摘要:
An exposure apparatus and method for irradiating a mask having a circuit pattern with light emitted from an intermittently emitting type light source so that the mask pattern is photolithographically transferred onto a semiconductor wafer, wherein the output of the intermittent-emission type light source is detected prior to the photolithographic transfer of the mask pattern onto the wafer and, in accordance with the result of such detection, the amount of exposure of the wafer to the light beam from the mask is controlled.
摘要:
An exposure apparatus having a single light source and a plurality of exposure stages for carrying thereon wafers, respectively. The light emitting from the light source is directed to a plurality of masks simultaneously or sequentially, so that the patterns of the masks are simultaneously or sequentially transferred onto the wafers, respectively, carried on the exposure stages. In a preferred form, the light source comprises an excimer laser providing a pulsed laser beam.
摘要:
Step-and-repeat exposure apparatus for printing, by way of a projection optical system, images of a pattern formed on a reticle upon different portions of a semiconductor wafer, placed on a movable stage, is disclosed. On the portion of the movable stage other than the portion upon which the semiconductor wafer is placed, an erasably writable recording medium such as, for example, a magneto-optic recording material or a photochromic material is provided. An image of a mark of a reticle is formed on the recording medium by use of the projection optical system, the thus formed image being photoelectrically detected. From the result of the detection, alignment information concerning, for example, a magnification error, a focus error, a positional error between the reticle and the wafer, for example is obtained.
摘要:
An exposure apparatus wherein an image forming system forms an image of a pattern upon a photosensitive layer, and a detecting system detects a spherical aberration of the image forming system. The detected spherical aberration of the image forming system is adjusted or controlled in a suitable way, whereby correct pattern transfer operation is assured.
摘要:
The present invention reduces an uneven color of a color having two or more colors of inks, the uneven color occurring due to manufacturing variations of ink ejection nozzles and so on. Each of a plurality of correction tables that is assigned to each predetermined number of nozzles that are used for printing on a common region in the print medium, of a plurality of nozzle arrays formed on a print head, each of the nozzle arrays ejecting a plurality of inks including a first ink and a second ink whose color is different from the color of the first ink, is generated on the basis of at least an ink ejection property of nozzles ejecting the first and second inks.
摘要:
In a recording medium selecting step, a recording medium on which an image is to be formed is selected from among a plurality of recording media having unique color tones. In a mode setting step, it is determined whether the image is to be output in a monochrome mode. In a signal converting step, a luminance signal corresponding to the image is converted into a density signal when the monochrome mode is set in the mode setting step. In a forming step, an image is formed on the recording medium selected in the recording medium selecting step according to the density signal. The signal converting step is controlled so that a color tone of an intermediate-density portion of the image formed on the recording medium is set to be near a*=A in the a*b* plane of the CIE-L*a*b* space, where A is a constant.
摘要翻译:在记录介质选择步骤中,从具有唯一色调的多个记录介质中选择要在其上形成图像的记录介质。 在模式设定步骤中,确定是否以单色模式输出图像。 在信号转换步骤中,当在模式设置步骤中设置单色模式时,与图像对应的亮度信号被转换成浓度信号。 在形成步骤中,根据密度信号在记录介质选择步骤中选择的记录介质上形成图像。 控制信号转换步骤,使得形成在记录介质上的图像的中间密度部分的色调被设置为在CIE-L * a * b的a * b *平面中接近a * = A *空格,其中A是常数。
摘要:
Radiated noise caused by switching noise of power semiconductor elements in an electrical converter is reduced. The electrical converter is characterized in comprising: a case; a power module mounted on the case and comprising a plurality of power semiconductor elements; a metal plate mounted to the power module and fixed to the case; a control circuit board arranged on the metal plate, for controlling the power semiconductor elements; and a direct-current input terminal electrically connected to a battery. The electrical converter is also characterized in being provided at the bottom with a transmission or motor, and at the top with a connector for connecting the battery and the direct-current input terminal. The electrical converter is further characterized in that the metal plate is curved, and a portion of the curved metal plate is arranged in the space between the control circuit board and the direct-current input terminal.
摘要:
The present invention prints a plurality of ejection characteristics detection patterns with different print duties. Each of the patterns is divided into areas with a certain number of pixels, and each area is read with a plurality of different read colors. Based on the read values by the read color for each area, evaluation values by the read color that indicates ejection variation volume that is the difference between ink ejection volume to each area and standard ink ejection volume are set. A weighted average is obtained by applying the weight determined by reading accuracy of a reading unit to evaluation values by color for each area with different print duties formed by the same nozzle. The ejection characteristics of a nozzle that prints each of the areas are evaluated using the weighted average value.
摘要:
An image processing apparatus which previously sets a reduction order based on saturation with respect to inks to be used in a saving mode. When a color uses two or more colors of ink, the image processing apparatus reduces the ink featuring high on the reduction order, or increases the reduction amount of the ink featuring high on the reduction order.
摘要:
When an output image is observed, an image processing apparatus by which image observation can be performed always in a satisfactory state irrespective of its observation environment and a change of a human's visual characteristic is provided. In this image processing apparatus, a first output unit outputs the target image in a first gradation reproduction range, and a second output unit outputs the target image output by the first output unit in a second gradation reproduction range. At this time, a correction unit performs a correction process, i.e., gradation conversion process, to the target image output by the second output unit, on the basis of information concerning the environment for observing the output result of the target image by the second output unit.