公开(公告)号：US20160209246A1

公开(公告)日：2016-07-21

申请号：US14978419

申请日：2015-12-22

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiaki KATO

IPC: G01D5/347

CPC classification number: G01D5/34746 ,  G01D5/24438

Abstract: In a scale, a reference detection pattern and a displacement detection pattern are formed. A detection head outputs a reference detection signal, a phase compensation signal, and a displacement detection signal. A signal processing unit generates a reference signal by amplifying one or both of the phase compensation signal and the reference detection signal and adding up them, and detects a position of the detection head relative to the scale. A combined light receiving grating includes a reference detection light receiving grating and a phase compensation light receiving grating disposed so as to be shifted from the reference detection light receiving grating in the measurement direction. A combined light receiving element includes a reference detection light receiving element configured to output the reference detection signal and a phase compensation light receiving element configured to output the phase compensation signal.

Abstract translation: 按比例，形成基准检测图案和位移检测图案。 检测头输出参考检测信号，相位补偿信号和位移检测信号。 信号处理单元通过放大相位补偿信号和参考检测信号中的一个或两者并相加起来产生参考信号，并且检测检测头相对于刻度的位置。 组合的光接收光栅包括参考检测光接收光栅和相对补偿光接收光栅，其被布置为在测量方向上从基准检测光接收光栅偏移。 组合的光接收元件包括被配置为输出参考检测信号的参考检测光接收元件和被配置为输出相位补偿信号的相位补偿光接收元件。

公开(公告)号：US20200326183A1

公开(公告)日：2020-10-15

申请号：US16818400

申请日：2020-03-13

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiaki KATO

IPC: G01B11/25 ,  G01B11/00

Abstract: A head provided to a shape measuring apparatus includes a translucent stylus head that displaces integrally with a light source and a photoreceiver, and is arranged between the light source and the photoreceiver. The stylus head includes an incident portion that causes the light from the light source to be incident on an interior of the stylus head, a reflection portion that totally reflects the incident light, and a light emission portion that emits the light that is totally reflected toward the photoreceiver. Evanescent light is generated at the measurement surface by the light that is totally reflected by the total reflection surface. The stylus head brings the measurement surface and a surface of a measurable object to face each other, separates the measurement surface from the surface of the measurable object, and is arranged such that the evanescent light reaches the surface of the measurable object.

公开(公告)号：US20200309572A1

公开(公告)日：2020-10-01

申请号：US16823953

申请日：2020-03-19

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiaki KATO

IPC: G01D5/347 ,  G01D5/30

Abstract: An optical encoder includes a scale; a head that includes a light source, an image capturer, and a lens array having a first lens and a second lens; and a calculator. The calculator includes a signal generator that generates a sine wave signal; an analysis region extractor that extracts a first analysis region and a second analysis region; a signal combiner that, based on an inter-regional distance, uses a sine wave signal of the second analysis region to generate a sine wave signal that extends to a first end of the first analysis region such that the generated sine wave signal overlaps with a sine wave signal of the first analysis region, and combines the sine wave signal of the first analysis region with the generated sine wave signal; and a displacement amount calculator that calculates an amount of relative displacement based on the sine wave signal that is combined by the signal combiner.

公开(公告)号：US20160153812A1

公开(公告)日：2016-06-02

申请号：US14943309

申请日：2015-11-17

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiaki KATO

IPC: G01D5/347

CPC classification number: G01D5/34715 ,  G01D5/34746 ,  G01D5/366

Abstract: An optical encoder includes an origin point detection scale having an origin point detection pattern and an inverse origin point detection pattern that is the inverse of the origin point detection pattern; a light source emitting light at the origin point detection scale; a light source grid that is inserted on the light source side of the origin point detection scale, the light source grid having two first light source grid patterns corresponding to the origin point detection pattern and the inverse origin point detection pattern, respectively; a photoreceiver detecting a signal from light that has passed through the origin point detection scale; and a photoreceiver grid inserted on the photoreceiver side of the origin point detection scale, the photoreceiver grid having two first photoreceiver grid patterns that are a pattern either identical to or the inverse of the first light source grid pattern.

Abstract translation: 光学编码器包括原点检测刻度，其具有与原点检测图案相反的原点检测图案和反原点检测图案; 在原点检测标尺处发光的光源; 光源栅格插入原点检测标尺的光源侧，光源栅格分别具有对应于原点检测图案和反原点检测图案的两个第一光源栅格图案; 光接收器检测来自已经通过原点检测标尺的光的信号; 以及光接收器格栅，其插入在原点检测刻度的光接收器侧上，光接收器栅格具有两个第一光接收器栅格图案，其为与第一光源栅格图案相同或相反的图案。

公开(公告)号：US20230304790A1

公开(公告)日：2023-09-28

申请号：US18120581

申请日：2023-03-13

Applicant: MITUTOYO CORPORATION

Inventor： Yumiko MORI ,  Yoshiaki KATO

IPC: G01B11/24 ,  G01B11/25 ,  G01B9/0209 ,  G06T7/521 ,  G06T7/55

CPC classification number: G01B11/2441 ,  G01B11/25 ,  G01B9/0209 ,  G06T7/521 ,  G06T7/55

Abstract: A measurement method of a surface shape includes combining N stacked images captured while scanning the measuring head. For a position in the N stacked images, from an integral curve including values of N points, which is obtained by integrating square values or absolute values of the interference signal including values at N points: a start-point-side noise part straight line that approximates a start-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the start-point-side than the measurement target surface; an end-point-side noise part straight line that approximates an end-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the end-point-side than the measurement target surface; and a surface proximity straight line that approximates surface proximity part.

公开(公告)号：US20200319001A1

公开(公告)日：2020-10-08

申请号：US16811420

申请日：2020-03-06

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiaki KATO

IPC: G01D5/347

Abstract: Scale pattern in a scale of an optical encoder includes a first scale mark that blocks a first light from being guided to an image capturer and guides a second light to the image capturer, and a second scale mark that guides the first light and the second light to the image capturer. Second scale mark is arranged in an ABS pattern and the first scale mark is arranged in an INC pattern by incorporating the second scale mark. Image capturer includes a first image capturing section that captures an image of the ABS pattern from the first light that arrives via the second scale mark, and a second image capturing section that captures an image of the INC pattern from the second light that arrives via the first scale mark and the second scale mark. Calculator calculates a position of a head relative to the scale.

公开(公告)号：US20140362464A1

公开(公告)日：2014-12-11

申请号：US14284694

申请日：2014-05-22

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiaki KATO

IPC: G11B20/10 ,  G11B5/008

CPC classification number: G11B20/10259 ,  G01D5/24428 ,  G01D5/24476 ,  G01D5/2454 ,  G01D5/34746 ,  G11B5/00813

Abstract: A position detection encoder includes a scale and a detection head and has position detection circuits which are capable of outputting respective pieces of position information on Xf, Xs two tracks. The displacement detection encoder includes: a speed detection circuit which is provided in the detection head and detects a relative speed Xf, Xs relative to the scale; and a delay generation circuit which provides a time difference between two output request signals, the time difference being provided on the basis of a fine adjustment time tadj based on the relative speed Xf, Xs and the respective pieces of position information Xf, Xs on the two tracks, the output request signals St1, St2 urging the first and second position detection circuits to output the pieces of position information on Xf, Xs the two tracks.

Abstract translation: 位置检测编码器包括标尺和检测头，并且具有位置检测电路，其能够输出关于Xf，Xs两个轨道的各个位置信息。 位移检测编码器包括：速度检测电路，其设置在检测头中，并检测相对于标尺的相对速度Xf，Xs; 以及延迟生成电路，其在两个输出请求信号之间提供时间差，基于相对速度Xf，Xs和相应的位置信息Xf，Xs，基于微调时间tadj提供的时间差 两个轨道，输出请求信号St1，St2推动第一和第二位置检测电路输出关于Xf的位置信息，Xs是两个轨道。