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1.发明授权公开(公告)号：US08978462B2
公开(公告)日：2015-03-17
申请号：US13640621
申请日：2011-04-11
申请人： Philippe Jacques Pernod , Leticia Gimeno Monge , Abdelkrim Talbi , Alain Merlen , Romain Victor Jean Viard , Vincent Mortet , Ali Soltani , Vladimir Preobrazhensky
发明人： Philippe Jacques Pernod , Leticia Gimeno Monge , Abdelkrim Talbi , Alain Merlen , Romain Victor Jean Viard , Vincent Mortet , Ali Soltani , Vladimir Preobrazhensky
CPC分类号： G01F1/69 , G01F1/6845 , G01F1/692 , G01P5/12 , Y10T29/49156
摘要： The invention relates to a submillimeter-sized hot-wire sensor (1) comprising a substrate (10), two support rods (11, 12), a metal wire (13) extending between the two ends of the support rods (11, 12), and electrical contacts (14, 15) disposed on the support rods, said contacts each being linked to one of the ends of the wire (13). The metal wire comprises at least two layers of metal materials, one of said layers being made of a material exhibiting a residual stress under tension and the other layer being made of a material exhibiting a residual stress under compression. The thicknesses of these metal layers are adapted so as to compensate the residual stresses between the various layers.
摘要翻译： 本发明涉及一种亚毫米级的热丝传感器（1），其包括基底（10），两个支撑杆（11,12），金属线（13），其在支撑杆（11,12）的两端之间延伸 ）和设置在支撑杆上的电触头（14,15），所述触头各自连接到导线（13）的一个端部。 金属线包括至少两层金属材料，其中一层由在张力下表现出残余应力的材料制成，另一层由在压缩下表现出残余应力的材料制成。 这些金属层的厚度适于补偿各层之间的残余应力。
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2.发明申请公开(公告)号：US20130125644A1
公开(公告)日：2013-05-23
申请号：US13640621
申请日：2011-04-11
申请人： Philippe Jacques Pernod , Leticia Gimeno Monge , Abdelkrim Talbi , Alain Merlen , Romain Victor Jean Viard , Vincent Mortet , Ali Soltani , Vladimir Preobrazhensky
发明人： Philippe Jacques Pernod , Leticia Gimeno Monge , Abdelkrim Talbi , Alain Merlen , Romain Victor Jean Viard , Vincent Mortet , Ali Soltani , Vladimir Preobrazhensky
IPC分类号： G01F1/69
CPC分类号： G01F1/69 , G01F1/6845 , G01F1/692 , G01P5/12 , Y10T29/49156
摘要： The invention relates to a submillimeter-sized hot-wire sensor (1) comprising a substrate (10), two support rods (11, 12), a metal wire (13) extending between the two ends of the support rods (11, 12), and electrical contacts (14, 15) disposed on the support rods, said contacts each being linked to one of the ends of the wire (13). The metal wire comprises at least two layers of metal materials, one of said layers being made of a material exhibiting a residual stress under tension and the other layer being made of a material exhibiting a residual stress under compression. The thicknesses of these metal layers are adapted so as to compensate the residual stresses between the various layers.
摘要翻译： 本发明涉及一种亚毫米级的热丝传感器（1），其包括基底（10），两个支撑杆（11,12），金属线（13），其在支撑杆（11,12）的两端之间延伸 ）和设置在支撑杆上的电触头（14,15），所述触头各自连接到导线（13）的一个端部。 金属线包括至少两层金属材料，其中一层由在张力下表现出残余应力的材料制成，另一层由在压缩下表现出残余应力的材料制成。 这些金属层的厚度适于补偿各层之间的残余应力。
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3.发明授权Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment 有权在气态或液态环境中用压电双压电晶片悬臂测量物理参数的方法和系统公开(公告)号：US07914203B2
公开(公告)日：2011-03-29
申请号：US12621229
申请日：2009-11-18
申请人： Vincent Mortet , Rainer Petersen
发明人： Vincent Mortet , Rainer Petersen
IPC分类号： G01K11/26
CPC分类号： G01N29/245 , G01N29/022 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427 , Y10T436/143333
摘要： A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
摘要翻译： 使用压电双压电晶片悬臂来确定气态或液态环境中的物理参数。 该传感器用作驱动和阻尼振荡器。 与普通的悬臂传感器系统相反，双压电晶片悬臂的压电薄膜同时作为传感器和致动器。 使用双压电晶片悬臂的至少两个共振模式，可以在气体或液体中同时测量至少两个物理参数。 还描述了优化的压电悬臂和制造悬臂的方法。
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4.发明申请METHOD AND SYSTEM FOR MEASURING PHYSICAL PARAMETERS WITH A PIEZOELECTRIC BIMORPH CANTILEVER IN A GASEOUS OR LIQUID ENVIRONMENT 失效在气体或液体环境中用压电二聚氰胺测量物理参数的方法和系统公开(公告)号：US20070138909A1
公开(公告)日：2007-06-21
申请号：US11610976
申请日：2006-12-14
申请人： Vincent Mortet , Rainer Petersen
发明人： Vincent Mortet , Rainer Petersen
IPC分类号： H01L41/107
CPC分类号： G01N29/245 , G01N29/022 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427 , Y10T436/143333
摘要： A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
摘要翻译： 使用压电双压电晶片悬臂来确定气态或液态环境中的物理参数。 该传感器用作驱动和阻尼振荡器。 与普通的悬臂传感器系统相反，双压电晶片悬臂的压电薄膜同时作为传感器和致动器。 使用双压电晶片悬臂的至少两个共振模式，可以在气体或液体中同时测量至少两个物理参数。 还描述了优化的压电悬臂和制造悬臂的方法。
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5.发明申请METHOD AND SYSTEM FOR MEASURING PHYSICAL PARAMETERS WITH A PIEZOELECTRIC BIMORPH CANTILEVER IN A GASEOUS OR LIQUID ENVIRONMENT 有权在气体或液体环境中用压电二聚氰胺测量物理参数的方法和系统公开(公告)号：US20100129920A1
公开(公告)日：2010-05-27
申请号：US12621229
申请日：2009-11-18
申请人： Vincent Mortet , Rainer Petersen
发明人： Vincent Mortet , Rainer Petersen
CPC分类号： G01N29/245 , G01N29/022 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427 , Y10T436/143333
摘要： A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
摘要翻译： 使用压电双压电晶片悬臂来确定气态或液态环境中的物理参数。 该传感器用作驱动和阻尼振荡器。 与普通的悬臂传感器系统相反，双压电晶片悬臂的压电薄膜同时作为传感器和致动器。 使用双压电晶片悬臂的至少两个共振模式，可以在气体或液体中同时测量至少两个物理参数。 还描述了优化的压电悬臂和制造悬臂的方法。
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6.发明授权Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment 失效在气态或液态环境中用压电双压电晶片悬臂测量物理参数的方法和系统公开(公告)号：US07663295B2
公开(公告)日：2010-02-16
申请号：US11610976
申请日：2006-12-14
申请人： Vincent Mortet , Rainer Petersen
发明人： Vincent Mortet , Rainer Petersen
IPC分类号： H01L41/04
CPC分类号： G01N29/245 , G01N29/022 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427 , Y10T436/143333
摘要： A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
摘要翻译： 使用压电双压电晶片悬臂来确定气态或液态环境中的物理参数。 该传感器用作驱动和阻尼振荡器。 与普通的悬臂传感器系统相反，双压电晶片悬臂的压电薄膜同时作为传感器和致动器。 使用双压电晶片悬臂的至少两个共振模式，可以在气体或液体中同时测量至少两个物理参数。 还描述了优化的压电悬臂和制造悬臂的方法。
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