公开(公告)号：US20160020011A2

公开(公告)日：2016-01-21

申请号：US13630036

申请日：2012-09-28

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sarbeswar Sahoo ,  Meng Zhu ,  Michael C. Kautzky ,  Gregory S. Girolami ,  John R. Abelson ,  Pengyi Zhang ,  Shaista Babar

IPC: H01F41/14 ,  B32B5/16 ,  G11B5/73 ,  H01F10/16 ,  G11B5/85 ,  G11B5/65 ,  B32B33/00 ,  B32B1/00

CPC classification number: H01F10/14 ,  G11B5/65 ,  G11B5/653 ,  G11B5/656 ,  G11B5/732 ,  G11B5/8404 ,  G11B5/85 ,  H01F10/16 ,  H01F41/22 ,  Y10T428/24628 ,  Y10T428/25

Abstract: Methods of forming a layer of magnetic material on a substrate, the method including: configuring a substrate in a chamber; controlling the temperature of the substrate at a substrate temperature, the substrate temperature being at or below about 250° C.; and introducing one or more precursors into the chamber, the one or more precursors including: cobalt (Co), nickel (Ni), iron (Fe), or combinations thereof, wherein the precursors chemically decompose at the substrate temperature, and wherein a layer of magnetic material is formed on the substrate, the magnetic material including at least a portion of the one or more precursors, and the magnetic material having a magnetic flux density of at least about 1 Tesla (T).

Abstract translation: 在基板上形成磁性材料层的方法，所述方法包括：在室内配置基板; 在衬底温度下控制衬底的温度，衬底温度在或低于约250℃; 并且将一种或多种前体引入所述室中，所述一种或多种前体包括：钴（Co），镍（Ni），铁（Fe）或其组合，其中所述前体在衬底温度下化学分解， 磁性材料形成在衬底上，磁性材料包括一种或多种前体的至少一部分，磁性材料具有至少约1特斯拉（T）的磁通密度。