公开(公告)号：US09964358B2

公开(公告)日：2018-05-08

申请号：US15141946

申请日：2016-04-29

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Jun Matsushita ,  Takashi Miyamoto ,  Konosuke Hayashi ,  Osamu Yamazaki

IPC: F26B3/30 ,  H01L21/67

CPC classification number: F26B3/30 ,  F26B5/08 ,  H01L21/67115

Abstract: The substrate processing unit 1 comprises the rotating table 31 configured to hold substrate W, the processing chamber 37 which accommodates the rotating table 31, a lamp 61 is provided above the processing chamber 37 and configured to heat the surface of substrate W, the lamp chamber 60 which accommodates that lamp 61, a transmission window 62 disposed below the lamp chamber 60, and a plurality of nozzle 64 which supply cooling fluid G to the transmission window 62. Then the substrate processing unit 1 can suppress generating of a water mark or pattern collapse, and can perform good substrate processing.

公开(公告)号：US20230420288A1

公开(公告)日：2023-12-28

申请号：US18212395

申请日：2023-06-21

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Takahiro HAMADA ,  Osamu Yamazaki

IPC: H01L21/687 ,  B23Q1/03

CPC classification number: H01L21/68728 ,  B23Q1/03

Abstract: According to one embodiment, a substrate processing apparatus includes a rotating table configured to rotate a substrate and a plurality of fixing members configured to fix the substrate on the rotating table by grasping the substrate while abutting an outer periphery of the substrate, wherein each fixing member includes a curved surface on a side that abuts the substrate, a reduced portion formed to be connected to an end of the curved surface and having a width which is continuously reduced in the first direction from a boundary with the curved surface, a first sloping surface formed on a top portion to slope downwards in the first direction, and a support portion formed on the curved surface and configured to support the substrate such that a top surface of the top portion is flush with an upper surface of the substrate in a state where the substrate is grasped.