公开(公告)号：US20180341165A1

公开(公告)日：2018-11-29

申请号：US15965900

申请日：2018-04-28

Applicant: Renesas Electronics Corporation

Inventor： Shinichi WATANUKI ,  Yasutaka NAKASHIBA ,  Masaru WAKABAYASHI

IPC: G02F1/225

CPC classification number: G02F1/2257 ,  G02F2001/212 ,  G02F2201/063

Abstract: In a semiconductor device connected to a first optical waveguide, a phase modulation unit, and a second optical waveguide in this order and having an optical modulator guiding light in a first direction, the phase modulation unit includes: a semiconductor layer whose length in the first direction is larger than a width in a second direction orthogonal to the first direction and which is made of monocrystalline silicon; a core part serving as an optical waveguide region formed on the semiconductor layer, and extending in the first direction; a pair of slab parts arranged on both sides of the core part in the second direction; a first electrode coupled with one of the slab parts; and a second electrode coupled with the other of the slab parts. The core part has a p type semiconductor region and an n type semiconductor region extending in the first direction, and the second direction coincides with a crystal orientation of the semiconductor layer.

公开(公告)号：US20180052338A1

公开(公告)日：2018-02-22

申请号：US15798780

申请日：2017-10-31

Applicant: RENESAS ELECTRONICS CORPORATION

Inventor： Hiroyuki KUNISHIMA ,  Yasutaka NAKASHIBA ,  Masaru WAKABAYASHI ,  Shinichi WATANUKI

IPC: G02F1/025 ,  G02B6/132 ,  H01L23/532 ,  G02B6/125 ,  G02B6/28 ,  G02B6/12

Abstract: A low reflectance film with a second reflectance (50% or lower) lower than a first reflectance is formed between an optical directional coupler and a first-layer wiring with the first reflectance. Thus, even when the first-layer wiring is formed above the optical directional coupler, the influence of the light reflected by the first-layer wiring on the optical signal propagating through the first optical waveguide and the second optical waveguide of the optical directional coupler can be reduced. Accordingly, the first-layer wiring can be arranged above the optical directional coupler, and the restriction on the layout of the first-layer wiring is relaxed.

公开(公告)号：US20160334573A1

公开(公告)日：2016-11-17

申请号：US15152117

申请日：2016-05-11

Applicant: RENESAS ELECTRONICS CORPORATION

Inventor： Hiroyuki KUNISHIMA ,  Yasutaka NAKASHIBA ,  Masaru WAKABAYASHI ,  Shinichi WATANUKI

IPC: G02B6/122 ,  G02B6/28 ,  H01L23/522 ,  G02F1/025 ,  H01L23/528 ,  H01L23/532

CPC classification number: G02F1/025 ,  G02B6/125 ,  G02B6/132 ,  G02B6/2852 ,  G02B2006/12061 ,  G02B2006/12142 ,  G02B2006/12147 ,  G02F2201/08 ,  H01L23/53214 ,  H01L23/53228 ,  H01L2224/05

Abstract: A low reflectance film with a second reflectance (50% or lower) lower than a first reflectance is formed between an optical directional coupler and a first-layer wiring with the first reflectance. Thus, even when the first-layer wiring is formed above the optical directional coupler, the influence of the light reflected by the first-layer wiring on the optical signal propagating through the first optical waveguide and the second optical waveguide of the optical directional coupler can be reduced. Accordingly, the first-layer wiring can be arranged above the optical directional coupler, and the restriction on the layout of the first-layer wiring is relaxed.

Abstract translation: 在具有第一反射率的光学定向耦合器和第一层布线之间形成具有比第一反射率低的第二反射率（50％或更低）的低反射率膜。 因此，即使当第一层布线形成在光学定向耦合器上方时，由第一层布线反射的光对通过光学定向耦合器的第一光波导和第二光波导传播的光信号的影响可以 减少 因此，第一层布线可以布置在光学定向耦合器的上方，并且第一层布线的布局的限制被放宽。