Pressure sensor diaphragm with overpressure protection

    公开(公告)号:US10203258B2

    公开(公告)日:2019-02-12

    申请号:US15275688

    申请日:2016-09-26

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor includes a base having at least one high-pressure contact portion and a diaphragm positioned over the base and having an external top surface facing away from the base and internal surfaces facing the base. The internal surfaces comprising a raised perimeter surrounding an interior, a raised central boss within the interior, and a raised boss arm contiguous with and extending from the raised perimeter toward the interior. At least one of the raised boss arm and raised central boss are aligned with and contact a high-pressure contact portion of the base during an over-pressure event.

    PRESSURE SENSOR DIAPHRAGM WITH OVERPRESSURE PROTECTION

    公开(公告)号:US20180087988A1

    公开(公告)日:2018-03-29

    申请号:US15275688

    申请日:2016-09-26

    Applicant: Rosemount Inc.

    CPC classification number: G01L19/0618 G01L9/0047 G01L9/0054

    Abstract: A pressure sensor includes a base having at least one high-pressure contact portion and a diaphragm positioned over the base and having an external top surface facing away from the base and internal surfaces facing the base. The internal surfaces comprising a raised perimeter surrounding an interior, a raised central boss within the interior, and a raised boss arm contiguous with and extending from the raised perimeter toward the interior. At least one of the raised boss arm and raised central boss are aligned with and contact a high-pressure contact portion of the base during an over-pressure event.

    High over-pressure capable silicon die pressure sensor with extended pressure signal output

    公开(公告)号:US09719872B2

    公开(公告)日:2017-08-01

    申请号:US14868901

    申请日:2015-09-29

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

    PRESSURE SENSOR ASSEMBLY
    5.
    发明申请

    公开(公告)号:US20210396615A1

    公开(公告)日:2021-12-23

    申请号:US16906194

    申请日:2020-06-19

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor assembly includes a pressure sensor, a pedestal and an electrically conductive header having a header cavity. The pressure sensor includes, an electrically conductive sensing layer having a sensor diaphragm, an electrically conductive backing layer having a bottom surface that is bonded to the sensing layer, an electrically insulative layer having a bottom surface that is bonded to a top surface of the backing layer, and a sensor element having an electrical parameter that changes based on a deflection of the sensor diaphragm in response to a pressure difference. The pedestal is bonded to the electrically insulative layer and attached to the header within the header cavity.

    HIGH OVER-PRESSURE CAPABLE SILICON DIE PRESSURE SENSOR WITH EXTENDED PRESSURE SIGNAL OUTPUT

    公开(公告)号:US20170089786A1

    公开(公告)日:2017-03-30

    申请号:US14868901

    申请日:2015-09-29

    Applicant: Rosemount Inc.

    Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

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