利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

4 条记录 (耗时 0.019 秒)

    Coil Assembly for Use with an Electric Motor
    2.
    发明申请
    Coil Assembly for Use with an Electric Motor 审中-公开
    用于电动机的线圈组件

    公开(公告)号：US20080129128A1

    公开(公告)日：2008-06-05

    申请号：US11814009

    申请日：2006-01-13

    申请人： Johan Cornis Compter ,  Petrus Carolus Maria Frissen ,  Rob Tabor ,  Frans Van Gaal ,  Hendrik Jan Eggink

    发明人： Johan Cornis Compter ,  Petrus Carolus Maria Frissen ,  Rob Tabor ,  Frans Van Gaal ,  Hendrik Jan Eggink

    IPC分类号： H02K5/20 ,  H02K9/19 ,  H02K41/02

    CPC分类号： H02K41/031 ,  H02K5/20 ,  H02K2201/18

    摘要： Coil assemblies (2) of electric motors (1) produce heat that can be a disadvantage when needing the electric motor (1) for high precision positioning applications. To reduce the negative impact of the heat, the coils (26a, 26b, 26c) are arranged in an internally cooled housing (21). The housing (21) has an outermost layer (25) at least on the side lacing the magnet assembly (3) of the electric motor (1), the outermost layer (25) being made of low or non-electrically conductive, non-magnetic or nearly non-magnetic material. The outermost layer (25) prevents heat radiation to the environment.

    摘要翻译： 电动机（1）的线圈组件（2）产生热量，当需要电动机（1）用于高精度定位应用时，这可能是不利的。 为了减少热的负面影响，线圈（26a，26b，26c）被布置在内部冷却的壳体（21）中。 壳体（21）至少在装在电动机（1）的磁体组件（3）的一侧上具有最外层（25），最外层（25）由低或非导电， 磁性或近乎非磁性的材料。 最外层（25）防止对环境的热辐射。

    Lithographic apparatus, device manufacturing method, and device manufactured thereby
    3.
    发明授权
    Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权
    平版印刷设备，器件制造方法和由此制造的器件

    公开(公告)号：US06747731B2

    公开(公告)日：2004-06-08

    申请号：US10607545

    申请日：2003-06-27

    申请人： Eric W. A. Janssen ,  Marcel J. M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H. J. Bisschops ,  Rob Tabor

    发明人： Eric W. A. Janssen ,  Marcel J. M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H. J. Bisschops ,  Rob Tabor

    IPC分类号： G03B2742

    CPC分类号： F16C29/025 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  F16F15/0275 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/709

    摘要： A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.

    摘要翻译： 平版印刷投影装置包括真空室，该真空室具有包围第一和第二目标表中的至少一个的真空室，真空室内的每个物体台被连接到用于相对于设备的投影系统定位物体台的定位装置 。 定位装置设置有气动重力补偿器，该气动重力补偿器包括与对象台相关联的活塞; 充气压力室，压力室中的气体作用在可移动构件上，以至少部分地抵消物体台的重量; 气体轴承; 以及用于将通过可动构件和圆柱形壳体的支承表面之间的间隙排出的气体排出到真空室的抽空装置。 部分柔性杆将活塞连接到物体台。