Lithographic apparatus, device manufacturing method and radiation system
    1.
    发明申请
    Lithographic apparatus, device manufacturing method and radiation system 有权
    光刻设备,设备制造方法和辐射系统

    公开(公告)号:US20050253091A1

    公开(公告)日:2005-11-17

    申请号:US10844577

    申请日:2004-05-13

    摘要: A lithographic projection apparatus includes an illumination system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to impart the beam of radiation with a pattern in its cross section; a substrate table configured to hold a substrate, and a projection system configured to project the patterned beam of radiation onto a target portion of the substrate, wherein the illumination system has a radiation source and at least one mirror configured to enhance an output of the source. The illumination system may include a second radiation source and at least one mirror positioned between the radiation sources to image the output of the second source onto the first source, thereby enhancing the output of the source. The radiation sources may be operable to emit radiation in the EUV wavelength range.

    摘要翻译: 光刻投影设备包括被配置为提供辐射束的照明系统; 被配置为支撑图案形成装置的支撑件,所述图案形成装置被构造成在其横截面中赋予所述辐射束的图案; 被配置为保持衬底的衬底台和被配置为将所述图案化的辐射束投射到所述衬底的目标部分上的投影系统,其中所述照明系统具有辐射源和至少一个配置成增强所述源的输出的反射镜 。 照明系统可以包括第二辐射源和位于辐射源之间的至少一个反射镜,以将第二源的输出成像到第一源上,从而增强源的输出。 辐射源可以可操作地发射EUV波长范围内的辐射。

    Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby
    3.
    发明申请
    Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby 失效
    辐射系统,污染屏障,光刻设备,器件制造方法和由此制造的器件

    公开(公告)号:US20050077483A1

    公开(公告)日:2005-04-14

    申请号:US10873646

    申请日:2004-06-23

    CPC分类号: G03F7/70916

    摘要: A radiation system includes a contamination barrier, e.g., a foil trap, between a collector, for example a normal incidence collector, and a radiation source, such that radiation coming from the source passes the foil trap twice. The radiation passes the contamination barrier once before hitting the collector and a second time after reflection by the collector. The foil trap includes lamellas that are parallel to both the radiation coming from the light source, and to the radiation reflected by the collector. The radiation is thus not obstructed by the foil trap. In this way, a normal incidence collector, which is used with a plasma produced source, can be protected from debris coming from a EUV source.

    摘要翻译: 辐射系统包括在收集器例如正入射收集器和辐射源之间的污染屏障,例如箔阱,使得来自源的辐射通过箔阱两次。 辐射在撞击收集器之前通过污染屏障一次,并在收集器反射之后经过第二次。 箔捕获器包括平行于来自光源的辐射和由收集器反射的辐射的片层。 因此辐射不被箔陷阱阻挡。 以这种方式,可以保护与等离子体产生的源一起使用的正常入射收集器免受来自EUV源的碎片。

    System for copy protection of an information carrier
    5.
    发明申请
    System for copy protection of an information carrier 失效
    信息载体复制保护系统

    公开(公告)号:US20060281013A1

    公开(公告)日:2006-12-14

    申请号:US10554599

    申请日:2004-04-16

    IPC分类号: G03H1/04

    摘要: The present invention relates to a system for copy protection of an information carrier, said system comprising a diffractive layer for delivering a speckle pattern when illuminated by a light source, a spatial filter, which is aligned with respect to the diffractive layer, for delivering a filtered optical signal from the speckle pattern and a detector array for delivering, when illuminated by said filtered optical signal, an electrical signal. Said system further comprises means for computing a cryptographic key from the electrical signal, and means for decrypting encrypted data contained in the information carrier from the cryptographic key. It finds its application in copy protection of content carriers such as optical discs or in smart cards.

    摘要翻译: 本发明涉及一种用于信息载体的复制保护的系统,所述系统包括用于在由光源照射时传送散斑图案的衍射层,相对于衍射层对准的空间滤光器,用于传送 来自散斑图案的经滤波的光信号和用于当由所述滤波的光信号照亮时传送电信号的检测器阵列。 所述系统还包括用于从电信号计算加密密钥的装置,以及用于从加密密钥对包含在信息载体中的加密数据进行解密的装置。 它可以应用于诸如光盘或智能卡等内容载体的复制保护。

    LED light source
    7.
    发明授权

    公开(公告)号:US09357607B2

    公开(公告)日:2016-05-31

    申请号:US14124733

    申请日:2012-06-04

    IPC分类号: H05B37/04 H05B33/08

    摘要: A LED light source comprises—a full bridge rectifier equipped with a first input terminal and a second input terminal for coupling to output terminals of the phase cut dimmer, —a series arrangement comprising N LED loads, a first and second end of said series arrangement being coupled to a first output terminal and a second output terminal of the full bridge rectifier respectively, —control means for during a period of the rectified AC supply voltage subsequently making the LED loads comprised in the first series arrangement carry a current, one by one and in dependency of the momentary amplitude of the rectified AC supply voltage when the momentary amplitude increases and for subsequently making the LED loads stop carrying a current, one by one, and in dependency of the momentary amplitude of the rectified AC supply voltage when the momentary amplitude decreases, said control means controlling the current through the LED loads at zero when the output voltage of the phase cut dimmer equals zero and controlling the current through the LED loads at a value that is independent from the phase angle of the phase cut dimmer when the output voltage of the phase cut dimmer differs from zero Volt. In order to make the LED light source compatible with a phase cut dimmer, the LED light source is further equipped with—a switchable bleeder current source coupled between the first and second output terminal of the full bridge rectifier, —a latch coupled between the first and second output terminals of the full rectifier bridge and comprising a series arrangement of a resistor and a capacitor to prevent the current through the dimmer from crossing zero after a leading edge generated by the phase cut dimmer, in case the phase cut dimmer is a leading edge phase cut dimmer, —a unidirectional element arranged in series with the capacitor for preventing discharging of the capacitor via the LED loads or the adjustable bleeder current source, and—a clamp circuit coupled to the capacitor and comprising a current source for discharging the capacitor and providing a low ohmic path for the dimmer current when the dimmer is off.

    LIGHT GENERATING DEVICE
    8.
    发明申请
    LIGHT GENERATING DEVICE 有权
    发光装置

    公开(公告)号:US20150061499A1

    公开(公告)日:2015-03-05

    申请号:US14117391

    申请日:2012-05-11

    IPC分类号: H05B33/08

    摘要: A light generating device (1) is provided with at least a voltage input (21) adapted for receiving a variable voltage, at least three LED circuits (10), coupled with said voltage input (21), wherein each LED circuit (10) comprises a LED unit (14) and controllable current regulator (15) to control the current through said LED circuit (10). The light generating device (1) further comprises a controllable switch matrix (30) comprising a plurality of switches (25, 26, 27), said switch matrix (30) is configured to operate in at least three different switching modes and a controller (50), connected at least with said switch matrix (30), configured to determine said variable operating voltage and to control the switching mode of said switch matrix (30) in dependence of the determined operating voltage. To provide an efficient operation of such device (1) with a variable operating voltage, such as an AC voltage, in a first switching mode, said LED units (10) are connected parallel to each other, in a second switching mode, at least two of said LED units (10) are connected in series and in a third switching mode, said LED units 10 are connected in series with each other.

    摘要翻译: 光发生装置(1)至少设置有用于接收可变电压的电压输入(21),与所述电压输入(21)耦合的至少三个LED电路(10),其中每个LED电路(10) 包括LED单元(14)和可控电流调节器(15),以控制通过所述LED电路(10)的电流。 光产生装置(1)还包括可控开关矩阵(30),其包括多个开关(25,26,27),所述开关矩阵(30)被配置为以至少三种不同的开关模式操作,以及控制器 至少与所述开关矩阵(30)相连接,被配置为确定所述可变工作电压并且根据所确定的工作电压来控制所述开关矩阵(30)的开关模式。 为了在第一开关模式中提供具有诸如AC电压的可变工作电压的这种装置(1)的有效操作,所述LED单元(10)以第二开关模式至少并联连接 两个所述LED单元(10)串联连接,在第三开关模式下,所述LED单元10彼此串联连接。

    Hydrogel based device for detecting an environmental state
    9.
    发明授权
    Hydrogel based device for detecting an environmental state 有权
    用于检测环境状态的基于水凝胶的装置

    公开(公告)号:US08840839B2

    公开(公告)日:2014-09-23

    申请号:US12593305

    申请日:2008-04-02

    IPC分类号: G01N21/00 A61B5/00 A61B5/1459

    摘要: A transducer device for detecting an environmental state within a biological material including a channel comprising a fluid, a hydrogel material, which is adapted to change its volume when getting into contact with an environmental material and/or when detecting an environmental change, and which is mechanically coupled to the channel such that the volume of the channel changes when the volume of the hydrogel material changes. The transducer device further includes a sensor, which is adapted to generate a signal upon detection of the change of a physical property of the fluid that is induced by the volume change of the channel. By applying the transducer device, an accurate monitoring of physiological parameters, for which the hydrogel material is sensitive is possible. It is also possible to apply the transducer device outside of the bodily lumen, for example to monitor the blood of a patient outside the bodily lumen.

    摘要翻译: 一种用于检测生物材料内的环境状态的换能器装置,包括包含流体的通道,水凝胶材料,其在与环境材料接触时和/或当检测到环境变化时改变其体积,并且其是 机械地耦合到通道,使得当水凝胶材料的体积变化时,通道的体积变化。 换能器装置还包括传感器,其适于在检测到由通道的体积变化引起的流体的物理特性的变化时产生信号。 通过应用传感器装置,水凝胶材料敏感的生理参数的准确监测是可能的。 也可以将换能器装置应用于体腔外,例如监测患者体外的血液。

    METHOD AND DEVICE FOR LIGHTING A SPACE USING AN LED STRING
    10.
    发明申请
    METHOD AND DEVICE FOR LIGHTING A SPACE USING AN LED STRING 有权
    使用LED灯照明空间的方法和装置

    公开(公告)号:US20130342120A1

    公开(公告)日:2013-12-26

    申请号:US14004745

    申请日:2012-03-12

    IPC分类号: H05B33/08

    摘要: In a method of lighting at least part of a space, a light emitting diode (LED) string is used. The LED string comprises a first LED segment and at least one further LED segment, which are connected in series, each LED segment comprising at least one LED. The LED string is powered by a rectified AC voltage. The first LED segment is powered when the rectified AC voltage is above a first voltage level, and the first LED segment and the further LED segment are powered when the rectified AC voltage is above a second voltage level higher than the first voltage level. The first LED segment is arranged to radiate light to a first volume of the space, and the further LED segment is arranged to radiate light to a second volume of the space, the first volume being at least partly different from the second volume. The first volume may at least partly overlap the second volume.

    摘要翻译: 在照亮至少一部分空间的方法中,使用发光二极管(LED)串。 LED串包括串联连接的第一LED段和至少一个另外的LED段,每个LED段包括至少一个LED。 LED串由整流的交流电压供电。 当整流的AC电压高于第一电压电平时,第一LED段被供电,并且当整流的AC电压高于高于第一电压电平的第二电压电平时,第一LED段和另外的LED段被供电。 第一LED区段被布置成将光辐射到空间的第一体积,并且另外的LED区段被布置成将光辐射到空间的第二体积,第一体积与第二体积至少部分不同。 第一体积可以至少部分地与第二体积重叠。