公开(公告)号：US06903630B2

公开(公告)日：2005-06-07

申请号：US10437908

申请日：2003-05-15

申请人： Michio Miura ,  Masahiko Imai ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

发明人： Michio Miura ,  Masahiko Imai ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

IPC分类号： H03H9/25 ,  H03H9/64 ,  H03H9/72

CPC分类号： H03H9/6436 ,  H03H9/6483 ,  H03H9/725

摘要： A surface acoustic wave device includes multiple SAW resonators formed on a piezoelectric substrate and connected in a ladder arrangement, the piezoelectric substrate having a polarization inverted region on which either a series-arm resonator or a parallel-arm resonator is formed.

摘要翻译： 表面声波装置包括形成在压电基板上并以梯形布置连接的多个SAW谐振器，压电基板具有在其上形成有串联臂谐振器或并联臂谐振器的偏振反转区域。

公开(公告)号：US07067956B2

公开(公告)日：2006-06-27

申请号：US10653213

申请日：2003-09-03

申请人： Masahiko Imai ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

发明人： Masahiko Imai ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

IPC分类号： H03H9/25

CPC分类号： H03H3/10 ,  H03H9/02574 ,  H03H9/02622 ,  H03H9/02834 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.

摘要翻译： 声表面波器件包括其上形成有梳状电极的谐振器的压电基片; 以及直接接合到所述压电基板并且比所述压电基板更不膨胀的硅基板，在所述硅基板中形成有位于所述谐振器中的至少一个谐振器的空腔。

公开(公告)号：US07741931B2

公开(公告)日：2010-06-22

申请号：US11902800

申请日：2007-09-25

申请人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/72 ,  H03H9/64

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6459 ,  H03H9/6469 ,  H03H9/6483

摘要： A filter includes a parallel resonator having first comb electrodes provided on a piezoelectric substrate and a first dielectric film that covers the first comb electrodes, and a series resonator having second comb electrodes provided on the piezoelectric substrate and a second dielectric film covers the second comb electrodes and is made of a material identical to that of the first dielectric film. The first dielectric film has a different thickness from that of the second dielectric film.

摘要翻译： 滤波器包括并联谐振器，其具有设置在压电基板上的第一梳状电极和覆盖第一梳状电极的第一电介质膜，以及设置在压电基板上的具有第二梳状电极的串联谐振器，第二电介质膜覆盖第二梳状电极 并且由与第一电介质膜相同的材料制成。 第一电介质膜的厚度与第二电介质膜的厚度不同。

公开(公告)号：US07659653B2

公开(公告)日：2010-02-09

申请号：US11902184

申请日：2007-09-19

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/145 ,  H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0057 ,  H03H9/02574 ,  H03H9/02929 ,  H03H9/14538 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film formed on the piezoelectric substrate, and electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers. At least a part of the first dielectric film is cut out between adjacent electrode fingers among the electrode fingers.

摘要翻译： 声波装置包括压电基板，形成在压电基板上的第一电介质膜，以及设置在第一电介质膜上并激发声波的电极，电极包括电极指。 在电极指中相邻的电极指之间切出第一电介质膜的至少一部分。

公开(公告)号：US20090212659A1

公开(公告)日：2009-08-27

申请号：US12431427

申请日：2009-04-28

申请人： Satoru MATSUDA ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru MATSUDA ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/04

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US20080061657A1

公开(公告)日：2008-03-13

申请号：US11898359

申请日：2007-09-11

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/13 ,  H01L41/083

CPC分类号： H03H9/02559 ,  H03H9/0038 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film provided on the piezoelectric substrate, electrodes that are provided on the first dielectric film and excite an acoustic wave, and a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes.

摘要翻译： 声波装置包括压电基板，设置在压电基板上的第一电介质膜，设置在第一电介质膜上并激发声波的电极和设置成覆盖电极的第二电介质膜， 比电极厚。

公开(公告)号：US20070210676A1

公开(公告)日：2007-09-13

申请号：US11714157

申请日：2007-03-06

申请人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/00

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US20060220494A1

公开(公告)日：2006-10-05

申请号：US11390132

申请日：2006-03-28

申请人： Michio Miura ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/25

CPC分类号： H03H9/0222

摘要： An elastic boundary wave device includes a first medium that is piezoelectric, electrodes provided on the first medium to excite elastic waves, a dielectric film provided on the electrodes and the first medium, and a second medium provided on the dielectric film. The dielectric film mainly includes silicon oxide and a density thereof is at least 2.05 g/cm3.

摘要翻译： 弹性边界波装置包括压电的第一介质，设置在第一介质上以激发弹性波的电极，设置在电极和第一介质上的电介质膜，以及设置在电介质膜上的第二介质。 电介质膜主要包括氧化硅，其密度为至少2.05g / cm 3。

公开(公告)号：US07564174B2

公开(公告)日：2009-07-21

申请号：US11898359

申请日：2007-09-11

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/145 ,  H03H9/25

CPC分类号： H03H9/02559 ,  H03H9/0038 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film provided on the piezoelectric substrate, electrodes that are provided on the first dielectric film and excite an acoustic wave, and a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes.

摘要翻译： 声波装置包括压电基板，设置在压电基板上的第一电介质膜，设置在第一电介质膜上并激发声波的电极和设置成覆盖电极的第二电介质膜， 比电极厚。

公开(公告)号：US20080129418A1

公开(公告)日：2008-06-05

申请号：US11976441

申请日：2007-10-24

申请人： Michio Miura ,  Satoru Matsuda ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Satoru Matsuda ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/64 ,  H01L41/047

CPC分类号： H03H9/6483

摘要： An acoustic wave device includes a piezoelectric substrate, a resonator having comb electrodes that are provided above the piezoelectric substrate and excite an acoustic wave, and a capacitor that is provided above the piezoelectric substrate and is connected in series or parallel with the resonator, the capacitor including electrodes that horizontally face each other above the piezoelectric substrate. The electrodes of the capacitor are further from the piezoelectric substrate than the comb electrodes of the resonator.

摘要翻译： 声波装置包括压电基板，具有设置在压电基板上方的梳状电极并激发声波的谐振器，以及设置在压电基板上方并与谐振器串联或并联连接的电容器，电容器 包括在压电基板上水平面对的电极。 与谐振器的梳状电极相比，电容器的电极比压电基片更远。