公开(公告)号：US20080024037A1

公开(公告)日：2008-01-31

申请号：US11880168

申请日：2007-07-20

申请人： Noboru Tamura ,  Nakaba Ichikawa ,  Takeshi Takabatake ,  Kaname Yasuda

发明人： Noboru Tamura ,  Nakaba Ichikawa ,  Takeshi Takabatake ,  Kaname Yasuda

IPC分类号： H01L41/04 ,  H01L41/22

CPC分类号： H03H9/02834 ,  H03H3/10 ,  H03H9/02574 ,  Y10T29/42

摘要： A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.

摘要翻译： 压电基板主要由基材和形成在基材的一个主表面上的膜构成。 在基材中，形成有膜的主表面是粗糙的主表面。 通过使用热喷涂法将由包括粗糙化主表面上的基材的线膨胀系数的线性膨胀系数的材料构成的膜形成为压电基板。

公开(公告)号：US07569976B2

公开(公告)日：2009-08-04

申请号：US11880168

申请日：2007-07-20

申请人： Noboru Tamura ,  Nakaba Ichikawa ,  Takeshi Takabatake ,  Kaname Yasuda

发明人： Noboru Tamura ,  Nakaba Ichikawa ,  Takeshi Takabatake ,  Kaname Yasuda

IPC分类号： H01L41/08

CPC分类号： H03H9/02834 ,  H03H3/10 ,  H03H9/02574 ,  Y10T29/42

摘要： A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.

摘要翻译： 压电基材主要由基材和形成在基材的一个主表面上的膜构成。 在基材中，形成有膜的主表面是粗糙的主表面。 通过使用热喷涂法将由包括粗糙化主表面上的基材的线膨胀系数的线性膨胀系数的材料构成的膜形成为压电基板。

公开(公告)号：US07913987B2

公开(公告)日：2011-03-29

申请号：US12366215

申请日：2009-02-05

申请人： Takashi Suzuki ,  Kaname Yasuda ,  Ryo Yamasaki

发明人： Takashi Suzuki ,  Kaname Yasuda ,  Ryo Yamasaki

IPC分类号： B23Q3/00

CPC分类号： H01L21/6831 ,  H01L21/68757

摘要： A substrate mounting table includes an electrostatic chuck for attracting and holding a target substrate and a base for holding the electrostatic chuck thereon. The base includes a protruding portion having a large height; and an outer peripheral surface provided around the protruding portion at a position lower than the protruding portion by a preset height. A thermally sprayed film having a thickness equivalent to a height difference between the protruding portion and the outer peripheral surface is deposited on the outer peripheral surface such that the thermally sprayed film becomes continuous with the protruding portion. The electrostatic chuck is formed by installing an electrode between insulating members, and the electrostatic chuck is fixed to the base by using an adhesive to cover a boundary between a top surface of the protruding portion and a surface of the thermally sprayed film.

摘要翻译： 基板安装台包括用于吸引和保持目标基板的静电卡盘和用于将静电卡盘保持在其上的基座。 基部包括具有大的高度的突出部分; 以及在比突出部分低的位置处设置在突出部分周围预定高度的外周面。 在外周面上沉积具有与突出部和外周面的高度差相当的厚度的喷镀膜，使得喷镀膜与突出部连续。 通过在绝缘构件之间安装电极而形成静电卡盘，并且通过使用粘合剂将静电卡盘固定到基座，以覆盖突出部分的顶表面和热喷涂膜的表面之间的边界。

公开(公告)号：US20140080611A1

公开(公告)日：2014-03-20

申请号：US14118969

申请日：2012-07-23

申请人： Nobuyuki Hagiwara ,  Kaname Yasuda ,  Minao Umeda ,  Kazuho Chikaraishi ,  Tadashi Hibino ,  Hiroki Mizuno ,  Masahiro Inoue ,  Masaharu Igarashi ,  Osamu Tatewaki ,  Kiyoshi Sadakata

发明人： Nobuyuki Hagiwara ,  Kaname Yasuda ,  Minao Umeda ,  Kazuho Chikaraishi ,  Tadashi Hibino ,  Hiroki Mizuno ,  Masahiro Inoue ,  Masaharu Igarashi ,  Osamu Tatewaki ,  Kiyoshi Sadakata

IPC分类号： F16D3/26

CPC分类号： F16D3/26 ,  F16D3/387 ,  F16D2300/12 ,  Y10S29/047 ,  Y10S72/713 ,  Y10T464/20

摘要： Structure of a cross universal joint is achieved in which the fact that an excessive torque was applied to a universal joint due to a collision accident or mishandling can be easily determined afterwards. Protrusions 20, which are straight lines as seen from the outside surface sides of linking arm sections 15c of a yoke 12c, are formed on the outside surfaces of the linking arm sections 15c. When an excessive torque acts and the linking arm sections 15c are plastically deformed, the protrusions 20 change from a straight line to a non-straight line. From this change it is possible to easily confirm that an excessive torque has been applied to a cross universal joint that includes this yoke 12c. Moreover, when the space between the inside surfaces of the linking arm sections 15c is taken to be D, and the length in the axial direction of the linking arm sections 15c is taken to be L, the dimensions of the parts of the yoke 12c are regulated so that the relation 3

摘要翻译： 实现十字万向接头的结构，其中随后可以容易地确定由于碰撞事故或误操作而向万用接头施加过大扭矩的事实。 在连接臂部15c的外表面上形成有从轭部12c的连接臂部15c的外表面侧观察的直线的突起20。 当过大的扭矩作用并且连接臂部15c塑性变形时，突起20从直线变为非直线。 从该变化可以容易地确认对包括该轭12c的十字万向接头施加过大的扭矩。 此外，当连接臂部15c的内表面之间的空间被取为D，并且连接臂部15c的轴向长度被取为L时，轭12c的部分的尺寸为 使得满足3

公开(公告)号：US20060099457A1

公开(公告)日：2006-05-11

申请号：US11266355

申请日：2005-11-04

申请人： Tsuyoshi Moriya ,  Hiroyuki Nakayama ,  Hiroshi Nagaike ,  Keigo Kobayashi ,  Kaname Yasuda

发明人： Tsuyoshi Moriya ,  Hiroyuki Nakayama ,  Hiroshi Nagaike ,  Keigo Kobayashi ,  Kaname Yasuda

IPC分类号： B32B9/00 ,  B32B19/00

CPC分类号： C23C16/4404

摘要： A ceramic spray-coated member capable of surely controlling adhesion and detachment of water is produced by spraying a given ceramic onto a surface of a base material, in which an organic matter adsorbed on a surface of the ceramic spray-coated member is removed and the surface of the ceramic spray-coated member is stabilized by chemically bonding to water.

摘要翻译： 通过将给定的陶瓷喷涂到基材的表面上，除去吸附在陶瓷喷涂构件的表面上的有机物质，从而产生能够可靠地控制水的附着和分离的陶瓷喷涂构件， 通过化学键合到水来稳定陶瓷喷涂构件的表面。

公开(公告)号：US08986126B2

公开(公告)日：2015-03-24

申请号：US14118969

申请日：2012-07-23

申请人： Nobuyuki Hagiwara ,  Kaname Yasuda ,  Minao Umeda ,  Kazuho Chikaraishi ,  Tadashi Hibino ,  Hiroki Mizuno ,  Masahiro Inoue ,  Masaharu Igarashi ,  Osamu Tatewaki ,  Kiyoshi Sadakata

发明人： Nobuyuki Hagiwara ,  Kaname Yasuda ,  Minao Umeda ,  Kazuho Chikaraishi ,  Tadashi Hibino ,  Hiroki Mizuno ,  Masahiro Inoue ,  Masaharu Igarashi ,  Osamu Tatewaki ,  Kiyoshi Sadakata

IPC分类号： F16D3/38 ,  F16D3/26

CPC分类号： F16D3/26 ,  F16D3/387 ,  F16D2300/12 ,  Y10S29/047 ,  Y10S72/713 ,  Y10T464/20

摘要： Structure of a cross universal joint is achieved in which the fact that an excessive torque was applied to a universal joint due to a collision accident or mishandling can be easily determined afterwards. Protrusions 20, which are straight lines as seen from the outside surface sides of linking arm sections 15c of a yoke 12c, are formed on the outside surfaces of the linking arm sections 15c. When an excessive torque acts and the linking arm sections 15c are plastically deformed, the protrusions 20 change from a straight line to a non-straight line. From this change it is possible to easily confirm that an excessive torque has been applied to a cross universal joint that includes this yoke 12c. Moreover, when the space between the inside surfaces of the linking arm sections 15c is taken to be D, and the length in the axial direction of the linking arm sections 15c is taken to be L, the dimensions of the parts of the yoke 12c are regulated so that the relation 3

摘要翻译： 实现十字万向接头的结构，其中随后可以容易地确定由于碰撞事故或误操作而向万用接头施加过大扭矩的事实。 在连接臂部15c的外表面上形成有从轭部12c的连接臂部15c的外表面侧观察的直线的突起20。 当过大的扭矩作用并且连接臂部15c塑性变形时，突起20从直线变为非直线。 从该变化可以容易地确认对包括该轭12c的十字万向接头施加过大的扭矩。 此外，当连接臂部15c的内表面之间的空间被取为D，并且连接臂部15c的轴向长度被取为L时，轭12c的部分的尺寸为 使得满足3

公开(公告)号：US20090203223A1

公开(公告)日：2009-08-13

申请号：US12366215

申请日：2009-02-05

申请人： Takashi Suzuki ,  Kaname Yasuda ,  Ryo Yamasaki

发明人： Takashi Suzuki ,  Kaname Yasuda ,  Ryo Yamasaki

IPC分类号： H01L21/32 ,  C23C16/54 ,  H01L21/3065

CPC分类号： H01L21/6831 ,  H01L21/68757

摘要： A substrate mounting table includes an electrostatic chuck for attracting and holding a target substrate and a base for holding the electrostatic chuck thereon. The base includes a protruding portion having a large height; and an outer peripheral surface provided around the protruding portion at a position lower than the protruding portion by a preset height. A thermally sprayed film having a thickness equivalent to a height difference between the protruding portion and the outer peripheral surface is deposited on the outer peripheral surface such that the thermally sprayed film becomes continuous with the protruding portion. The electrostatic chuck is formed by installing an electrode between insulating members, and the electrostatic chuck is fixed to the base by using an adhesive to cover a boundary between a top surface of the protruding portion and a surface of the thermally sprayed film.

摘要翻译： 基板安装台包括用于吸引和保持目标基板的静电卡盘和用于将静电卡盘保持在其上的基座。 基部包括具有大的高度的突出部分; 以及在比突出部分低的位置处设置在突出部分周围预定高度的外周面。 在外周面上沉积具有与突出部和外周面的高度差相当的厚度的喷镀膜，使得喷镀膜与突出部连续。 通过在绝缘构件之间安装电极而形成静电卡盘，并且通过使用粘合剂将静电卡盘固定到基座，以覆盖突出部分的顶表面和热喷涂膜的表面之间的边界。