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公开(公告)号：US06903630B2
公开(公告)日：2005-06-07
申请号：US10437908
申请日：2003-05-15
申请人： Michio Miura , Masahiko Imai , Takashi Matsuda , Masanori Ueda , Osamu Ikata
发明人： Michio Miura , Masahiko Imai , Takashi Matsuda , Masanori Ueda , Osamu Ikata
CPC分类号： H03H9/6436 , H03H9/6483 , H03H9/725
摘要： A surface acoustic wave device includes multiple SAW resonators formed on a piezoelectric substrate and connected in a ladder arrangement, the piezoelectric substrate having a polarization inverted region on which either a series-arm resonator or a parallel-arm resonator is formed.
摘要翻译： 表面声波装置包括形成在压电基板上并以梯形布置连接的多个SAW谐振器，压电基板具有在其上形成有串联臂谐振器或并联臂谐振器的偏振反转区域。
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2.发明授权Surface acoustic wave device, filter device and method of producing the surface acoustic wave device 失效声表面波装置，滤波装置及声表面波装置的制造方法公开(公告)号：US07067956B2
公开(公告)日：2006-06-27
申请号：US10653213
申请日：2003-09-03
申请人： Masahiko Imai , Michio Miura , Takashi Matsuda , Masanori Ueda , Osamu Ikata
发明人： Masahiko Imai , Michio Miura , Takashi Matsuda , Masanori Ueda , Osamu Ikata
IPC分类号： H03H9/25
CPC分类号： H03H3/10 , H03H9/02574 , H03H9/02622 , H03H9/02834 , H03H9/6483
摘要： A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.
摘要翻译： 声表面波器件包括其上形成有梳状电极的谐振器的压电基片; 以及直接接合到所述压电基板并且比所述压电基板更不膨胀的硅基板，在所述硅基板中形成有位于所述谐振器中的至少一个谐振器的空腔。
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公开(公告)号：US06903626B2
公开(公告)日：2005-06-07
申请号：US10315945
申请日：2002-12-11
申请人： Jun Tsutsumi , Masahiko Imai , Shogo Inoue , Takashi Matsuda
发明人： Jun Tsutsumi , Masahiko Imai , Shogo Inoue , Takashi Matsuda
CPC分类号： H03H9/6483 , H03H9/02559
摘要： A surface acoustic wave element includes surface acoustic wave (SAW) resonators arranged in a ladder formation on a piezoelectric substrate. A resonance frequency fS1 of a series-arm resonator of a first stage viewed from an input side of the surface acoustic wave element and an average resonance frequency fSav of all of remaining series-arm SAW resonators satisfy 1.00fSav>fS1≧0.99fSav.
摘要翻译： 表面声波元件包括以压电基片上的梯子形式布置的表面声波（SAW）谐振器。 从表面声波元件的输入侧观察的第一级的串联臂谐振器的谐振频率f S1 S1和所有的平均谐振频率f S Sav 剩余的串联臂式SAW谐振器满足1.00f≤Sm = 0.99f Sav。
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4.发明授权公开(公告)号：US08665579B2
公开(公告)日：2014-03-04
申请号：US12366417
申请日：2009-02-05
申请人： Takeaki Shimanouchi , Masahiko Imai , Xiaoyu Mi , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Xiaoyu Mi , Satoshi Ueda
IPC分类号： G01G5/00
CPC分类号： H01G5/16
摘要： There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.
摘要翻译： 证明了可变电容器，其包括基板，设置在用于馈送信号的基板的表面上的信号线，设置在表面上的接地电极和与信号线和接地电极相对的可动电极，可动电极 可操作地朝着和远离信号线和接地电极移动。 可移动电极可以通过可动电极和信号线之间以及可移动电极和信号线之间的静电吸引而移位。 可移动电极的位移量根据产生静电吸引力的电压的量而变化。
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公开(公告)号：US20100246088A1
公开(公告)日：2010-09-30
申请号：US12662177
申请日：2010-04-05
申请人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
摘要： A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion that provides partial connection between the fixed electrode and the movable electrode film. For making this variable capacitor, a first electrode is formed to serve as the fixed electrode. Then, an anchor portion is formed on the fixed electrode, and a sacrifice film is formed to cover the fixed electrode but partially expose the anchor portion. A second electrode is formed on the sacrifice film to serve as the movable electrode film, bonded to the anchor portion. Finally, the sacrifice film is removed.
摘要翻译： 电容器制造方法提供了可变电容器，其电容在温度变化的影响下保持稳定。 这种可变电容器包括固定电极，与固定电极相对的可动电极膜，以及在固定电极和可动电极膜之间提供部分连接的锚固部分。 为了制造该可变电容器，形成第一电极用作固定电极。 然后，在固定电极上形成锚定部，并且形成牺牲膜以覆盖固定电极，但是部分地露出锚定部。 在牺牲膜上形成第二电极，作为可动电极膜，结合到锚定部。 最后，牺牲片被去除。
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公开(公告)号：US20100142117A1
公开(公告)日：2010-06-10
申请号：US12604935
申请日：2009-10-23
申请人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01G5/011
摘要： A variable capacitive element which includes a substrate; a signal line provided on the substrate; a movable electrode provided so as to cross over the signal line and having a first end and a second end which are fixed to the substrate; and a fixed capacitive portion provided between at least one of the both ends of the movable electrode and the substrate.
摘要翻译： 一种包括衬底的可变电容元件; 设置在基板上的信号线; 可移动电极，设置成跨过信号线并且具有固定到基板的第一端和第二端; 以及设置在可动电极和基板的两端中的至少一个之间的固定电容部。
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公开(公告)号：US20080239611A1
公开(公告)日：2008-10-02
申请号：US12071945
申请日：2008-02-28
申请人： Yu Yonezawa , Takeaki Shimanouchi , Naoyuki Mishima , Satoshi Ueda , Xiaoyu Mi , Masahiko Imai
发明人： Yu Yonezawa , Takeaki Shimanouchi , Naoyuki Mishima , Satoshi Ueda , Xiaoyu Mi , Masahiko Imai
IPC分类号： H01H47/00
CPC分类号： H01G5/16 , B81B7/008 , B81C99/003 , H01H2059/0018
摘要： In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is applied between the two electrodes. A current passing through the micro machine device due to the application of the control voltage are detected with respect to positive and negative sides, and parameters related to a capacitance of the micro machine device are acquired with respect to the positive and negative sides on the basis of the detected current. The control voltage is controlled so that the parameters acquired with respect to the positive and negative sides accord with each other. Thus, variation of the capacitance between the positive side and the negative side can be suppressed in switching drive of a variable capacitance device.
摘要翻译： 在用于驱动控制包括彼此相对的两个电极和夹在其间的电介质层的微机器装置的方法中，在两个电极之间施加正负极性交替反转的矩形波形中的控制电压。 针对正侧和负侧检测由于施加控制电压而穿过微机器件的电流，并且基于正负侧获取与微机器件的电容相关的参数 的检测电流。 控制电压被控制，使得相对于正侧和负侧获取的参数彼此一致。 因此，可变电容器件的开关驱动可以抑制正侧和负极之间的电容的变化。
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公开(公告)号：US20060171097A1
公开(公告)日：2006-08-03
申请号：US11104453
申请日：2005-04-13
IPC分类号： H01G5/00
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/417 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要翻译： 第一可动电极是平坦的，但是第二可动电极变形为凸形。 电介质层被放置在第二可动电极的相对表面上。 通过调整施加在第一可动电极和第二可动电极之间的电压，通过在两个电极之间产生的静电吸引力确保两个电极之间的任意距离，并获得所需的静电电容。 当两个电极之间的距离缩短时，首先在中心处，第一可移动电极的一部分和第二可动电极的一部分彼此接触，并且它们之间具有介电层。 然后，第一可动电极和电介质层（第二可动电极）从接触部朝向周边依次相接触，接触面积逐渐增大。
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9.发明授权Variable capacitive element, variable capacitive device, and method for driving the variable capacitive element 有权可变电容元件，可变电容器件和驱动可变电容元件的方法公开(公告)号：US08363381B2
公开(公告)日：2013-01-29
申请号：US12910267
申请日：2010-10-22
IPC分类号： H01G5/01
摘要： A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.
摘要翻译： 可变电容元件包括彼此绝缘的第一固定电极和第二固定电极，布置成面对第一固定电极和第二固定电极的可动电极，设置在可动电极和第一固定电极之间的电介质层 以及第二固定电极，相对于可动电极的电位向第一固定电极施加第一驱动电压的第一配线部，以及用于向第二固定电极施加第二驱动电压的第二配线部， 参考可动电极的电位，第二驱动电压具有与第一驱动电压的极性不同的极性。
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公开(公告)号：US20110216469A1
公开(公告)日：2011-09-08
申请号：US13037762
申请日：2011-03-01
摘要： There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.
摘要翻译： 提供了一种制造器件的方法，优选用于微机电系统。 该方法包括在基底上形成第一电极，其中第一电极至少在其一端具有第一倾斜端; 在所述第一电极上形成牺牲层，其中所述牺牲层具有第一倾斜边缘，所述第一倾斜边缘和所述第一倾斜端部彼此重叠，使得所述第一倾斜边缘的厚度随着所述第一倾斜端部的厚度而减小 增加 在所述第一电极上形成第一间隔物，其中所述第一间隔件与所述第一倾斜边缘接触; 在所述牺牲层和所述第一间隔物上形成束电极; 并且在形成束电极之后去除牺牲层。
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