公开(公告)号：US5780373A

公开(公告)日：1998-07-14

申请号：US777701

申请日：1996-12-20

申请人： Osamu Yanagisawa ,  Kenji Oda ,  Naoki Sugimoto ,  Yoshio Takegawa ,  Akira Takada ,  Hideyo Osada ,  Haruo Aizawa ,  Koji Miura

发明人： Osamu Yanagisawa ,  Kenji Oda ,  Naoki Sugimoto ,  Yoshio Takegawa ,  Akira Takada ,  Hideyo Osada ,  Haruo Aizawa ,  Koji Miura

IPC分类号： C03C3/078 ,  C03C3/085 ,  C03C3/087

CPC分类号： C03C3/087 ,  C03C3/078 ,  C03C3/085

摘要： A glass composition comprising from 45 to 66 wt % of SiO.sub.2, from 0 to 15 wt % of Al.sub.2 O.sub.3, from 10 to 24 wt % of Li.sub.2 O+Na.sub.2 O+K.sub.2 O, from 14 to 26 wt % of CaO+MgO+SrO+BaO+ZnO, and from 0 to 1 wt % of SO.sub.3 +Sb.sub.2 O.sub.3, said glass composition containing substantially no zirconia and having a strain point of at least 560.degree. C. and a linear thermal expansion coefficient of at least 80.times.10.sup.-7 /.degree.C. within a temperature range of from 50.degree. to 350.degree. C.

摘要翻译： 一种玻璃组合物，其包含45至66重量％的SiO 2，0至15重量％的Al 2 O 3，10至24重量％的Li 2 O + Na 2 O + K 2 O，14至26重量％的CaO + MgO + SrO + BaO + ZnO和0〜1重量％的SO 3 + Sb 2 O 3，所述玻璃组合物基本上不含氧化锆，应变点至少为560℃，线性热膨胀系数为至少80×10 -7 /℃ 温度范围为50〜350℃

公开(公告)号：US5631195A

公开(公告)日：1997-05-20

申请号：US528265

申请日：1995-09-14

申请人： Osamu Yanagisawa ,  Kenji Oda ,  Naoki Sugimoto ,  Yoshio Takegawa ,  Akira Takada ,  Hideyo Osada ,  Haruo Aizawa ,  Koji Miura

发明人： Osamu Yanagisawa ,  Kenji Oda ,  Naoki Sugimoto ,  Yoshio Takegawa ,  Akira Takada ,  Hideyo Osada ,  Haruo Aizawa ,  Koji Miura

IPC分类号： C03C3/078 ,  C03C3/085 ,  C03C3/087

CPC分类号： C03C3/087 ,  C03C3/078 ,  C03C3/085

摘要： A glass composition comprising from 45 to 66 wt % of SiO.sub.2, from 0 to 15 wt % of Al.sub.2 O.sub.3, from 10 to 24 wt % of Li.sub.2 O+Na.sub.2 O+K.sub.2 O, from 14 to 26 wt % of CaO+MgO+SrO+BaO+ZnO, and from 0 to 1 wt % of SO.sub.3 +Sb.sub.2 O.sub.3, said glass composition containing substantially no zirconia and having a strain point of at least 560.degree. C. and a linear thermal expansion coefficient of at least 80.times.10.sup.-7 /.degree.C. within a temperature range of from 50.degree. to 350.degree. C.

摘要翻译： 包含45至66重量％的SiO 2，0至15重量％的Al 2 O 3，10至24重量％的Li 2 O + Na 2 O + K 2 O，14至26重量％的CaO + MgO + SrO + BaO + ZnO和0〜1重量％的SO 3 + Sb 2 O 3，所述玻璃组合物基本上不含氧化锆，应变点至少为560℃，线性热膨胀系数为至少80×10 -7 /℃ 温度范围为50〜350℃

公开(公告)号：US07585800B2

公开(公告)日：2009-09-08

申请号：US11962936

申请日：2007-12-21

申请人： Mitsuhiro Kawata ,  Akira Takada ,  Hideaki Hayashi ,  Naoki Sugimoto ,  Shinya Kikugawa

发明人： Mitsuhiro Kawata ,  Akira Takada ,  Hideaki Hayashi ,  Naoki Sugimoto ,  Shinya Kikugawa

IPC分类号： C03C3/06 ,  C03B20/00 ,  H05B33/10

CPC分类号： C03C3/06 ,  C03C4/0085 ,  C03C2201/30 ,  C03C2201/42

摘要： It is to obtain a silica glass suitable as a material for an optical material constituting an optical system to be used for EUVL, which has a low coefficient of thermal expansion from 0 to 100° C., and on which formation of concave defects is suppressed in a polishing step to achieve a high level of flatness.A silica glass containing from 0.1 to 10 mass % of Sn calculated as SnO2 and from 3 to 10 mass % of Ti calculated as TiO2, which has a homogeneity of the coefficient of thermal expansion from 0 to 100° C. to the temperature of from 50 to 200 ppb/° C., a coefficient of thermal expansion from 0 to 100° C. of 0±250 ppb/° C., and a Vickers hardness of at most 650.

摘要翻译： 获得适合作为构成用于EUVL的光学系统的光学材料的石英玻璃，其具有0至100℃的低热膨胀系数，并且其中凹陷缺陷的形成被抑制 在抛光步骤中达到高水平的平整度。 含有0.1〜10质量％的以SnO 2计的Sn和3〜10质量％的作为TiO 2计算的Ti的二氧化硅玻璃，其具有0〜100℃的热膨胀系数的均匀性 50至200ppb /℃，0至100ppb /℃的0至100℃的热膨胀系数，以及至多650的维氏硬度。

公开(公告)号：US20080103038A1

公开(公告)日：2008-05-01

申请号：US11962936

申请日：2007-12-21

申请人： Mitsuhiro Kawata ,  Akira Takada ,  Hideaki Hayashi ,  Naoki Sugimoto ,  Shinya Kikugawa

发明人： Mitsuhiro Kawata ,  Akira Takada ,  Hideaki Hayashi ,  Naoki Sugimoto ,  Shinya Kikugawa

IPC分类号： C03C3/06 ,  C03C3/076

CPC分类号： C03C3/06 ,  C03C4/0085 ,  C03C2201/30 ,  C03C2201/42

摘要： It is to obtain a silica glass suitable as a material for an optical material constituting an optical system to be used for EUVL, which has a low coefficient of thermal expansion from 0 to 100° C., and on which formation of concave defects is suppressed in a polishing step to achieve a high level of flatness. A silica glass containing from 0.1 to 10 mass % of Sn calculated as SnO2 and from 3 to 10 mass % of Ti calculated as TiO2, which has a homogeneity of the coefficient of thermal expansion from 0 to 100° C. to the temperature of from 50 to 200 ppb/° C., a coefficient of thermal expansion from 0 to 100° C. of 0±250 ppb/° C., and a Vickers hardness of at most 650.

摘要翻译： 获得适合作为构成用于EUVL的光学系统的光学材料的石英玻璃，其具有0至100℃的低热膨胀系数，并且其中凹陷缺陷的形成被抑制 在抛光步骤中达到高水平的平整度。 含有0.1〜10质量％的以SnO 2 2计的Sn和3〜10质量％的TiO 2计算的二氧化硅玻璃，其Ti均匀度为 热膨胀系数为0〜100℃，温度为50〜200ppb /℃，0〜100℃的热膨胀系数为0±250ppb /℃，Vickers 硬度至多650。

公开(公告)号：US20150002851A1

公开(公告)日：2015-01-01

申请号：US14352758

申请日：2012-09-14

申请人： Akira Takada

发明人： Akira Takada

IPC分类号： H01S5/065 ,  G01B9/02 ,  H01S5/50

CPC分类号： H01S5/065 ,  G01B9/02091 ,  G11C11/161 ,  H01F10/3254 ,  H01F10/3286 ,  H01F41/303 ,  H01L27/228 ,  H01L43/08 ,  H01L43/10 ,  H01S5/50

摘要： This mode-locked laser light source device comprises a semiconductor optical amplifier wherein carriers are generated by the injection of an injection current thereinto, a pulse of laser light is amplified by the consumption of the carriers, and phase modulation equivalent to self-phase modulation depending on the pulse intensity of the laser light occurs due to a change in the density carriers; a sweep modulation unit which the oscillation wavelength of the pulse of the laser light emitted from the semiconductor optical amplifier is variable; a resonator which returns the pulse of the laser light modulated by the sweep modulation unit to the semiconductor optical amplifier to cause a laser oscillation phenomenon; and a dispersion compensator which is used in an anomalous dispersion region and changes the return time of the pulse of the laser light depending on the wavelength of the pulse of laser light guided in the resonator.

摘要翻译： 该锁模激光光源装置包括半导体光放大器，其中通过注入注入电流产生载流子，激光脉冲被载波的消耗放大，相位调制相当于自相位调制依赖 由于密度载体的变化，发生激光的脉冲强度; 从半导体光放大器发射的激光的脉冲的振荡波长可变的扫描调制单元; 谐振器，其将由扫描调制单元调制的激光的脉冲返回到半导体光放大器以引起激光振荡现象; 以及色散补偿器，其用于异常色散区域，并且根据在谐振器中引导的激光的脉冲的波长来改变激光的脉冲的返回时间。

公开(公告)号：US08657270B2

公开(公告)日：2014-02-25

申请号：US13324697

申请日：2011-12-13

申请人： Akira Takada ,  Shinichi Sutou

发明人： Akira Takada ,  Shinichi Sutou

IPC分类号： F16F9/38

CPC分类号： F16F9/38

摘要： A cover member having plural peak portions and plural trough portions, and freely stretched and shrunk in an array direction of the plural peak portions and the plural trough portions or freely bent, the cover member includes: a hollow part formed in each of the plural peak portions, the hollow part being hollowed toward an inner side from a peak of each of the plural peak portions, being formed in a circumferential direction, and having edge parts, a bottom part and side parts located between the edge parts and the bottom part. The edge parts of the hollow part are brought into contact with each other before the side parts of the hollow part are brought into contact with each other, when at least one of the plural peak portions is subjected to force in a direction intersecting with the array direction from an outside.

摘要翻译： 一种盖构件，具有多个峰部和多个谷部，并且在所述多个峰部和所述多个谷部的排列方向上自由伸缩并自由弯曲，所述盖构件包括：形成在所述多个峰 所述中空部从所述多个峰部中的每一个峰的内侧向内侧中空化，沿圆周方向形成，并且具有边缘部，底部和位于所述边缘部和所述底部之间的侧部。 当中空部分的边缘部分彼此接触时，中空部分的边缘部分彼此接触，当多个峰部中的至少一个在与阵列相交的方向上施加力时 方向从外面。

公开(公告)号：US20100321680A1

公开(公告)日：2010-12-23

申请号：US12817599

申请日：2010-06-17

申请人： Akira Takada

发明人： Akira Takada

IPC分类号： G01N21/01

CPC分类号： G01N21/956

摘要： The present invention provides a defect detection apparatus for a circuit pattern, including: an illumination optical system that irradiates illumination light, having a predetermined polarization condition, onto a detection subject having a circuit pattern formed thereon; a detection device that detects change in the polarization condition of the illumination light between before and after the illumination light passes through the detection subject or between before and after the illumination light is reflected by the detection subject; and a defect detection device that detects a defect of the circuit pattern based on an output of the detection device.

摘要翻译： 本发明提供了一种用于电路图案的缺陷检测装置，包括：照射光学系统，其将具有预定偏振条件的照明光照射到其上形成有电路图案的检测对象上; 检测装置，其检测在所述照明光通过所述检测对象之前或之后的所述照明光的偏振状态的变化，或者所述照明光之前和之后被所述检测对象反射; 以及缺陷检测装置，其基于检测装置的输出来检测电路图案的缺陷。

公开(公告)号：US07561768B2

公开(公告)日：2009-07-14

申请号：US11956695

申请日：2007-12-14

申请人： Akira Takada ,  Shinya Ikoma ,  Shigenori Nagano

发明人： Akira Takada ,  Shinya Ikoma ,  Shigenori Nagano

IPC分类号： G02B6/28 ,  G02B6/32

CPC分类号： G02B6/2937 ,  G02B6/32

摘要： An optical branching device comprises a first lens member comprising a transmitting plane surface, a transmitting convex surface having an approximate center of curvature in the transmitting plane surface, and a first optical fiber and a second optical fiber firmly affixed on the transmitting plane surface of the first lens member. The transmitting convex surface has a wavelength-selective mirror surface that transmits light of a first wavelength and reflects light of a second wavelength. The light of the second wavelength, which is one of the wavelengths of light emitted from the first optical fiber and is reflected and converged by the wavelength-selective mirror surface, enters into the second optical fiber.

摘要翻译： 光分路装置包括第一透镜构件，第一透镜构件包括透射平面表面，在透射平面中具有大致曲率中心的透射凸表面，以及牢固地固定在透射平面表面的透射平面上的第一光纤和第二光纤 第一透镜构件。 透射凸面具有透射第一波长的光并反射第二波长的光的波长选择镜面。 作为从第一光纤发射并被波长选择镜面反射和收敛的光的波长之一的第二波长的光进入第二光纤。

公开(公告)号：US20080219679A1

公开(公告)日：2008-09-11

申请号：US11956695

申请日：2007-12-14

申请人： Akira Takada ,  Shinya Ikoma ,  Shigenori Nagano

发明人： Akira Takada ,  Shinya Ikoma ,  Shigenori Nagano

IPC分类号： H04B10/12

CPC分类号： G02B6/2937 ,  G02B6/32

摘要： An optical branching device comprises a first lens member comprising a transmitting plane surface, a transmitting convex surface having an approximate center of curvature in the transmitting plane surface, and a first optical fiber and a second optical fiber firmly affixed on the transmitting plane surface of the first lens member. The transmitting convex surface has a wavelength-selective mirror surface that transmits light of a first wavelength and reflects light of a second wavelength. The light of the second wavelength, which is one of the wavelengths of light emitted from the first optical fiber and is reflected and converged by the wavelength-selective mirror surface, enters into the second optical fiber.

摘要翻译： 光分路装置包括第一透镜构件，第一透镜构件包括透射平面表面，在透射平面中具有大致曲率中心的透射凸表面，以及牢固地固定在透射平面表面的透射平面上的第一光纤和第二光纤 第一透镜构件。 透射凸面具有透射第一波长的光并反射第二波长的光的波长选择镜面。 作为从第一光纤发射并被波长选择镜面反射和收敛的光的波长之一的第二波长的光进入第二光纤。

公开(公告)号：US07418873B2

公开(公告)日：2008-09-02

申请号：US11630120

申请日：2005-06-16

申请人： Akira Takada

发明人： Akira Takada

IPC分类号： G01L7/00

CPC分类号： G01L9/0051 ,  G01L9/0055

摘要： There is provided a method and device for producing an absolute pressure type pressure sensor that enables a relative pressure type pressure sensor to be modified (converted) into an absolute pressure type pressure sensor in a simple and easy manner. The method is characterized by comprising: a step of arranging a relative pressure type pressure sensor, that has a reference pressure chamber therein, and a pressure guide hole whose one end communicates with the reference pressure chamber and the other end opens to the atmosphere, inside a vacuum chamber with the other end of the pressure guide hole opening upward; a step of placing a solder piece onto the other end of the pressure guide hole; a step of drawing a vacuum inside the vacuum chamber; and a step of heating the solder piece until the solder melts.

摘要翻译： 提供一种用于制造绝对压力式压力传感器的方法和装置，其能够使相对压力型压力传感器以简单和容易的方式被改变（转换）成绝对压力型压力传感器。 该方法的特征在于包括：在其中设置有参考压力室的相对压力型压力传感器和一个与参考压力室连通的压力导向孔，另一端与大气连通的压力引导孔 一个真空室，压力导向孔的另一端向上打开; 将焊锡片放置在压力导向孔的另一端的步骤; 在真空室内抽真空的步骤; 以及加热焊料直到焊料熔化的步骤。