MICROMECHANICAL SYSTEM
    2.
    发明申请
    MICROMECHANICAL SYSTEM 审中-公开
    微生物系统

    公开(公告)号:US20130115433A1

    公开(公告)日:2013-05-09

    申请号:US13732655

    申请日:2013-01-02

    Abstract: High precision MEMESs can be manufactured in a large amount without requiring a vacuum process or a lithography process. A film is aligned with a die so as to contact with each other. The film has a functional layer and a releasing layer printed thereon. The die is configured to mold a structure which comprises a functional layer retention part retaining the functional layer and a frame supporting the functional layer retention part. The resin filled between the die and the film is cured. Then, the film is separated from the die so that the functional layer is released from the releasing layer and transferred on the resin cured in the die, thereby the structure is formed.

    Abstract translation: 可以大量地制造高精度MEMES,而不需要真空工艺或光刻工艺。 将膜与模具对准以便彼此接触。 膜具有印刷在其上的功能层和释放层。 模具被构造成模制包括保持功能层的功能层保持部分和支撑功能层保持部分的框架的结构。 填充在模具和膜之间的树脂固化。 然后,将膜与模具分离,使得功能层从释放层释放并转移到在模具中固化的树脂上,从而形成结构。

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