公开(公告)号：US20040129989A1

公开(公告)日：2004-07-08

申请号：US10650452

申请日：2003-08-27

申请人： STMicroelectronics S.r.I. ,  Nokia Corporation

发明人： Sarah Zerbini ,  Angelo Merassi ,  Guido Spinola Durante ,  Biagio De Masi

IPC分类号： G01L001/06 ,  G01P015/03 ,  H01L023/00 ,  H04Q007/34 ,  G01B005/30

CPC分类号： G01P1/127 ,  G01P15/06 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/18 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H35/146

摘要： An inertial sensor with failure threshold includes a first body and a second body, which can move relative to one another and are constrained by a plurality of elastic elements, and a sample element connected between the first body and the second body and shaped so as to be subjected to a stress when the second body is outside of a relative resting position with respect to the first body. The sample element has at least one weakened region. The sensor may also include additional sample elements connected between the first and second bodies.

摘要翻译： 具有故障阈值的惯性传感器包括第一主体和第二主体，其可以相对于彼此移动并被多个弹性元件约束;以及样本元件，其连接在第一主体和第二主体之间，并且成形为 当第二主体相对于第一主体位于相对静止位置之外时受到应力。 样品元件具有至少一个弱化区域。 传感器还可以包括连接在第一和第二主体之间的附加样本元件。

公开(公告)号：US20020189354A1

公开(公告)日：2002-12-19

申请号：US10128133

申请日：2002-04-23

申请人： STMicroelectronics S.r.I.

发明人： Guido Spinola Durante ,  Sarah Zerbini ,  Simone Gardella

IPC分类号： G01P015/08

CPC分类号： G01C19/5747

摘要： The gyroscope is formed by a driving system including a driving mass having an open concave shape; an accelerometer including a sensing mass and comprising mobile sensing electrodes; a linkage connecting the driving mass to the sensing mass. The sensing mass is surrounded on three sides by the driving mass and has a peripheral portion not facing the sensing mass. The mobile sensing electrodes extend integral with the sensing mass from the peripheral portion not facing the driving mass and are interleaved with fixed sensing electrodes. Thereby, there are no passing electrical connections extending below the sensing mass. Moreover the linkage includes springs placed equidistant from the center of gravity of the accelerometer, and the gyroscope is anchored to the substrate with anchoring springs placed equidistant from the center of gravity of the assembly formed by the driving system and by the accelerometer.

摘要翻译： 陀螺仪由包括具有开口凹形状的驱动块的驱动系统形成; 包括感测质量并包括移动感测电极的加速度计; 将驱动质量与感测质量连接的连杆。 感测质量被驱动质量块三面围绕，并且具有不面向感测质量的周边部分。 移动感测电极与来自不面向驱动质量块的周边部分的感测质量一体地延伸并且与固定感测电极交错。 因此，在感测质量下方没有延伸的电连接。 此外，联动装置包括与加速度计的重心等距离的弹簧，并且陀螺仪通过与由驱动系统和加速度计形成的组件的重心等距离的锚定弹簧锚定到基底。

公开(公告)号：US20040121504A1

公开(公告)日：2004-06-24

申请号：US10650275

申请日：2003-08-27

申请人： STMicroelectronics S.r.l. ,  Nokia Corporation

发明人： Sarah Zerbini ,  Angelo Merassi ,  Guido Spinola Durante ,  Biagio De Masi

IPC分类号： H01L021/66 ,  G01R031/26 ,  H01L021/00

CPC分类号： H01H1/0036 ,  G01P1/023 ,  G01P15/06 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/18 ,  G01P2015/0814 ,  H01H35/146

摘要： A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.

摘要翻译： 用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。 该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。 该方法还可以包括在基底上形成连接到身体的附加样品元件。