公开(公告)号：US20060001878A1

公开(公告)日：2006-01-05

申请号：US11138175

申请日：2005-05-26

申请人： Palash Das ,  Thomas Hofmann ,  Richard Sandstrom ,  Otto Boucky ,  Ernst Stumpp ,  Berthold Matzkovits ,  Michael Hoell ,  Joerg Walther ,  Kurt Brenner ,  Guenter Grupp

发明人： Palash Das ,  Thomas Hofmann ,  Richard Sandstrom ,  Otto Boucky ,  Ernst Stumpp ,  Berthold Matzkovits ,  Michael Hoell ,  Joerg Walther ,  Kurt Brenner ,  Guenter Grupp

IPC分类号： G01B11/00

CPC分类号： B23K26/03 ,  B23K26/0006 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0622 ,  B23K26/0665 ,  B23K26/0738 ,  B23K26/083 ,  B23K26/352 ,  B23K37/0408 ,  B23K37/047 ,  B23K2101/18 ,  B23K2101/38 ,  B23K2103/56 ,  C30B13/22 ,  C30B29/06 ,  G01B21/00 ,  G03F7/70383 ,  G03F7/70583 ,  H01L27/1296

摘要： Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

摘要翻译： 公开的系统和方法用于聚焦用于与沉积在基板上的膜相互作用的光束，其中聚焦光束限定短轴和长轴。 在一个方面，系统可以包括检测系统，以分析在图像平面上从胶片反射的光，以确定光束是否在胶片的短轴中聚焦。 在另一方面，可以提供一种用于定位用于与成形线束相互作用的胶片（具有不完美的非平面表面）的系统。

公开(公告)号：US20090139970A1

公开(公告)日：2009-06-04

申请号：US12275735

申请日：2008-11-21

申请人： Guenter GRUPP ,  Ernst Stumpp ,  Otto Boucky ,  Joerg Walther

发明人： Guenter GRUPP ,  Ernst Stumpp ,  Otto Boucky ,  Joerg Walther

IPC分类号： B23K33/00 ,  B23K9/00

CPC分类号： B23K37/0229 ,  B23K26/04 ,  B23Q35/128 ,  G05B2219/36199 ,  G05B2219/4719

摘要： A machine part is guided along a defined movement path over a workpiece surface. The machine part is held at a defined distance from the workpiece surface during this movement. For that purpose, at least one distance sensor is provided that runs ahead of the machine part with a defined lead. A plurality of distance values indicative of a distance between the distance sensor and the workpiece surface are determined along the movement path. A plurality of control values are determined as a function of the distance values. The defined distance is repeatedly adjusted by means of the control values. In accordance with a first aspect, the distance values are determined at measurement points distributed with a first grid spacing along the movement path, while the control values are determined for actuating points distributed with a second grid spacing along the movement path, the first and the second grid spacings being different. According to a second aspect, the machine part has a linear range of activity on the workpiece surface, and the distance between the machine part and the workpiece surface is controlled by means of a distance control value and an angle control value, which are derived from distance values acquired from at least two distance sensors, which are laterally offset from one another.

摘要翻译： 机器部件沿着工件表面上的限定的移动路径引导。 在该运动过程中，机器部件与工件表面保持一定距离。 为此目的，提供至少一个距离传感器，其以定义的引线在机器部分之前延伸。 沿着移动路径确定表示距离传感器与工件表面之间的距离的多个距离值。 多个控制值被确定为距离值的函数。 通过控制值重复调整定义的距离。 根据第一方面，在沿着移动路径以第一网格间隔分布的测量点处确定距离值，同时确定用于致动沿着移动路径以第二格栅间隔分布的启动点的控制值，第一和第 第二网格间距不同。 根据第二方面，机器部件在工件表面上具有线性范围的活动，并且通过距离控制值和角度控制值来控制机器部件和工件表面之间的距离，该距离控制值和角度控制值 从至少两个距离传感器获取的距离值彼此横向偏移。

公开(公告)号：US20090228136A1

公开(公告)日：2009-09-10

申请号：US11990229

申请日：2006-07-20

申请人： Guenter Grupp ,  Ernst Stumpp ,  Otto Boucky ,  Joerg Walther

发明人： Guenter Grupp ,  Ernst Stumpp ,  Otto Boucky ,  Joerg Walther

IPC分类号： G05B19/19

CPC分类号： B23K37/0229 ,  B23K26/04 ,  B23Q35/128 ,  G05B2219/36199 ,  G05B2219/4719

摘要： A machine part (12) is guided along a defined movement path (28) over a workpiece surface (23). The machine part (12) is held at a defined distance (50) from the workpiece surface (23) during this movement. For that purpose, a distance sensor (14) is provided that runs ahead of the machine part (12) with a defined lead (18). A plurality of distance values between the distance sensor (14) and the workpiece surface (23) are determined. A plurality of control values for adjusting the defined distance (50) are determined as a function of the distance values. The defined distance (50) is repeatedly adjusted by means of the control values. In accordance with one aspect of the invention, the distance values along the movement path (28) are determined by means of a first grid spacing (46). The control values are determined along the movement path (28) with a second grid spacing (44). The first and the second grid spacings (46, 44) are different.

摘要翻译： 机器部件（12）沿着工件表面（23）上的限定的移动路径（28）被引导。 在该运动期间，机器部件（12）被保持在与工件表面（23）限定的距离（50）处。 为此目的，提供一种距离传感器（14），该距离传感器（14）具有限定的引线（18）在机器部分（12）的前面延伸。 确定距离传感器（14）和工件表面（23）之间的多个距离值。 作为距离值的函数确定用于调整限定距离（50）的多个控制值。 通过控制值重复调整限定的距离（50）。 根据本发明的一个方面，沿着移动路径（28）的距离值通过第一格栅间隔（46）来确定。 沿着移动路径（28）以第二格栅间隔（44）确定控制值。 第一和第二栅格间隔（46,44）不同。

公开(公告)号：US20090184676A1

公开(公告)日：2009-07-23

申请号：US12257422

申请日：2008-10-24

申请人： Friedrich Schoerg ,  Ernst Stumpp ,  Guenter Grupp ,  Otto Ruck

发明人： Friedrich Schoerg ,  Ernst Stumpp ,  Guenter Grupp ,  Otto Ruck

IPC分类号： G05B1/08

CPC分类号： G05B19/23 ,  G05B2219/37175 ,  G05B2219/45165

摘要： A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit. It is particularly preferred if the current number of position pulses and the defined number of pulses are compared in a comparator which is arranged on an interface card of a computer unit, with the drive control circuit for controlling the movement of the machine part being implemented with a closed loop controller in the form of a controller program, which is cyclically executed by a central processor of the computer unit.

摘要翻译： 诸如激光器的机器部件沿着至少一个相对于工件的移动轴线移动。 位置脉冲通过增量编码器产生，位置脉冲串中的位置脉冲数代表机器部件的移动位置。 当当前位置脉冲数对应于预定数量的脉冲时，产生机器部分的触发信号。 在优选实施例中，将当前位置脉冲数和限定数量的脉冲与较高级驱动控制电路进行远程比较。 特别优选的是，在布置在计算机单元的接口卡上的比较器中比较当前位置脉冲数和限定脉冲数，驱动控制电路用于控制机器部件的运动， 控制器程序形式的闭环控制器，其由计算机单元的中央处理器循环执行。

公开(公告)号：US08115440B2

公开(公告)日：2012-02-14

申请号：US12257422

申请日：2008-10-24

申请人： Friedrich Schoerg ,  Ernst Stumpp ,  Guenter Grupp ,  Otto Ruck

发明人： Friedrich Schoerg ,  Ernst Stumpp ,  Guenter Grupp ,  Otto Ruck

IPC分类号： G05B1/06 ,  G05B19/29 ,  H02P1/00

CPC分类号： G05B19/23 ,  G05B2219/37175 ,  G05B2219/45165

摘要： A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit. It is particularly preferred if the current number of position pulses and the defined number of pulses are compared in a comparator which is arranged on an interface card of a computer unit, with the drive control circuit for controlling the movement of the machine part being implemented with a closed loop controller in the form of a controller program, which is cyclically executed by a central processor of the computer unit.

摘要翻译： 诸如激光器的机器部件沿着至少一个相对于工件的移动轴线移动。 位置脉冲通过增量编码器产生，位置脉冲串中的位置脉冲数代表机器部件的移动位置。 当当前位置脉冲数对应于预定数量的脉冲时，产生机器部分的触发信号。 在优选实施例中，将当前位置脉冲数和限定数量的脉冲与较高级驱动控制电路进行远程比较。 特别优选的是，在布置在计算机单元的接口卡上的比较器中比较当前位置脉冲数和限定脉冲数，驱动控制电路用于控制机器部件的运动， 控制器程序形式的闭环控制器，其由计算机单元的中央处理器循环执行。

公开(公告)号：US08590875B2

公开(公告)日：2013-11-26

申请号：US13552852

申请日：2012-07-19

申请人： Ernst Stumpp

发明人： Ernst Stumpp

IPC分类号： B25B1/22 ,  H02K33/00 ,  H02P5/00 ,  G05B1/06 ,  B23Q1/38

CPC分类号： B23Q1/38

摘要： A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.

摘要翻译： 机器具有用于在一个或多个空间方向上移动机头的框架结构。 框架结构包括用于移动头部的致动器和空气轴承。 该机器还包括连接到空气轴承的用于提供压缩空气流的压缩空气进料。 限流器限定到空气轴承的压缩空气流。 机器具有第一操作状态，其中限定了高压缩空气流，并且可以致动致动器。 机器具有第二操作状态，其中限定了低于高压缩空气流的压缩空气流。 在第二操作状态下，致动器由闭环位置控制器固定而不致动作，而闭环位置控制器保持运行。