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公开(公告)号：US20210270758A1
公开(公告)日：2021-09-02
申请号：US17253115
申请日：2019-04-22
Inventor： Toshihiko OGURA
IPC: G01N27/02 , H01J37/28 , H01J37/244 , H01J37/22
Abstract: An image forming method includes: arranging a sample between a first main surface of an insulating thin film and a counter electrode, measuring an impedance value by inputting an AC potential signal to the counter electrode, scanning a physical beam while focusing and irradiating a conductive thin film given to cover a second main surface of the insulating thin film with the physical beam to lower an insulation property of the insulating thin film directly below an irradiation position, guiding the AC potential signal to the irradiation position, and forming an image from the impedance value corresponding to the irradiation position.
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2.发明申请SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD 有权用于扫描电子显微镜，扫描电子显微镜图像观察系统和扫描电子显微镜图像观察方法的样品架公开(公告)号：US20160056012A1
公开(公告)日：2016-02-25
申请号：US14783310
申请日：2014-03-24
Inventor： Toshihiko OGURA
CPC classification number: H01J37/20 , G01N2223/309 , G01N2223/418 , H01J37/22 , H01J37/244 , H01J37/28 , H01J2237/153 , H01J2237/2003 , H01J2237/2007 , H01J2237/2608 , H01J2237/2801
Abstract: A water solution in which an observation sample is, for example, dissolved is sandwiched on a first insulative thin film side provided under a conductive thin film. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film. The electric charges are detected by a terminal section and changes to a measurement signal. In a state in which an electron beam is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film also disappear, and the measurement signal output from the terminal section changes to 0.
Abstract translation: 将例如溶解有观察样品的水溶液夹在设置在导电性薄膜下方的第一绝缘性薄膜侧。 当电子束入射部分被充电时，水分子的电偶极子沿着电位梯度排列。 在第二绝缘薄膜的表面上也产生电荷。 电荷由终端部分检测并改变为测量信号。 在电子束被阻挡的状态下，负电位消失。 因此，第一绝缘薄膜的表面上的电荷也消失，从端子部输出的测量信号变为0。
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Patent Agency Ranking
公开(公告)号：US20190049399A1
公开(公告)日：2019-02-14
申请号：US16082895
申请日：2017-03-07
Inventor： Toshihiko OGURA
Abstract: A dielectric constant microscope to observe a shape of a micro organic specimen includes first and second insulating films that are disposed to oppose each other such that the organic specimen along with the solution is interposed therebetween, and application-side conductive films P1 to Pn (where n is an integer greater than 1). The application-side conductive films are separated from each other on an outward surface of the first insulating film. Additionally, the dielectric constant microscope includes measurement-side conductive films p1 to pm (where m is an integer greater than 1) that are separated from each other on an outward surface of the second insulating film. Input signals Sf1 to Sfn having potential change at different frequencies are applied to the application-side conductive films P1 to Pn, potential change is measured for each of the measurement-side conductive films p1 to pm, and the organic specimen is visualized from a dielectric constant distribution between the first and second insulating films obtained by separating the potential change depending on the frequencies.
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公开(公告)号：US20240242927A1
公开(公告)日：2024-07-18
申请号：US18562345
申请日：2022-05-24
Inventor： Toshihiko OGURA
Abstract: A sample holder for an impedance microscope according to an aspect includes: a first insulating film having a front surface and a back surface; a second insulating film having a front surface facing the back surface of the first insulating film and a back surface; a conductive film disposed on the front surface of the first insulating film; an electrode disposed to face the back surface of the second insulating film; and a conductive member fixed at a ground potential or a constant potential, in which the conductive member has an opening located between the first insulating film and the electrode.
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公开(公告)号：US20240085352A1
公开(公告)日：2024-03-14
申请号：US17767813
申请日：2019-10-10
Applicant: Hitachi High-Tech Corporation , National Institute of advanced Industrial Science and Technology
Inventor： Michio HATANO , Mitsuhiro NAKAMURA , Toshihiko OGURA
IPC: G01N23/2204 , G01N23/2251
CPC classification number: G01N23/2204 , G01N23/2251 , G01N2223/20 , G01N2223/30
Abstract: A risk of breakage of a sample holder can be reduced and a biochemical sample or a liquid sample can be observed easily and with a high observation throughput. A sample holder 101 holding a sample includes: a sample chamber including a first insulating thin film 110 and a second insulating thin film 111 that sandwich and hold the sample 200 in a liquid or gel form and face each other, a vacuum partition wall inside which the sample chamber holding the sample is fixed in a state in which the thin film is exposed to a surrounding atmosphere, and whose internal space is kept at a degree of vacuum at least lower than that of the sample room at the time of observation of the sample, a detection electrode 820 disposed to face the second insulating thin film in a state in which the sample chamber is fixed to the vacuum partition wall, and a signal detection unit 50 connected to the detection electrode. Before the surrounding atmosphere of the sample holder is evacuated from an atmospheric pressure to a vacuum, the charged particle beam device receives a detection signal from the signal detection unit via a connector and detects an abnormality of the sample chamber based on the detection signal.
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6.发明申请公开(公告)号：US20180284040A1
公开(公告)日：2018-10-04
申请号：US15765789
申请日：2016-10-11
Inventor： Toshihiko OGURA
IPC: G01N23/2251 , G01N27/00 , H01J37/20 , H01J37/28
Abstract: The invention provides a method of observing an organism or any other organic specimen in an aqueous solution in a scanning electron microscope. The method includes placing the organic specimen along with the aqueous solution between opposing surfaces of a pair of first and second insulating thin films facing each other, irradiating and scanning an electrically conductive thin film provided on an outward facing surface of the first insulating thin film with a pulsed electron beam an intensity of which is changed in a form of pulses, and acquiring an image according to a change in electric potential of an outward facing surface of the second insulating thin film, in which the composition of the specimen is analyzed based on the difference between the images corresponding to the pulsed electron beam applied at different ON/OFF frequencies.
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7.发明公开公开(公告)号：US20240079201A1
公开(公告)日：2024-03-07
申请号：US17767595
申请日：2019-10-10
Applicant: Hitachi High-Tech Corporation , National Institute of Advanced Industrial Science and Technology
Inventor： Michio HATANO , Mitsuhiro NAKAMURA , Toshihiko OGURA
IPC: H01J37/20
Abstract: A sample holder reliably holds a liquid or gel sample, and the yield of observation with a charged particle beam device is improved. A sample holder 101 includes a first member 102 that has a lid member 111 and a first chip 105 provided with a first window 123 where a laminated film including a first insulating thin film 104 is formed, and a second member 103 that has a base material 127 having a first bottom seal surface 203 and a second bottom seal surface 200, an electrode 108 disposed on the base material, and a second chip 107 provided with a second window 124 where a second insulating thin film 106 is formed and held on the second bottom seal surface via a second seal material 119 such that the second window faces the electrode, in which a region inside a first seal material is maintained airtightly from a region outside the first seal material by the first member and the second member being combined and the first seal material being crushed between the first bottom seal surface and an upper seal surface of the lid member.
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