-
公开(公告)号:US20190187553A1
公开(公告)日:2019-06-20
申请号:US15845456
申请日:2017-12-18
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Daniel J. Linnen , Jianhua Zhu , Srikar Peesari , Kirubakaran Periyannan , Avinash Rajagiri , Shantanu Gupta , Jagdish Sabde , Ashish Ghai , Deepak Bharadwaj
IPC: G03F1/50
CPC classification number: G03F1/50
Abstract: An apparatus is provided that includes a reticle including a die, the reticle configured to increase a number of partial die that can be successfully used as partially operable die.