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公开(公告)号：US20220102618A1
公开(公告)日：2022-03-31
申请号：US17485719
申请日：2021-09-27
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Irene MARTINI , Davide ASSANELLI , Paolo FERRARINI , Carlo Luigi PRELINI , Fabio QUAGLIA
IPC: H01L41/08 , H01L41/047 , H01L41/277 , B81B7/02 , H01L41/113
Abstract: A piezoelectric microelectromechanical structure is provided with a piezoelectric stack having a main extension in a horizontal plane and a variable section in a plane transverse to the horizontal plane. The stack is formed by a bottom-electrode region, a piezoelectric material region arranged on the bottom-electrode region, and a top-electrode region arranged on the piezoelectric material region. The piezoelectric material region has, as a result of the variable section, a first thickness along a vertical axis transverse to the horizontal plane at a first area, and a second thickness along the same vertical axis at a second area. The second thickness is smaller than the first thickness. The structure at the first and second areas can form piezoelectric detector and a piezoelectric actuator, respectively.
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Patent Agency Ranking
公开(公告)号：US20210177061A1
公开(公告)日：2021-06-17
申请号：US17118452
申请日：2020-12-10
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Irene MARTINI
Abstract: A microfluidic dispensing device has a plurality of chambers arranged in sequence, each having an inlet receiving a liquid to be dispensed and a nozzle for emitting a drop of liquid. An actuator in each chamber receives an actuation quantity and causes a drop of liquid to be emitted by the nozzle of the respective chamber. A drop emission detection element in each chamber generates an actuation command upon detecting the emission of a drop of liquid. A sequential activation electric circuit includes a plurality of sequential activation elements, one for each chamber, each coupled to the drop emission detection element of the respective chamber and to an actuator associated with a subsequent chamber in the sequence of chambers. Each sequential activation element receives the actuation command from the drop emission detection element associated with the respective chamber and activates the actuator associated with the subsequent chamber in the sequence of chambers.
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3.发明申请公开(公告)号：US20200235280A1
公开(公告)日：2020-07-23
申请号：US16746676
申请日：2020-01-17
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Irene MARTINI
Abstract: A MEMS optical device having an optically active portion and an actuation portion adjacent to each other. The MEMS optical device includes a body, a piezoelectric actuator, and a cap. The body is formed by a substrate, housing a cavity containing a fluid and by a deformable region fixed to the substrate, suspended over the cavity and forming a membrane. The piezoelectric actuator extends on the deformable region at the actuation portion and is protected by the cap, which is coupled to the body at the actuation portion and defines a chamber that houses the piezoelectric actuator.
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公开(公告)号：US20220350134A1
公开(公告)日：2022-11-03
申请号：US17729558
申请日：2022-04-26
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto CARMINATI , Nicolo' BONI , Irene MARTINI , Massimiliano MERLI , Laura OGGIONI
Abstract: A process for manufacturing a microelectromechanical mirror device includes, in a semiconductor wafer, defining a support frame, a plate connected to the support frame so as to be orientable around at least one rotation axis, and cantilever structures extending from the support frame and coupled to the plate so that bending of the cantilever structures causes rotations of the plate around the at least one rotation axis. The process further includes forming piezoelectric actuators on the cantilever structures, forming pads on the support frame, and forming spacer structures protruding from the support frame more than both the pads and the stacks of layers forming the piezoelectric actuators.
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公开(公告)号：US20210206625A1
公开(公告)日：2021-07-08
申请号：US17208918
申请日：2021-03-22
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Dario PACI , Domenico GIUSTI , Irene MARTINI
Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
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6.发明申请公开(公告)号：US20200369029A1
公开(公告)日：2020-11-26
申请号：US16879269
申请日：2020-05-20
Applicant: STMicroelectronics S.r.l.
Inventor： Davide ASSANELLI , Irene MARTINI , Lorenzo VINCIGUERRA , Carla Maria LAZZARI , Paolo FERRARINI
IPC: B41J2/14 , H01L41/047 , H01L41/053 , H01L41/09 , H01L41/187 , H01L41/23 , H01L41/29 , H01L41/332
Abstract: A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.
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