公开(公告)号：US20170225949A1

公开(公告)日：2017-08-10

申请号：US15497741

申请日：2017-04-26

申请人： NXP USA, Inc.

发明人： Aaron A. GEISBERGER

IPC分类号： B81C1/00

CPC分类号： B81C1/00626 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0307

摘要： An embodiment of a microelectromechanical systems (MEMS) device is provided, which includes a substrate; a proof mass positioned in space above a surface of the substrate, wherein the proof mass is configured to pivot on a rotational axis parallel to the substrate; an anchor structure that includes two or more separated anchors mounted to the surface of the substrate, wherein the anchor structure is aligned with the rotational axis; and an isolation sub-frame structure that surrounds the anchor structure and is flexibly connected to each of the two or more separated anchors of the anchor structure, where the proof mass is flexibly connected to the isolation sub-frame structure.