公开(公告)号：US20240234561A9

公开(公告)日：2024-07-11

申请号：US18096916

申请日：2023-01-13

申请人： National Yang Ming Chiao Tung University ,  National Chung-Shan Institute of Science and Technology

发明人： Edward Yi CHANG ,  You-Chen WENG ,  Min-Lu KAO

IPC分类号： H01L29/778 ,  H01L29/15 ,  H01L29/20

CPC分类号： H01L29/7786 ,  H01L29/15 ,  H01L29/2003

摘要： A high electron mobility transistor includes a growth substrate, a lattice matching layer, an back-barrier layer, an electron blocking layer, a channel layer, an active layer, a source, a gate, and a drain. The lattice matching layer and the back-barrier layer are formed on the growth substrate. The back-barrier layer includes GaN doped with C. The electron blocking layer is formed on the back-barrier layer. The electron blocking layer includes AlGaN, wherein the doping percent of Al atoms of the AlGaN is 3˜5% and the doping percent of Ga atoms of the AlGaN is 95˜97%. The electron blocking layer has a thickness of 2˜5 nm. The channel layer and the active layer are formed on the electron blocking layer. The source, the gate, and the drain are formed on the active layer.

公开(公告)号：US20240234538A9

公开(公告)日：2024-07-11

申请号：US18097074

申请日：2023-01-13

申请人： National Yang Ming Chiao Tung University ,  National Chung-Shan Institute of Science and Technology

发明人： Edward Yi CHANG ,  You-Chen WENG ,  Min-Lu Kao

IPC分类号： H01L29/66 ,  H01L29/20 ,  H01L29/778

CPC分类号： H01L29/66462 ,  H01L29/2003 ,  H01L29/7786

摘要： A high electron mobility transistor and a method for fabricating the same is disclosed. Firstly, a lattice matching layer, a channel layer, and an AlGaN layer are sequentially formed on a growth substrate. The AlGaN layer includes a first area, a second area, and a third area, wherein the second area is located between the first area and the third area. Then, an insulation block is formed on the second area of the AlGaN layer and two GaN blocks are respectively formed on the first area and the third area of the AlGaN layer. Two InAlGaN blocks are respectively formed on the GaN blocks and the insulation block is removed. Finally, a gate is formed to interfere the second area of the AlGaN layer and a source and a drain are respectively formed on the InAlGaN blocks.

公开(公告)号：US20240136432A1

公开(公告)日：2024-04-25

申请号：US18096916

申请日：2023-01-13

申请人： National Yang Ming Chiao Tung University ,  National Chung-Shan Institute of Science and Technology

发明人： Edward Yi CHANG ,  You-Chen WENG ,  Min-Lu KAO

IPC分类号： H01L29/778 ,  H01L29/15 ,  H01L29/20

CPC分类号： H01L29/7786 ,  H01L29/15 ,  H01L29/2003

摘要： A high electron mobility transistor includes a growth substrate, a lattice matching layer, an back-barrier layer, an electron blocking layer, a channel layer, an active layer, a source, a gate, and a drain. The lattice matching layer and the back-barrier layer are formed on the growth substrate. The back-barrier layer includes GaN doped with C. The electron blocking layer is formed on the back-barrier layer. The electron blocking layer includes AlGaN, wherein the doping percent of Al atoms of the AlGaN is 3˜5% and the doping percent of Ga atoms of the AlGaN is 95˜97%. The electron blocking layer has a thickness of 2˜5 nm. The channel layer and the active layer are formed on the electron blocking layer. The source, the gate, and the drain are formed on the active layer.

公开(公告)号：US20240136422A1

公开(公告)日：2024-04-25

申请号：US18097074

申请日：2023-01-13

申请人： National Yang Ming Chiao Tung University ,  National Chung-Shan Institute of Science and Technology

发明人： Edward Yi CHANG ,  You-Chen WENG ,  Min-Lu Kao

IPC分类号： H01L29/66 ,  H01L29/20 ,  H01L29/778

CPC分类号： H01L29/66462 ,  H01L29/2003 ,  H01L29/7786

摘要： A high electron mobility transistor and a method for fabricating the same is disclosed. Firstly, a lattice matching layer, a channel layer, and an AlGaN layer are sequentially formed on a growth substrate. The AlGaN layer includes a first area, a second area, and a third area, wherein the second area is located between the first area and the third area. Then, an insulation block is formed on the second area of the AlGaN layer and two GaN blocks are respectively formed on the first area and the third area of the AlGaN layer. Two InAlGaN blocks are respectively formed on the GaN blocks and the insulation block is removed. Finally, a gate is formed to interfere the second area of the AlGaN layer and a source and a drain are respectively formed on the InAlGaN blocks.

公开(公告)号：US20240145575A1

公开(公告)日：2024-05-02

申请号：US18311249

申请日：2023-05-03

申请人： National Yang Ming Chiao Tung University

发明人： Edward Yi CHANG ,  You-Chen WENG ,  Min-Lu KAO

IPC分类号： H01L29/66 ,  H01L29/417 ,  H01L29/778

CPC分类号： H01L29/66462 ,  H01L29/41725 ,  H01L29/7786

摘要： A semiconductor device includes a substrate, a channel layer, a first barrier layer, a source/drain contact, and a gate layer. The channel layer is on the substrate. The first barrier layer is on the channel layer and the thickness of the first barrier layer is less than 6 nm. The source/drain contact is on the first barrier layer and is directly contact with the first barrier layer. The gate layer is over the first barrier layer.

公开(公告)号：US20240213020A1

公开(公告)日：2024-06-27

申请号：US18094836

申请日：2023-01-09

申请人： National Yang Ming Chiao Tung University

发明人： Edward Yi CHANG ,  You-Chen WENG ,  Xia-Xi Zheng

IPC分类号： H01L21/02 ,  H01L21/56

CPC分类号： H01L21/0254 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02271 ,  H01L21/02304 ,  H01L21/0262 ,  H01L21/56

摘要： A MOCVD method for growing an InAlGaN/GaN heterostructure comprises steps: sequentially growing a nitride nucleation layer, a GaN buffer layer, an InAlGaN barrier layer on a substrate; using a precursor gas containing silane to in-situ grow a SiNx protective layer on the InAlGaN barrier layer at a temperature of 950-1000° C. in the same reaction chamber. Thereby is achieved a SiNx/InAlGaN/GaN heterostructure having an ultrathin barrier layer, which is suitable to fabricate HEMT elements. The present invention needn't take sample out of the reaction chamber and thus can prevent the heterostructure from oxidation and damage.