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公开(公告)号:US10162048B2
公开(公告)日:2018-12-25
申请号:US15392032
申请日:2016-12-28
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Francois Roy , Boris Rodrigues , Marie Guillon , Yvon Cazaux , Benoit Giffard
IPC: G01S7/48 , H01L27/146 , H04N5/374 , G01S7/491 , G01S7/486
Abstract: A pixel is formed on a semiconductor substrate that includes a photosensitive area having a first doped layer and a charge collection area of a first conductivity type extending through at least part of the first doped layer. At least two charge storage areas, each including a well of the first conductivity type, are separated from the charge collection area at least by a first portion of the first layer. The first portion is covered by a first gate. Each charge storage area is laterally delimited by two insulated conductive electrodes. A second doped layer of the second conductivity type covers the charge collection area and the charge storage areas.
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公开(公告)号:US20170194368A1
公开(公告)日:2017-07-06
申请号:US15392032
申请日:2016-12-28
Applicant: STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
Inventor: Francois Roy , Boris Rodrigues , Marie Guillon , Yvon Cazaux , Benoit Giffard
IPC: H01L27/146 , H04N5/374
CPC classification number: G01S7/4863 , G01S7/4914 , H01L27/14607 , H01L27/1461 , H01L27/14612 , H01L27/14625 , H01L27/1463 , H01L27/14641 , H01L27/14643 , H01L27/14645 , H01L27/14683 , H04N5/374
Abstract: A pixel is formed on a semiconductor substrate that includes a photosensitive area having a first doped layer and a charge collection area of a first conductivity type extending through at least part of the first doped layer. At least two charge storage areas, each including a well of the first conductivity type, are separated from the charge collection area at least by a first portion of the first layer. The first portion is covered by a first gate. Each charge storage area is laterally delimited by two insulated conductive electrodes. A second doped layer of the second conductivity type covers the charge collection area and the charge storage areas.
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公开(公告)号:US20170192090A1
公开(公告)日:2017-07-06
申请号:US15387883
申请日:2016-12-22
Applicant: STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
Inventor: Francois Roy , Marie Guillon , Yvon Cazaux , Boris Rodrigues , Alexis Rochas
IPC: G01S7/486 , H01L27/146
CPC classification number: G01S7/4863 , G01S7/4914 , H01L27/14607 , H01L27/1461 , H01L27/14612 , H01L27/14625 , H01L27/1463 , H01L27/14641 , H01L27/14643 , H01L27/14645 , H01L27/14683 , H04N5/374
Abstract: A time-of-flight detection pixel includes a photosensitive area including a first doped layer and a charge collection area extending in the first doped layer. At least two charge storage areas extend from the charge collection area, each including a first well more heavily doped than the charge collection area and separated from the charge collection area by a first portion of the first doped layer which is coated with a gate. Each charge storage area is laterally delimited by two insulated conductive electrodes, extending parallel to each other and facing each other. A second heavily doped layer of opposite conductivity coats the pixel except for at each portion of the first doped layer coated with the gate.
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