公开(公告)号：US11418888B2

公开(公告)日：2022-08-16

申请号：US16749579

申请日：2020-01-22

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Fabrizio Cerini ,  Enri Duqi ,  Silvia Adorno ,  Lorenzo Baldo

IPC: H04R19/00 ,  H04R19/02 ,  B81B3/00 ,  B81C1/00 ,  H04R1/02 ,  H04R17/00 ,  H04R31/00

Abstract: An actuation structure of a MEMS electroacoustic transducer is formed in a die of semiconductor material having a monolithic body with a front surface and a rear surface extending in a horizontal plane x-y plane and defined in which are: a frame; an actuator element arranged in a central opening defined by the frame; cantilever elements, coupled at the front surface between the actuator element and the frame; and piezoelectric regions arranged on the cantilever elements and configured to be biased to cause a deformation of the cantilever elements by the piezoelectric effect. A first stopper arrangement is integrated in the die and configured to interact with the cantilever elements to limit a movement thereof in a first direction of a vertical axis orthogonal to the horizontal plane, x-y plane towards the underlying central opening.

公开(公告)号：US11051113B2

公开(公告)日：2021-06-29

申请号：US16813477

申请日：2020-03-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Fabrizio Cerini ,  Silvia Adorno ,  Federico Vercesi

IPC: H04R17/02 ,  B81B3/00 ,  B81C1/00 ,  H01L41/113

Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.

公开(公告)号：US12068362B2

公开(公告)日：2024-08-20

申请号：US17494475

申请日：2021-10-05

Applicant: STMicroelectronics S.r.l.

Inventor： Fabrizio Cerini ,  Silvia Adorno ,  Dario Paci ,  Marco Salina

IPC: H01L23/522 ,  H01L23/528 ,  H01L23/538 ,  H01L49/02

CPC classification number: H01L28/86 ,  H01L23/5223

Abstract: An electrode structure includes a pad of conductive material, and a conductive strip having a first end physically and electrically coupled to the pad. The pad includes an annular element internally defining a through opening. The first end of the conductive strip is physically and electrically coupled to the annular element by a transition region so that, when the conductive strip undergoes expansion by the thermal effect, a stress spreads from the conductive strip to the annular element by the transition region.

公开(公告)号：US11603311B2

公开(公告)日：2023-03-14

申请号：US17072813

申请日：2020-10-16

Applicant: STMicroelectronics S.r.l.

Inventor： Enri Duqi ,  Fabrizio Cerini ,  Lorenzo Baldo

IPC: B81B7/02 ,  A24F40/51 ,  B81B7/00

Abstract: A MEMS switch is actuatable by a fluid, and includes a piezoelectric pressure sensor that detects the movement of a fluid generating a negative pressure. The piezoelectric pressure sensor is formed by a chip of semiconductor material having a through cavity and a sensitive membrane, which extends over the through cavity and has a first and a second surface. The piezoelectric pressure sensor is mounted on a face of a board having a through hole so that the through cavity overlies and is in fluid connection with the through hole. The board has a fixing structure, which enables securing in an opening of a partition wall separating a first and a second space from each other. The board is arranged so that the first surface of the sensitive membrane faces the first space, and the second surface of the sensitive membrane faces the second space.

公开(公告)号：US11350218B2

公开(公告)日：2022-05-31

申请号：US16882343

申请日：2020-05-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Fabrizio Cerini ,  Silvia Adorno

IPC: H04R17/02 ,  H01L41/113 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09

Abstract: A piezoelectric microelectromechanical acoustic transducer, having a semiconductor substrate with a frame portion and a through cavity defined internally by the frame portion; an active membrane, suspended above the through cavity and anchored, at a peripheral portion thereof, to the frame portion of the substrate by an anchorage structure, a plurality of piezoelectric sensing elements carried by a front surface of the active membrane so as to detect mechanical stresses of the active membrane; a passive membrane, suspended above the through cavity, underneath the active membrane, interposed between the through cavity and a rear surface of the active membrane; and a pillar element, which fixedly couples, and is centrally interposed between, the active membrane and the passive membrane. A ventilation hole passes through the entire active membrane, the passive membrane and the pillar element to set the through cavity in fluidic communication with the front surface of the active membrane.