-
公开(公告)号：US20100259768A1
公开(公告)日：2010-10-14
申请号：US12738587
申请日：2008-10-17
IPC分类号： G01B11/14
CPC分类号： G01D5/38 , G01D5/28 , G03F7/70758 , G03F7/70775 , H01L21/681
摘要： A displacement device with precision measurement with a displacement device for supporting a workpiece including an optical sensor (52); a support plate (54) defining a support plate aperture (56); a planar motor (58) disposed parallel the support plate (54), the planar motor (58) having a first side (60) operable to support the workpiece (40) and a second side (62) opposite the support plate (54); and a 2D-grating (68) disposed on the planar motor (58), the 2D-grating (68) being in optical communication with the optical sensor (52) through the support plate aperture (56).
摘要翻译： 一种具有精度测量的位移装置，具有用于支撑包括光学传感器（52）的工件的位移装置; 限定支撑板孔（56）的支撑板（54）; 平面电动机（58），平行于所述支撑板（54），所述平面电动机（58）具有可操作以支撑所述工件（40）的第一侧面（60）和与所述支撑板（54）相对的第二侧面（62） ; 以及设置在所述平面电动机（58）上的2D光栅（68），所述2D光栅（68）通过所述支撑板孔（56）与所述光学传感器（52）光学连通。
-
公开(公告)号：US06661127B2
公开(公告)日：2003-12-09
申请号：US10028117
申请日：2001-12-21
申请人： Petrus Carolus Maria Frissen , Johan Cornelis Compter , Michael Josepha Mathijs Renkens , George Arie Jan De Fockert , Rob Jacobus Matheus Coolen
发明人： Petrus Carolus Maria Frissen , Johan Cornelis Compter , Michael Josepha Mathijs Renkens , George Arie Jan De Fockert , Rob Jacobus Matheus Coolen
IPC分类号： H02K4100
CPC分类号： H02K41/031 , H02K2201/18
摘要： Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) having a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) has an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field. The positioning device has a number of magnetically sensitive sensors (Hall sensors 45) giving a signal which depends on the local mutual positions of the permanent magnets of the first part relative to the electric coils of the second part in an area in which the parts overlap.
摘要翻译： 具有第一部分（1）的定位装置，所述第一部分（1）在X和Y方向上可相对于第二部分（2）移动，所述第一部分（1）具有载体（5），磁体系统（3） 分别排列成平行于X方向和Y方向的行（7）和列（8）的图案。 每行和列中的磁体以Halbach阵列布置，即，每行（7）中的每个连续磁体的磁性取向和每个列（8）逆时针旋转90°。 第二部分（2）具有电磁线圈系统（4），其具有两种类型的电线圈（C1，C2），一种类型的角偏移为+ 45°，另一种类型具有-45°相对于 X方向。 磁体配置导致非常强的磁场。 定位装置具有多个磁敏传感器（霍尔传感器45），该传感器（Hall传感器45）在第一部分的永磁体相对于第二部分的电线圈的局部相互位置取决于部件重叠的区域中的信号 。
-
3.发明申请公开(公告)号：US20090140686A1
公开(公告)日：2009-06-04
申请号：US11719306
申请日：2005-11-15
IPC分类号： H02K41/03
CPC分类号： G03F7/70758 , G03F7/70725 , H02K41/03 , H02K2201/18 , H02P25/00 , H02P31/00
摘要： For ensuring high-precision control of a planar motor (1) comprising a magnet (2) and j coils (3), j=1 . . . N, wherein currents T7 can flow through the coils (3) such that a force and a moment are generated that interact with the magnet (2), it has been proposed to determine force and moment needed to change the relative position of magnet (2) and coils from a present position to a desired position, and then to determine the currents T7 necessary for generating this force and moment in the computing means (43) of the control unit (4) of the electric motor (1). The coil currents are then regulated accordingly with regulating means (44). The relative position of magnet (2) and coils (3) is measured with measuring means (5) and fed into the first input means (41) of the control unit (4).
摘要翻译： 为了确保包括磁体（2）和j个线圈（3）的平面电动机（1）的高精度控制，j = 1。 。 。 N，其中电流T7可以流过线圈（3），使得产生与磁体（2）相互作用的力和力矩，已经提出确定改变磁体（2）的相对位置所需的力和力矩 ）并从当前位置到期望位置的线圈，然后确定在电动机（1）的控制单元（4）的计算装置（43）中产生该力和力矩所需的电流T7。 然后用调节装置（44）相应地调节线圈电流。 用测量装置（5）测量磁体（2）和线圈（3）的相对位置，并送入控制单元（4）的第一输入装置（41）。
-
公开(公告)号：US06891600B2
公开(公告)日：2005-05-10
申请号：US10457788
申请日：2003-06-10
CPC分类号： G03F7/70758 , H02K3/18 , H02K3/325 , H02K41/03 , H02K41/031 , H02K2201/18
摘要： A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer.
摘要翻译： 用于光刻投影装置中的致动器的线圈。 线圈由卷绕在绕组轴上的导电片材材料条形成。 片状材料带的各匝由不导电层分开。
-
公开(公告)号：US20080203828A1
公开(公告)日：2008-08-28
申请号：US11814003
申请日：2006-01-10
IPC分类号： H02K41/00
CPC分类号： G03F7/70758 , Y10S414/135
摘要： Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
摘要翻译： 特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。 第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。 对于第一部分的高精度定位，提供了干涉仪系统（731,730）。
-
公开(公告)号：US20080129128A1
公开(公告)日：2008-06-05
申请号：US11814009
申请日：2006-01-13
申请人： Johan Cornis Compter , Petrus Carolus Maria Frissen , Rob Tabor , Frans Van Gaal , Hendrik Jan Eggink
发明人： Johan Cornis Compter , Petrus Carolus Maria Frissen , Rob Tabor , Frans Van Gaal , Hendrik Jan Eggink
CPC分类号： H02K41/031 , H02K5/20 , H02K2201/18
摘要： Coil assemblies (2) of electric motors (1) produce heat that can be a disadvantage when needing the electric motor (1) for high precision positioning applications. To reduce the negative impact of the heat, the coils (26a, 26b, 26c) are arranged in an internally cooled housing (21). The housing (21) has an outermost layer (25) at least on the side lacing the magnet assembly (3) of the electric motor (1), the outermost layer (25) being made of low or non-electrically conductive, non-magnetic or nearly non-magnetic material. The outermost layer (25) prevents heat radiation to the environment.
摘要翻译： 电动机（1）的线圈组件（2）产生热量，当需要电动机（1）用于高精度定位应用时，这可能是不利的。 为了减少热的负面影响，线圈（26a，26b，26c）被布置在内部冷却的壳体（21）中。 壳体（21）至少在装在电动机（1）的磁体组件（3）的一侧上具有最外层（25），最外层（25）由低或非导电， 磁性或近乎非磁性的材料。 最外层（25）防止对环境的热辐射。
-
公开(公告)号：US06847134B2
公开(公告)日：2005-01-25
申请号：US10616336
申请日：2003-07-09
申请人： Petrus Carolus Maria Frissen , Johan Cornelia Compter , Michael Josepha Mathijs Renkens , George Arie Jan De Fockert , Rob Jacobus Matheus Coolen
发明人： Petrus Carolus Maria Frissen , Johan Cornelia Compter , Michael Josepha Mathijs Renkens , George Arie Jan De Fockert , Rob Jacobus Matheus Coolen
CPC分类号： H02K41/031 , H02K2201/18
摘要： Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field. The positioning device comprises a number of magnetically sensitive sensors (Hall sensors 45) giving a signal which depends on the local mutual positions of the permanent magnets of the first part relative to the electric coils of the second part in an area in which the parts overlap.
摘要翻译： 具有第一部分（1）的定位装置，所述第一部分（1）在X和Y方向上可相对于第二部分（2）移动，所述第一部分（1）包括载体（5），磁体系统（3） 分别排列成平行于X方向和Y方向的行（7）和列（8）的图案。 每行和列中的磁体以Halbach阵列布置，即，每行（7）中的每个连续磁体的磁性取向和每个列（8）逆时针旋转90°。 第二部分（2）包括具有两种类型的电线圈（C1，C2）的电线圈系统（4），一种类型的角偏移为+ 45°，另一种类型具有-45°的偏移，相对于 X方向。 磁体配置导致非常强的磁场。 定位装置包括多个磁敏传感器（霍尔传感器45），该传感器提供一个信号，该信号取决于第一部分的永磁体相对于第二部分的电线圈在其中部分重叠的区域中的电气线圈的局部相互位置 。
-
公开(公告)号：US06496093B2
公开(公告)日：2002-12-17
申请号：US09861937
申请日：2001-05-21
IPC分类号： H01F700
CPC分类号： G03F7/70758 , H02K41/031 , H02K2201/18
摘要： Positioning device with a first part and a second part which are movable relative to each other in at least one direction. Said first part comprises a carrier on which a system of magnets with N and Z magnets are arranged in an alternating manner and having a flux density B(x)=B(x+2&tgr;), &tgr; being the magnetic pole pitch. Said second part comprises an electric coil system with at least one coil block unit, each unit having k coil blocks with k]2, said coil blocks having conductors, all conductors belonging to the same coil block being oriented in the same direction and fed by a n-phase system with n]2. Seen in a direction perpendicular to the conductors, the flux varies according to Φ = sin π ( x + x 0 ) 2 τ . During the desired movement of the parts relative to each other, there is a small undesired up and down movement perpendicular to the desired movement. To avoid this undesired movement, the distance between the mass centers of the coil blocks belonging to a coil block unit, seen in a direction perpendicular to the conductors, is equal to τ k + p × τ , with p=2, 3 . . ..
摘要翻译： 具有第一部分和第二部分的定位装置可以在至少一个方向上相对于彼此移动。 所述第一部分包括载体，具有N和Z磁体的磁体系统以交替方式布置并具有通量密度B（x）= B（x + 2tau），τ为磁极间距。 所述第二部分包括具有至少一个线圈块单元的电线圈系统，每个单元具有k个具有k] 2的k个线圈块，所述线圈块具有导体，属于相同线圈块的所有导体沿相同方向定向并被馈送 具有n] 2的n相系统。 在与导体垂直的方向上，通量根据部件相对于彼此的期望运动而变化，垂直于期望的运动存在小的不希望的上下运动。 为了避免这种不期望的移动，属于线圈块单元的线圈块的质心位于与导体垂直的方向上的距离等于p = 2,3。 。 .. ..
-
公开(公告)号：US07948122B2
公开(公告)日：2011-05-24
申请号：US11814003
申请日：2006-01-10
CPC分类号： G03F7/70758 , Y10S414/135
摘要： Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
摘要翻译： 特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。 第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。 对于第一部分的高精度定位，提供了干涉仪系统（731,730）。
-
公开(公告)号：US06926588B2
公开(公告)日：2005-08-09
申请号：US10011895
申请日：2001-12-06
申请人： Henricus Wilhelmus Aloysius Janssen , Johannes Petrus Martinus Bernardus Vermeulen , Fransiscus Marinus Andrea Maria Van Gaal , Petrus Carolus Maria Frissen
发明人： Henricus Wilhelmus Aloysius Janssen , Johannes Petrus Martinus Bernardus Vermeulen , Fransiscus Marinus Andrea Maria Van Gaal , Petrus Carolus Maria Frissen
CPC分类号： H02K15/045 , H01F41/04 , Y10T29/4906 , Y10T29/49066 , Y10T29/49073
摘要： The invention relates to a method of manufacturing a band coil by means of a material-removing process performed on the coils so as to obtain a band coil which has a profile in the direction of the coil axis. Such a process may be a discharge process, an etching process or a mechanical grinding process. The obtained band coils may have such a shape that certain coil sides are effective whereas other coil sides are interfering as little as possible. Such band coils can be very successful in planar motors.
-
-
-
-
-
-
-
-
-
搜索结果
10 条记录 (耗时 0.021 秒)
