度可以在约100nm-2微米的范围内; 200nm-1微米，200-300nm，300-500nm，500nm至1微米和1-30微米。 接下来，在聚对二甲苯之上形成一个或多个二次层以产生复合膜。 复合膜可以具有约100nm至700nm至几微米的厚度。 可以测量复合膜的响应于外力的偏转以提供无接触检测器。 相反，可以使用外部偏压来致动复合膜，以产生与施加的偏压相称的偏转。 所公开的实施例的应用包括可调激光器，麦克风，微型扬声器，远程激活的无接触压力传感器等。

    ELECTRONICALLY CONTROLLED SQUISHABLE COMPOSITE SWITCH
    3.
    发明申请
    ELECTRONICALLY CONTROLLED SQUISHABLE COMPOSITE SWITCH 有权
    电子控制可混合复合开关

    公开(公告)号：US20150228805A1

    公开(公告)日：2015-08-13

    申请号：US14593066

    申请日：2015-01-09

    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

    Inventor： Vladimir Bulovic ,  Jeffrey H. Lang ,  Sarah Paydavosi ,  Annie I-Jen Wang ,  Trisha L. Andrew ,  Apoorva Murarka ,  Farnaz Niroui ,  Frank Yaul ,  Jeffrey C. Grossman

    IPC: H01L29/84 ,  H01L29/417 ,  H01L27/06

    CPC classification number: H01L29/84 ,  H01L27/0629 ,  H01L29/41725 ,  H01L45/00 ,  Y10S977/742

    Abstract: A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.

    Abstract translation: 一种用于制造模拟和数字电子学的方法和装置，其包括掺杂有导电颗粒的可堆置材料的复合材料。 微机电系统（MEMS）装置具有由复合材料制成的通道，其中通道形成器件的主导通路径。 在施加电压时，电容执行器挤压复合材料，使其变得导电。 可挤压装置包括控制电极，以及电气和机械连接到两个端子电极的复合体。 通过相对于第一端子电极向控制电极施加电压，在控制电极和第一端子电极之间产生电场。 该电场导致控制电极和第一端子电极之间的吸引力，其压缩复合材料并且能够电控制从第一端子电极通过通道到第二端子电极的电子传导。

    ELECTROMECHANICAL DEVICE
    7.
    发明申请
    ELECTROMECHANICAL DEVICE 有权
    电动装置

    公开(公告)号：US20150357142A1

    公开(公告)日：2015-12-10

    申请号：US14763681

    申请日：2014-01-28

    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

    Inventor： Vladimir Bulovic ,  Jeffrey H. Lang ,  Hae-Seung Lee ,  Timothy M. Swager ,  Trisha L. Andrew ,  Matthew Eric D'Asaro ,  Parag Deotare ,  Apoorva Murarka ,  Farnaz Niroui ,  Ellen Sletten ,  Annie I-Jen Wang

    IPC: H01H59/00 ,  H01H49/00

    CPC classification number: H01H59/0009 ,  H01H49/00 ,  H01L45/00 ,  Y10T156/10

    Abstract: Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

    Abstract translation: 本文所述的机电装置可以采用隧道现象作为低压开关。 相反的电极可以由可弹性变形的层隔开，在一些情况下，这些可由非导电材料组成。 在一些实施例中，弹性变形层基本上不含导电材料。 当施加足够的致动电压和/或力时，电极彼此相向，并且因此可弹性变形层被压缩。 尽管可弹性变形层防止电极彼此直接接触。 相反，当电极彼此足够接近时，在其间产生隧穿电流。 可弹性变形层可以呈现类似弹簧的行为，使得在释放致动电压和/或力时，恢复电极之间的间隔距离。 因此，可以在打开和关闭的开关位置之间致动机电装置。

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